JPS5624924A - Manufacture of solid thin film by ion beam - Google Patents

Manufacture of solid thin film by ion beam

Info

Publication number
JPS5624924A
JPS5624924A JP10018779A JP10018779A JPS5624924A JP S5624924 A JPS5624924 A JP S5624924A JP 10018779 A JP10018779 A JP 10018779A JP 10018779 A JP10018779 A JP 10018779A JP S5624924 A JPS5624924 A JP S5624924A
Authority
JP
Japan
Prior art keywords
ions
substrate
generator
ion
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10018779A
Other languages
English (en)
Other versions
JPS594847B2 (ja
Inventor
Hideo Yamada
Terue Kataoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP54100187A priority Critical patent/JPS594847B2/ja
Publication of JPS5624924A publication Critical patent/JPS5624924A/ja
Publication of JPS594847B2 publication Critical patent/JPS594847B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H10P14/22—

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP54100187A 1979-08-08 1979-08-08 イオンビ−ム固体膜製造方法 Expired JPS594847B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54100187A JPS594847B2 (ja) 1979-08-08 1979-08-08 イオンビ−ム固体膜製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54100187A JPS594847B2 (ja) 1979-08-08 1979-08-08 イオンビ−ム固体膜製造方法

Publications (2)

Publication Number Publication Date
JPS5624924A true JPS5624924A (en) 1981-03-10
JPS594847B2 JPS594847B2 (ja) 1984-02-01

Family

ID=14267294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54100187A Expired JPS594847B2 (ja) 1979-08-08 1979-08-08 イオンビ−ム固体膜製造方法

Country Status (1)

Country Link
JP (1) JPS594847B2 (ja)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5063883A (ja) * 1973-10-08 1975-05-30
JPS54971A (en) * 1977-06-06 1979-01-06 Nec Corp Growing method of ion beam crystal
JPS544567A (en) * 1977-06-13 1979-01-13 Nec Corp Growing apparatus of ion beam crystal

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5063883A (ja) * 1973-10-08 1975-05-30
JPS54971A (en) * 1977-06-06 1979-01-06 Nec Corp Growing method of ion beam crystal
JPS544567A (en) * 1977-06-13 1979-01-13 Nec Corp Growing apparatus of ion beam crystal

Also Published As

Publication number Publication date
JPS594847B2 (ja) 1984-02-01

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