JPS5630640A - Detecting method of chemical substance by chemically sensitive element of insulated-gate transistor structure - Google Patents
Detecting method of chemical substance by chemically sensitive element of insulated-gate transistor structureInfo
- Publication number
- JPS5630640A JPS5630640A JP10596279A JP10596279A JPS5630640A JP S5630640 A JPS5630640 A JP S5630640A JP 10596279 A JP10596279 A JP 10596279A JP 10596279 A JP10596279 A JP 10596279A JP S5630640 A JPS5630640 A JP S5630640A
- Authority
- JP
- Japan
- Prior art keywords
- bias voltage
- reference electrode
- insulated
- gate transistor
- transistor structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000126 substance Substances 0.000 title abstract 3
- 150000002500 ions Chemical class 0.000 abstract 4
- 239000007788 liquid Substances 0.000 abstract 2
- 238000001514 detection method Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10596279A JPS5630640A (en) | 1979-08-22 | 1979-08-22 | Detecting method of chemical substance by chemically sensitive element of insulated-gate transistor structure |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10596279A JPS5630640A (en) | 1979-08-22 | 1979-08-22 | Detecting method of chemical substance by chemically sensitive element of insulated-gate transistor structure |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5630640A true JPS5630640A (en) | 1981-03-27 |
JPS6134619B2 JPS6134619B2 (enrdf_load_stackoverflow) | 1986-08-08 |
Family
ID=14421415
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10596279A Granted JPS5630640A (en) | 1979-08-22 | 1979-08-22 | Detecting method of chemical substance by chemically sensitive element of insulated-gate transistor structure |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5630640A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6039547A (ja) * | 1983-08-12 | 1985-03-01 | Mitsubishi Electric Corp | マルチ酵素センサ |
JPS60120240A (ja) * | 1983-12-03 | 1985-06-27 | Horiba Ltd | Isfetセンサ |
US5466616A (en) * | 1994-04-06 | 1995-11-14 | United Microelectronics Corp. | Method of producing an LDMOS transistor having reduced dimensions, reduced leakage, and a reduced propensity to latch-up |
-
1979
- 1979-08-22 JP JP10596279A patent/JPS5630640A/ja active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6039547A (ja) * | 1983-08-12 | 1985-03-01 | Mitsubishi Electric Corp | マルチ酵素センサ |
JPS60120240A (ja) * | 1983-12-03 | 1985-06-27 | Horiba Ltd | Isfetセンサ |
US5466616A (en) * | 1994-04-06 | 1995-11-14 | United Microelectronics Corp. | Method of producing an LDMOS transistor having reduced dimensions, reduced leakage, and a reduced propensity to latch-up |
Also Published As
Publication number | Publication date |
---|---|
JPS6134619B2 (enrdf_load_stackoverflow) | 1986-08-08 |
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