JPS5633149U - - Google Patents
Info
- Publication number
- JPS5633149U JPS5633149U JP11365779U JP11365779U JPS5633149U JP S5633149 U JPS5633149 U JP S5633149U JP 11365779 U JP11365779 U JP 11365779U JP 11365779 U JP11365779 U JP 11365779U JP S5633149 U JPS5633149 U JP S5633149U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Feeding Of Workpieces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11365779U JPS5633149U (ja) | 1979-08-17 | 1979-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11365779U JPS5633149U (ja) | 1979-08-17 | 1979-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5633149U true JPS5633149U (ja) | 1981-04-01 |
Family
ID=29345938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11365779U Pending JPS5633149U (ja) | 1979-08-17 | 1979-08-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5633149U (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5423576U (ja) * | 1977-07-18 | 1979-02-16 | ||
| JPS5860553A (ja) * | 1981-10-05 | 1983-04-11 | Tokyo Denshi Kagaku Kabushiki | 縦型自動プラズマ処理装置 |
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1979
- 1979-08-17 JP JP11365779U patent/JPS5633149U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5423576U (ja) * | 1977-07-18 | 1979-02-16 | ||
| JPS5855646Y2 (ja) * | 1977-07-18 | 1983-12-20 | 九州日本電気株式会社 | 半導体基板移し替え装置 |
| JPS5860553A (ja) * | 1981-10-05 | 1983-04-11 | Tokyo Denshi Kagaku Kabushiki | 縦型自動プラズマ処理装置 |
| JPH0557736B2 (ja) * | 1981-10-05 | 1993-08-24 | Tokyo Ohka Kogyo Co Ltd |