JPS5423576U - - Google Patents

Info

Publication number
JPS5423576U
JPS5423576U JP9612477U JP9612477U JPS5423576U JP S5423576 U JPS5423576 U JP S5423576U JP 9612477 U JP9612477 U JP 9612477U JP 9612477 U JP9612477 U JP 9612477U JP S5423576 U JPS5423576 U JP S5423576U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9612477U
Other versions
JPS5855646Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977096124U priority Critical patent/JPS5855646Y2/ja
Publication of JPS5423576U publication Critical patent/JPS5423576U/ja
Application granted granted Critical
Publication of JPS5855646Y2 publication Critical patent/JPS5855646Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Pile Receivers (AREA)
JP1977096124U 1977-07-18 1977-07-18 半導体基板移し替え装置 Expired JPS5855646Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977096124U JPS5855646Y2 (ja) 1977-07-18 1977-07-18 半導体基板移し替え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977096124U JPS5855646Y2 (ja) 1977-07-18 1977-07-18 半導体基板移し替え装置

Publications (2)

Publication Number Publication Date
JPS5423576U true JPS5423576U (ja) 1979-02-16
JPS5855646Y2 JPS5855646Y2 (ja) 1983-12-20

Family

ID=29029712

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977096124U Expired JPS5855646Y2 (ja) 1977-07-18 1977-07-18 半導体基板移し替え装置

Country Status (1)

Country Link
JP (1) JPS5855646Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016213459A (ja) * 2015-04-30 2016-12-15 環球晶圓股▲ふん▼有限公司 ウエハ移し換え装置及びウエハ移し換え方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633149U (ja) * 1979-08-17 1981-04-01

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633149U (ja) * 1979-08-17 1981-04-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016213459A (ja) * 2015-04-30 2016-12-15 環球晶圓股▲ふん▼有限公司 ウエハ移し換え装置及びウエハ移し換え方法

Also Published As

Publication number Publication date
JPS5855646Y2 (ja) 1983-12-20

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