JPS5636132A - Sample shifter for electron ray exposing device, etc. - Google Patents
Sample shifter for electron ray exposing device, etc.Info
- Publication number
- JPS5636132A JPS5636132A JP11152979A JP11152979A JPS5636132A JP S5636132 A JPS5636132 A JP S5636132A JP 11152979 A JP11152979 A JP 11152979A JP 11152979 A JP11152979 A JP 11152979A JP S5636132 A JPS5636132 A JP S5636132A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- stage
- electron beams
- electron
- ferromagnetic material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Beam Exposure (AREA)
Abstract
PURPOSE:To eliminate the deflection of electron beams by a method wherein a sample chamber formed by a ferromagnetic material and a sample stage, whose upper surface portion is formed by a high permeability material, are magnetically connected and a closed magnetic path is made up. CONSTITUTION:A sample chamber 1 on which an electron optical camera 3 containing a projecting lens 2, other lens systems and an electron gun is placed is built up by a ferromagnetic material such as soft steel while a stage 5, to which a nonmagnetic holder 7 is attached through a high viscous material 6 such as Teflon and on which a sample 4 is set, a stage 8, guide rails 9, 14, etc. are formed by a high permeability material such as pure iron. Thus, a closed magnetic path shown in a broken line is made up, the deflection of electron beams is prevented even when a driving mechanism, etc. contain a ferromagnetic material, and exposure by the electron beams having higher speed and high accuracy can be conducted.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11152979A JPS5636132A (en) | 1979-08-31 | 1979-08-31 | Sample shifter for electron ray exposing device, etc. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11152979A JPS5636132A (en) | 1979-08-31 | 1979-08-31 | Sample shifter for electron ray exposing device, etc. |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5636132A true JPS5636132A (en) | 1981-04-09 |
JPS5741814B2 JPS5741814B2 (en) | 1982-09-04 |
Family
ID=14563641
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11152979A Granted JPS5636132A (en) | 1979-08-31 | 1979-08-31 | Sample shifter for electron ray exposing device, etc. |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5636132A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58140336A (en) * | 1982-02-12 | 1983-08-20 | Shin Etsu Chem Co Ltd | Manufacture of base material for optical fiber |
JPS59137337A (en) * | 1983-01-21 | 1984-08-07 | Sumitomo Electric Ind Ltd | Manufacture of glass base material for optical fiber |
JPS6046938A (en) * | 1983-08-19 | 1985-03-14 | Hitachi Cable Ltd | Manufacture of optical fiber preform |
JPS61174146A (en) * | 1985-01-25 | 1986-08-05 | Sumitomo Electric Ind Ltd | Optical fiber and its production |
JPS62114438U (en) * | 1986-01-10 | 1987-07-21 | ||
US6730916B1 (en) | 1999-10-22 | 2004-05-04 | Canon Kabushiki Kaisha | Electron beam lithography apparatus |
-
1979
- 1979-08-31 JP JP11152979A patent/JPS5636132A/en active Granted
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58140336A (en) * | 1982-02-12 | 1983-08-20 | Shin Etsu Chem Co Ltd | Manufacture of base material for optical fiber |
JPS631254B2 (en) * | 1982-02-12 | 1988-01-12 | Shinetsu Chem Ind Co | |
JPS59137337A (en) * | 1983-01-21 | 1984-08-07 | Sumitomo Electric Ind Ltd | Manufacture of glass base material for optical fiber |
JPS6046938A (en) * | 1983-08-19 | 1985-03-14 | Hitachi Cable Ltd | Manufacture of optical fiber preform |
JPS61174146A (en) * | 1985-01-25 | 1986-08-05 | Sumitomo Electric Ind Ltd | Optical fiber and its production |
JPH0140782B2 (en) * | 1985-01-25 | 1989-08-31 | Sumitomo Electric Industries | |
JPS62114438U (en) * | 1986-01-10 | 1987-07-21 | ||
US6730916B1 (en) | 1999-10-22 | 2004-05-04 | Canon Kabushiki Kaisha | Electron beam lithography apparatus |
Also Published As
Publication number | Publication date |
---|---|
JPS5741814B2 (en) | 1982-09-04 |
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