JPS5630766A - Method of manufacturing semiconductor device - Google Patents
Method of manufacturing semiconductor deviceInfo
- Publication number
- JPS5630766A JPS5630766A JP10001280A JP10001280A JPS5630766A JP S5630766 A JPS5630766 A JP S5630766A JP 10001280 A JP10001280 A JP 10001280A JP 10001280 A JP10001280 A JP 10001280A JP S5630766 A JPS5630766 A JP S5630766A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- manufacturing semiconductor
- manufacturing
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
- H01L21/225—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities using diffusion into or out of a solid from or into a solid phase, e.g. a doped oxide layer
- H01L21/2251—Diffusion into or out of group IV semiconductors
- H01L21/2252—Diffusion into or out of group IV semiconductors using predeposition of impurities into the semiconductor surface, e.g. from a gaseous phase
- H01L21/2253—Diffusion into or out of group IV semiconductors using predeposition of impurities into the semiconductor surface, e.g. from a gaseous phase by ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
- H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
- H01L21/26513—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors of electrically active species
- H01L21/2652—Through-implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- High Energy & Nuclear Physics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Ceramic Engineering (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US6768679A | 1979-08-20 | 1979-08-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5630766A true JPS5630766A (en) | 1981-03-27 |
Family
ID=22077689
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10001280A Pending JPS5630766A (en) | 1979-08-20 | 1980-07-23 | Method of manufacturing semiconductor device |
Country Status (6)
Country | Link |
---|---|
JP (1) | JPS5630766A (ja) |
CA (1) | CA1131797A (ja) |
DE (1) | DE3027197A1 (ja) |
FR (1) | FR2463825A1 (ja) |
GB (1) | GB2056765A (ja) |
IT (1) | IT1147064B (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02109158U (ja) * | 1989-02-10 | 1990-08-30 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2156383A (en) * | 1984-02-06 | 1985-10-09 | Plessey Co Plc | Infra-red material structures |
JPH0338044A (ja) * | 1989-07-05 | 1991-02-19 | Toshiba Corp | 半導体装置の製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50139678A (ja) * | 1974-04-15 | 1975-11-08 | ||
JPS5255386A (en) * | 1975-10-30 | 1977-05-06 | Sony Corp | Production of semiconductor integrated circuit |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL302630A (ja) * | 1963-01-18 | 1900-01-01 | ||
US3810791A (en) * | 1970-08-03 | 1974-05-14 | Texas Instruments Inc | Process for the fabrication of semiconductor materials |
US3945856A (en) * | 1974-07-15 | 1976-03-23 | Ibm Corporation | Method of ion implantation through an electrically insulative material |
US4055884A (en) * | 1976-12-13 | 1977-11-01 | International Business Machines Corporation | Fabrication of power field effect transistors and the resulting structures |
-
1980
- 1980-03-24 CA CA348,272A patent/CA1131797A/en not_active Expired
- 1980-04-22 GB GB8013170A patent/GB2056765A/en not_active Withdrawn
- 1980-06-23 FR FR8013899A patent/FR2463825A1/fr active Granted
- 1980-07-18 DE DE19803027197 patent/DE3027197A1/de not_active Withdrawn
- 1980-07-23 JP JP10001280A patent/JPS5630766A/ja active Pending
- 1980-08-14 IT IT49502/80A patent/IT1147064B/it active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50139678A (ja) * | 1974-04-15 | 1975-11-08 | ||
JPS5255386A (en) * | 1975-10-30 | 1977-05-06 | Sony Corp | Production of semiconductor integrated circuit |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02109158U (ja) * | 1989-02-10 | 1990-08-30 |
Also Published As
Publication number | Publication date |
---|---|
IT8049502A0 (it) | 1980-08-14 |
IT1147064B (it) | 1986-11-19 |
DE3027197A1 (de) | 1981-03-19 |
CA1131797A (en) | 1982-09-14 |
GB2056765A (en) | 1981-03-18 |
FR2463825B1 (ja) | 1982-12-10 |
FR2463825A1 (fr) | 1981-02-27 |
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