JPS5630727A - Transmission system of exposure data - Google Patents

Transmission system of exposure data

Info

Publication number
JPS5630727A
JPS5630727A JP10692779A JP10692779A JPS5630727A JP S5630727 A JPS5630727 A JP S5630727A JP 10692779 A JP10692779 A JP 10692779A JP 10692779 A JP10692779 A JP 10692779A JP S5630727 A JPS5630727 A JP S5630727A
Authority
JP
Japan
Prior art keywords
data
pattern
memory
code
oblique rectangle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10692779A
Other languages
Japanese (ja)
Inventor
Katsuyuki Nakayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Engineering Corp
Toshiba Corp
Original Assignee
Toshiba Engineering Corp
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Engineering Corp, Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Engineering Corp
Priority to JP10692779A priority Critical patent/JPS5630727A/en
Publication of JPS5630727A publication Critical patent/JPS5630727A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)

Abstract

PURPOSE:To sharply reduce data volume and to cut down time required for a pretreatment for conversion by a method wherein a specific code, separately from a trapezoidal pattern code, is designated for an oblique rectangle of a high frequency of use. CONSTITUTION:A computer 3 reads in an exposure data from a data memory 1 and it is stored in a CPU memory 4. The data in the memory 4 is put into a code through a function generator 5 and is written in a high speed buffer memory 6 successively. The data in the memory 6 is read out and is transmitted to an electron beam exposure device 2. At this time, a code indicating the oblique rectangle pattern for the oblique rectangle shape, having a high frequency of use as an exposure pattern shape, is estabilished in the generator 5. And, the oblique rectangle pattern is resolved into two triangles and one trapezoid in accordance with the code received by the memory 6 and codes indicating each pattern are made respectively. After that, these codes are outputted to the device 2. As a result, an optimized processing can be performed for a pattern data as a data group and the data can be compressed.
JP10692779A 1979-08-22 1979-08-22 Transmission system of exposure data Pending JPS5630727A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10692779A JPS5630727A (en) 1979-08-22 1979-08-22 Transmission system of exposure data

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10692779A JPS5630727A (en) 1979-08-22 1979-08-22 Transmission system of exposure data

Publications (1)

Publication Number Publication Date
JPS5630727A true JPS5630727A (en) 1981-03-27

Family

ID=14446035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10692779A Pending JPS5630727A (en) 1979-08-22 1979-08-22 Transmission system of exposure data

Country Status (1)

Country Link
JP (1) JPS5630727A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6041221A (en) * 1983-08-17 1985-03-04 Toshiba Eng Co Ltd Exposure data transmission system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51147967A (en) * 1975-06-14 1976-12-18 Fujitsu Ltd Method of controlling spot exposure

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51147967A (en) * 1975-06-14 1976-12-18 Fujitsu Ltd Method of controlling spot exposure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6041221A (en) * 1983-08-17 1985-03-04 Toshiba Eng Co Ltd Exposure data transmission system
JPH0574215B2 (en) * 1983-08-17 1993-10-18 Toshiba Engineering Co

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