JPS5638837A - Pattern recognizing device - Google Patents

Pattern recognizing device

Info

Publication number
JPS5638837A
JPS5638837A JP11451579A JP11451579A JPS5638837A JP S5638837 A JPS5638837 A JP S5638837A JP 11451579 A JP11451579 A JP 11451579A JP 11451579 A JP11451579 A JP 11451579A JP S5638837 A JPS5638837 A JP S5638837A
Authority
JP
Japan
Prior art keywords
signal
pattern
horizontal
transformed
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11451579A
Other languages
Japanese (ja)
Inventor
Nobushi Suzuki
Sumio Nagashima
Katsuhiko Aoyanagi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP11451579A priority Critical patent/JPS5638837A/en
Publication of JPS5638837A publication Critical patent/JPS5638837A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Image Processing (AREA)
  • Dicing (AREA)
  • Image Analysis (AREA)

Abstract

PURPOSE:To perform a dicing with an excellent accuracy by a method wherein a photoelectric image signal, obtained by performing a two-dimensional scanning on the region where a cross-shape recognized pattern is included, is transformed into a picture element and a position recognition of pattern is performed by generating a detecting signal for every horizontal and vertical scanning lines and by performing an operating processing. CONSTITUTION:A photoelectric image signal V is obtained by performing a two- dimensional scanning on a region, including a cross-shape recognized pattern 2a such as a dicing pattern on a semiconductor wafer, in accordance with horizontal and vertical synchronizing signals using an ITV 1. This signal V is transformed into a binary signal with a signal processing circuit 4 and a horizontal scanning synchronized signal LE and a vertical scanning synchronized signal FE are obtained. A clock signal CK sent from the ITV control circuit 3 are gate processed by these synchronized signals and are transformed into a clock signal HCK. Extraction signals DV and DH are obtained at a vertical direction detecting circuit 5 and a horizontal direction detecting circuit 6 and the position of the pattern is sensed by processing on an electronic computer. Hence, a pattern position recognition can be performed at a high speed with a high degree of accuracy.
JP11451579A 1979-09-06 1979-09-06 Pattern recognizing device Pending JPS5638837A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11451579A JPS5638837A (en) 1979-09-06 1979-09-06 Pattern recognizing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11451579A JPS5638837A (en) 1979-09-06 1979-09-06 Pattern recognizing device

Publications (1)

Publication Number Publication Date
JPS5638837A true JPS5638837A (en) 1981-04-14

Family

ID=14639676

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11451579A Pending JPS5638837A (en) 1979-09-06 1979-09-06 Pattern recognizing device

Country Status (1)

Country Link
JP (1) JPS5638837A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58138896U (en) * 1982-03-16 1983-09-19 国際制御株式会社 Disable control circuit for optical safety device
JPS61134882A (en) * 1984-12-05 1986-06-21 Hitachi Electronics Eng Co Ltd Device for inspecting pattern external appearance of printed board
JP2011022127A (en) * 2009-07-17 2011-02-03 Inko Son Safety-pin type electronic measuring device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58138896U (en) * 1982-03-16 1983-09-19 国際制御株式会社 Disable control circuit for optical safety device
JPH0142720Y2 (en) * 1982-03-16 1989-12-13
JPS61134882A (en) * 1984-12-05 1986-06-21 Hitachi Electronics Eng Co Ltd Device for inspecting pattern external appearance of printed board
JP2011022127A (en) * 2009-07-17 2011-02-03 Inko Son Safety-pin type electronic measuring device

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