JPS5624949A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5624949A JPS5624949A JP10099279A JP10099279A JPS5624949A JP S5624949 A JPS5624949 A JP S5624949A JP 10099279 A JP10099279 A JP 10099279A JP 10099279 A JP10099279 A JP 10099279A JP S5624949 A JPS5624949 A JP S5624949A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- region
- type
- entire surface
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 239000012535 impurity Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 230000015556 catabolic process Effects 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10099279A JPS5624949A (en) | 1979-08-07 | 1979-08-07 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10099279A JPS5624949A (en) | 1979-08-07 | 1979-08-07 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5624949A true JPS5624949A (en) | 1981-03-10 |
| JPS6154256B2 JPS6154256B2 (enrdf_load_stackoverflow) | 1986-11-21 |
Family
ID=14288794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10099279A Granted JPS5624949A (en) | 1979-08-07 | 1979-08-07 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5624949A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS617855A (ja) * | 1984-06-11 | 1986-01-14 | イ−ストマン コダック カンパニ− | 電子写真装置 |
-
1979
- 1979-08-07 JP JP10099279A patent/JPS5624949A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS617855A (ja) * | 1984-06-11 | 1986-01-14 | イ−ストマン コダック カンパニ− | 電子写真装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6154256B2 (enrdf_load_stackoverflow) | 1986-11-21 |
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