JPS5634844B2 - - Google Patents
Info
- Publication number
- JPS5634844B2 JPS5634844B2 JP3600276A JP3600276A JPS5634844B2 JP S5634844 B2 JPS5634844 B2 JP S5634844B2 JP 3600276 A JP3600276 A JP 3600276A JP 3600276 A JP3600276 A JP 3600276A JP S5634844 B2 JPS5634844 B2 JP S5634844B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
- G11B7/09—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following
- G11B7/0908—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for focusing only
- G11B7/0914—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam or focus plane for the purpose of maintaining alignment of the light beam relative to the record carrier during transducing operation, e.g. to compensate for surface irregularities of the latter or for track following for focusing only by non-optical methods, e.g. capacitive
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/28—Systems for automatic generation of focusing signals
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Automatic Focus Adjustment (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Variable Magnification In Projection-Type Copying Machines (AREA)
- Focusing (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3600276A JPS52119927A (en) | 1976-04-02 | 1976-04-02 | Device for automatic focus control |
| US05/783,141 US4153341A (en) | 1976-04-02 | 1977-03-31 | Automatic focusing apparatus |
| NLAANVRAGE7703610,A NL170462C (nl) | 1976-04-02 | 1977-04-01 | Optische inrichting met automatische scherptehandhaving. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3600276A JPS52119927A (en) | 1976-04-02 | 1976-04-02 | Device for automatic focus control |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52119927A JPS52119927A (en) | 1977-10-07 |
| JPS5634844B2 true JPS5634844B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1981-08-13 |
Family
ID=12457566
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3600276A Granted JPS52119927A (en) | 1976-04-02 | 1976-04-02 | Device for automatic focus control |
Country Status (3)
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5853523Y2 (ja) * | 1979-11-06 | 1983-12-06 | オリンパス光学工業株式会社 | 顕微鏡の自動焦点装置 |
| US4344160A (en) * | 1980-05-02 | 1982-08-10 | The Perkin-Elmer Corporation | Automatic wafer focusing and flattening system |
| JPS5885338U (ja) * | 1981-12-07 | 1983-06-09 | 株式会社日立製作所 | 自動焦点装置 |
| US4594702A (en) * | 1982-11-12 | 1986-06-10 | Discovision Associates | Fluid bearing for axially movable head |
| US5012463A (en) * | 1988-03-14 | 1991-04-30 | Bernoulli Optical Systems Company | Optical read/write storage system for flexible media having bernoulli stabilization at the optical head |
| JPH02185602A (ja) * | 1989-01-11 | 1990-07-20 | Mitsubishi Heavy Ind Ltd | 動翼先端すき間計測装置 |
| JP2006113414A (ja) * | 2004-10-18 | 2006-04-27 | Canon Inc | 光学素子保持装置、鏡筒、露光装置及びマイクロデバイスの製造方法 |
| US7242454B1 (en) * | 2005-12-28 | 2007-07-10 | Asml Netherlands B.V. | Lithographic apparatus, and apparatus and method for measuring an object position in a medium |
| CN102231051A (zh) * | 2011-05-20 | 2011-11-02 | 合肥芯硕半导体有限公司 | 一种光刻机气动自动对焦装置及对焦方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1472298A1 (de) * | 1966-09-29 | 1969-03-13 | Leitz Ernst Gmbh | Anordnung zur Fuehrung des Objektivs eines optischen Geraetes |
| CH461149A (de) * | 1967-05-09 | 1968-08-15 | Conradi G Ag | Einrichtung an einer Zeichenmaschine oder einem Koordinatographen zur mindestens angenähert fehlerfreien Auftragung von Punkten, Linien und Symbolen auf eine zur Führungsebene des Arbeitswagens nicht parallele und/oder nicht plane photographische Schicht |
| US3704657A (en) * | 1971-05-05 | 1972-12-05 | Computervision Corp | Adaptive optical focusing system |
| JPS54182B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1974-04-05 | 1979-01-08 | ||
| US3984678A (en) * | 1974-04-05 | 1976-10-05 | Nippon Jido Seigyo Ltd. | Apparatus for automatically adjusting a microscope in focus |
-
1976
- 1976-04-02 JP JP3600276A patent/JPS52119927A/ja active Granted
-
1977
- 1977-03-31 US US05/783,141 patent/US4153341A/en not_active Expired - Lifetime
- 1977-04-01 NL NLAANVRAGE7703610,A patent/NL170462C/xx not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| NL7703610A (nl) | 1977-10-04 |
| US4153341A (en) | 1979-05-08 |
| NL170462B (nl) | 1982-06-01 |
| NL170462C (nl) | 1982-11-01 |
| JPS52119927A (en) | 1977-10-07 |