JPS562785B2 - - Google Patents
Info
- Publication number
- JPS562785B2 JPS562785B2 JP9686476A JP9686476A JPS562785B2 JP S562785 B2 JPS562785 B2 JP S562785B2 JP 9686476 A JP9686476 A JP 9686476A JP 9686476 A JP9686476 A JP 9686476A JP S562785 B2 JPS562785 B2 JP S562785B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9686476A JPS5322375A (en) | 1976-08-13 | 1976-08-13 | Beam blanking device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9686476A JPS5322375A (en) | 1976-08-13 | 1976-08-13 | Beam blanking device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5322375A JPS5322375A (en) | 1978-03-01 |
| JPS562785B2 true JPS562785B2 (index.php) | 1981-01-21 |
Family
ID=14176305
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9686476A Granted JPS5322375A (en) | 1976-08-13 | 1976-08-13 | Beam blanking device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5322375A (index.php) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5562730A (en) * | 1978-11-02 | 1980-05-12 | Toshiba Corp | Electron beam exposure device |
| JPS57122518A (en) * | 1981-01-22 | 1982-07-30 | Toshiba Corp | Electro-optical body tube |
| JPS58137947A (ja) * | 1982-02-10 | 1983-08-16 | Toshiba Corp | 電子光学鏡筒 |
| JPS6182428A (ja) * | 1984-09-29 | 1986-04-26 | Toshiba Corp | 電荷ビ−ム光学鏡筒のレンズ調整方法 |
| JPS6251218A (ja) * | 1985-08-30 | 1987-03-05 | Hitachi Ltd | 電子線描画装置 |
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1976
- 1976-08-13 JP JP9686476A patent/JPS5322375A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5322375A (en) | 1978-03-01 |