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Priority to JP6159875ApriorityCriticalpatent/JPS51137681A/ja
Publication of JPS51137681ApublicationCriticalpatent/JPS51137681A/ja
Publication of JPS5622951B2publicationCriticalpatent/JPS5622951B2/ja
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32—Gas-filled discharge tubes
H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields