JPS5616540B2 - - Google Patents

Info

Publication number
JPS5616540B2
JPS5616540B2 JP563478A JP563478A JPS5616540B2 JP S5616540 B2 JPS5616540 B2 JP S5616540B2 JP 563478 A JP563478 A JP 563478A JP 563478 A JP563478 A JP 563478A JP S5616540 B2 JPS5616540 B2 JP S5616540B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP563478A
Other languages
Japanese (ja)
Other versions
JPS5498577A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP563478A priority Critical patent/JPS5498577A/en
Publication of JPS5498577A publication Critical patent/JPS5498577A/en
Publication of JPS5616540B2 publication Critical patent/JPS5616540B2/ja
Granted legal-status Critical Current

Links

JP563478A 1978-01-20 1978-01-20 Correction method for electron beam scanning position Granted JPS5498577A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP563478A JPS5498577A (en) 1978-01-20 1978-01-20 Correction method for electron beam scanning position

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP563478A JPS5498577A (en) 1978-01-20 1978-01-20 Correction method for electron beam scanning position

Publications (2)

Publication Number Publication Date
JPS5498577A JPS5498577A (en) 1979-08-03
JPS5616540B2 true JPS5616540B2 (en) 1981-04-16

Family

ID=11616568

Family Applications (1)

Application Number Title Priority Date Filing Date
JP563478A Granted JPS5498577A (en) 1978-01-20 1978-01-20 Correction method for electron beam scanning position

Country Status (1)

Country Link
JP (1) JPS5498577A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5787131A (en) * 1980-11-20 1982-05-31 Jeol Ltd Exposing method of electron beam
JPS57204127A (en) * 1981-06-10 1982-12-14 Hitachi Ltd Drawing method for pattern of electron-ray drawing device
JPS59114818A (en) * 1982-12-21 1984-07-03 Toshiba Corp Electron beam pattern drawing method
JPS59188916A (en) * 1983-04-11 1984-10-26 Nippon Telegr & Teleph Corp <Ntt> Correction of deflection distortion
JPS6258621A (en) * 1985-09-09 1987-03-14 Toshiba Corp Fine pattern forming method

Also Published As

Publication number Publication date
JPS5498577A (en) 1979-08-03

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