JPS5630604A - Method of optically measuring minute gap - Google Patents

Method of optically measuring minute gap

Info

Publication number
JPS5630604A
JPS5630604A JP10609179A JP10609179A JPS5630604A JP S5630604 A JPS5630604 A JP S5630604A JP 10609179 A JP10609179 A JP 10609179A JP 10609179 A JP10609179 A JP 10609179A JP S5630604 A JPS5630604 A JP S5630604A
Authority
JP
Japan
Prior art keywords
light
adjustor
measured
gap
minute gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10609179A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6226406B2 (enExample
Inventor
Toshio Akatsu
Seiichiro Terajima
Kazunori Iijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10609179A priority Critical patent/JPS5630604A/ja
Publication of JPS5630604A publication Critical patent/JPS5630604A/ja
Publication of JPS6226406B2 publication Critical patent/JPS6226406B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP10609179A 1979-08-22 1979-08-22 Method of optically measuring minute gap Granted JPS5630604A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10609179A JPS5630604A (en) 1979-08-22 1979-08-22 Method of optically measuring minute gap

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10609179A JPS5630604A (en) 1979-08-22 1979-08-22 Method of optically measuring minute gap

Publications (2)

Publication Number Publication Date
JPS5630604A true JPS5630604A (en) 1981-03-27
JPS6226406B2 JPS6226406B2 (enExample) 1987-06-09

Family

ID=14424869

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10609179A Granted JPS5630604A (en) 1979-08-22 1979-08-22 Method of optically measuring minute gap

Country Status (1)

Country Link
JP (1) JPS5630604A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102532656B1 (ko) * 2021-12-10 2023-05-16 김경희 전기차 폐배터리 거래 시스템

Also Published As

Publication number Publication date
JPS6226406B2 (enExample) 1987-06-09

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