JPS5626431A - Dopant source for diffusing in vapor phase phosphorus oxide - Google Patents

Dopant source for diffusing in vapor phase phosphorus oxide

Info

Publication number
JPS5626431A
JPS5626431A JP7676080A JP7676080A JPS5626431A JP S5626431 A JPS5626431 A JP S5626431A JP 7676080 A JP7676080 A JP 7676080A JP 7676080 A JP7676080 A JP 7676080A JP S5626431 A JPS5626431 A JP S5626431A
Authority
JP
Japan
Prior art keywords
diffusing
vapor phase
dopant source
phosphorus oxide
phase phosphorus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7676080A
Other languages
Japanese (ja)
Other versions
JPS5756205B2 (en
Inventor
Miruton Furoorensu Jiyatsuku
Aaru Sumisu Uiriamu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OI Glass Inc
Original Assignee
Owens Illinois Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Owens Illinois Inc filed Critical Owens Illinois Inc
Priority to JP7676080A priority Critical patent/JPS5626431A/en
Publication of JPS5626431A publication Critical patent/JPS5626431A/en
Publication of JPS5756205B2 publication Critical patent/JPS5756205B2/ja
Granted legal-status Critical Current

Links

JP7676080A 1980-06-09 1980-06-09 Dopant source for diffusing in vapor phase phosphorus oxide Granted JPS5626431A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7676080A JPS5626431A (en) 1980-06-09 1980-06-09 Dopant source for diffusing in vapor phase phosphorus oxide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7676080A JPS5626431A (en) 1980-06-09 1980-06-09 Dopant source for diffusing in vapor phase phosphorus oxide

Publications (2)

Publication Number Publication Date
JPS5626431A true JPS5626431A (en) 1981-03-14
JPS5756205B2 JPS5756205B2 (en) 1982-11-29

Family

ID=13614539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7676080A Granted JPS5626431A (en) 1980-06-09 1980-06-09 Dopant source for diffusing in vapor phase phosphorus oxide

Country Status (1)

Country Link
JP (1) JPS5626431A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60203290A (en) * 1984-02-27 1985-10-14 マーク・エス・サツザク Space vessel toy
JP2003529221A (en) * 2000-03-29 2003-09-30 テクネグラス，インコーポレイテッド Method of doping silicon with phosphorus and growing oxides on silicon in the presence of vapor

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60203290A (en) * 1984-02-27 1985-10-14 マーク・エス・サツザク Space vessel toy
JP2003529221A (en) * 2000-03-29 2003-09-30 テクネグラス，インコーポレイテッド Method of doping silicon with phosphorus and growing oxides on silicon in the presence of vapor

Also Published As

Publication number Publication date
JPS5756205B2 (en) 1982-11-29

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