JPS5423576U - - Google Patents
Info
- Publication number
- JPS5423576U JPS5423576U JP9612477U JP9612477U JPS5423576U JP S5423576 U JPS5423576 U JP S5423576U JP 9612477 U JP9612477 U JP 9612477U JP 9612477 U JP9612477 U JP 9612477U JP S5423576 U JPS5423576 U JP S5423576U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Pile Receivers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1977096124U JPS5855646Y2 (ja) | 1977-07-18 | 1977-07-18 | 半導体基板移し替え装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1977096124U JPS5855646Y2 (ja) | 1977-07-18 | 1977-07-18 | 半導体基板移し替え装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5423576U true JPS5423576U (ja) | 1979-02-16 |
JPS5855646Y2 JPS5855646Y2 (ja) | 1983-12-20 |
Family
ID=29029712
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1977096124U Expired JPS5855646Y2 (ja) | 1977-07-18 | 1977-07-18 | 半導体基板移し替え装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5855646Y2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016213459A (ja) * | 2015-04-30 | 2016-12-15 | 環球晶圓股▲ふん▼有限公司 | ウエハ移し換え装置及びウエハ移し換え方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5633149U (ja) * | 1979-08-17 | 1981-04-01 |
-
1977
- 1977-07-18 JP JP1977096124U patent/JPS5855646Y2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5633149U (ja) * | 1979-08-17 | 1981-04-01 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016213459A (ja) * | 2015-04-30 | 2016-12-15 | 環球晶圓股▲ふん▼有限公司 | ウエハ移し換え装置及びウエハ移し換え方法 |
Also Published As
Publication number | Publication date |
---|---|
JPS5855646Y2 (ja) | 1983-12-20 |