JPS5616540B2 - - Google Patents
Info
- Publication number
- JPS5616540B2 JPS5616540B2 JP563478A JP563478A JPS5616540B2 JP S5616540 B2 JPS5616540 B2 JP S5616540B2 JP 563478 A JP563478 A JP 563478A JP 563478 A JP563478 A JP 563478A JP S5616540 B2 JPS5616540 B2 JP S5616540B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP563478A JPS5498577A (en) | 1978-01-20 | 1978-01-20 | Correction method for electron beam scanning position |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP563478A JPS5498577A (en) | 1978-01-20 | 1978-01-20 | Correction method for electron beam scanning position |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5498577A JPS5498577A (en) | 1979-08-03 |
JPS5616540B2 true JPS5616540B2 (en) | 1981-04-16 |
Family
ID=11616568
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP563478A Granted JPS5498577A (en) | 1978-01-20 | 1978-01-20 | Correction method for electron beam scanning position |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5498577A (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5787131A (en) * | 1980-11-20 | 1982-05-31 | Jeol Ltd | Exposing method of electron beam |
JPS57204127A (en) * | 1981-06-10 | 1982-12-14 | Hitachi Ltd | Drawing method for pattern of electron-ray drawing device |
JPS59114818A (en) * | 1982-12-21 | 1984-07-03 | Toshiba Corp | Electron beam pattern drawing method |
JPS59188916A (en) * | 1983-04-11 | 1984-10-26 | Nippon Telegr & Teleph Corp <Ntt> | Correction of deflection distortion |
JPS6258621A (en) * | 1985-09-09 | 1987-03-14 | Toshiba Corp | Fine pattern forming method |
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1978
- 1978-01-20 JP JP563478A patent/JPS5498577A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5498577A (en) | 1979-08-03 |