JPS56164549U - - Google Patents
Info
- Publication number
- JPS56164549U JPS56164549U JP6294180U JP6294180U JPS56164549U JP S56164549 U JPS56164549 U JP S56164549U JP 6294180 U JP6294180 U JP 6294180U JP 6294180 U JP6294180 U JP 6294180U JP S56164549 U JPS56164549 U JP S56164549U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980062941U JPS6144427Y2 (https=) | 1980-05-08 | 1980-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980062941U JPS6144427Y2 (https=) | 1980-05-08 | 1980-05-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56164549U true JPS56164549U (https=) | 1981-12-07 |
| JPS6144427Y2 JPS6144427Y2 (https=) | 1986-12-15 |
Family
ID=29657216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980062941U Expired JPS6144427Y2 (https=) | 1980-05-08 | 1980-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6144427Y2 (https=) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5237966U (https=) * | 1975-09-10 | 1977-03-17 | ||
| JPS5252579A (en) * | 1975-10-27 | 1977-04-27 | Canon Inc | Clearance adjusng method |
| JPS5443480A (en) * | 1977-09-12 | 1979-04-06 | Hitachi Ltd | Mask aligner |
| JPS5530823A (en) * | 1978-08-25 | 1980-03-04 | Nippon Telegr & Teleph Corp <Ntt> | Mask-wafer gap setting device |
-
1980
- 1980-05-08 JP JP1980062941U patent/JPS6144427Y2/ja not_active Expired
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5237966U (https=) * | 1975-09-10 | 1977-03-17 | ||
| JPS5252579A (en) * | 1975-10-27 | 1977-04-27 | Canon Inc | Clearance adjusng method |
| JPS5443480A (en) * | 1977-09-12 | 1979-04-06 | Hitachi Ltd | Mask aligner |
| JPS5530823A (en) * | 1978-08-25 | 1980-03-04 | Nippon Telegr & Teleph Corp <Ntt> | Mask-wafer gap setting device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6144427Y2 (https=) | 1986-12-15 |