JPS5626799A - Beltlike silicon crystal growing apparatus - Google Patents

Beltlike silicon crystal growing apparatus

Info

Publication number
JPS5626799A
JPS5626799A JP10181079A JP10181079A JPS5626799A JP S5626799 A JPS5626799 A JP S5626799A JP 10181079 A JP10181079 A JP 10181079A JP 10181079 A JP10181079 A JP 10181079A JP S5626799 A JPS5626799 A JP S5626799A
Authority
JP
Japan
Prior art keywords
dies
silicon crystal
beltlike
length
growing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10181079A
Other languages
Japanese (ja)
Other versions
JPS5719078B2 (en
Inventor
Naoaki Maki
Hiroshi Ito
Toshiro Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP10181079A priority Critical patent/JPS5626799A/en
Publication of JPS5626799A publication Critical patent/JPS5626799A/en
Publication of JPS5719078B2 publication Critical patent/JPS5719078B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE: To obtain a beltlike silicon crystal of high quality and high purity by placing platelike main heaters having a specified length in the longer side direction in parallel with and opposite to each other outside support rods which linearly support plural pairs of dies.
CONSTITUTION: Plural pairs of dies 43a1, 43a2, etc. having slits are arranged at the opening of a crucible holding a silicon melt, and this beltlike silicon crystal growing apparatus is provided with support rods 46a, 46b which linearly support the dies to adjust the distance between the dies to die width W or more. Platelike main heaters 45a, 45b are placed opposite to each other and in parallel with rods 46a, 46b, and length m of each heater 45a, 45b in the longer side direction is made 1.25W2 to length l between the outermost dies. Thus, the silicon melt does not stick to the dies during growing, and a high purity beltlike silicon crystal is obtd. inexpensively.
COPYRIGHT: (C)1981,JPO&Japio
JP10181079A 1979-08-11 1979-08-11 Beltlike silicon crystal growing apparatus Granted JPS5626799A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10181079A JPS5626799A (en) 1979-08-11 1979-08-11 Beltlike silicon crystal growing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10181079A JPS5626799A (en) 1979-08-11 1979-08-11 Beltlike silicon crystal growing apparatus

Publications (2)

Publication Number Publication Date
JPS5626799A true JPS5626799A (en) 1981-03-14
JPS5719078B2 JPS5719078B2 (en) 1982-04-20

Family

ID=14310481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10181079A Granted JPS5626799A (en) 1979-08-11 1979-08-11 Beltlike silicon crystal growing apparatus

Country Status (1)

Country Link
JP (1) JPS5626799A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6991389B2 (en) * 2019-03-08 2022-01-12 住友精化株式会社 Water-absorbent resin particles and their manufacturing method

Also Published As

Publication number Publication date
JPS5719078B2 (en) 1982-04-20

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