JPS56164549U - - Google Patents

Info

Publication number
JPS56164549U
JPS56164549U JP6294180U JP6294180U JPS56164549U JP S56164549 U JPS56164549 U JP S56164549U JP 6294180 U JP6294180 U JP 6294180U JP 6294180 U JP6294180 U JP 6294180U JP S56164549 U JPS56164549 U JP S56164549U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6294180U
Other languages
Japanese (ja)
Other versions
JPS6144427Y2 (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980062941U priority Critical patent/JPS6144427Y2/ja
Publication of JPS56164549U publication Critical patent/JPS56164549U/ja
Application granted granted Critical
Publication of JPS6144427Y2 publication Critical patent/JPS6144427Y2/ja
Expired legal-status Critical Current

Links

JP1980062941U 1980-05-08 1980-05-08 Expired JPS6144427Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1980062941U JPS6144427Y2 (en:Method) 1980-05-08 1980-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980062941U JPS6144427Y2 (en:Method) 1980-05-08 1980-05-08

Publications (2)

Publication Number Publication Date
JPS56164549U true JPS56164549U (en:Method) 1981-12-07
JPS6144427Y2 JPS6144427Y2 (en:Method) 1986-12-15

Family

ID=29657216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980062941U Expired JPS6144427Y2 (en:Method) 1980-05-08 1980-05-08

Country Status (1)

Country Link
JP (1) JPS6144427Y2 (en:Method)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237966U (en:Method) * 1975-09-10 1977-03-17
JPS5252579A (en) * 1975-10-27 1977-04-27 Canon Inc Clearance adjusng method
JPS5443480A (en) * 1977-09-12 1979-04-06 Hitachi Ltd Mask aligner
JPS5530823A (en) * 1978-08-25 1980-03-04 Nippon Telegr & Teleph Corp <Ntt> Mask-wafer gap setting device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5237966U (en:Method) * 1975-09-10 1977-03-17
JPS5252579A (en) * 1975-10-27 1977-04-27 Canon Inc Clearance adjusng method
JPS5443480A (en) * 1977-09-12 1979-04-06 Hitachi Ltd Mask aligner
JPS5530823A (en) * 1978-08-25 1980-03-04 Nippon Telegr & Teleph Corp <Ntt> Mask-wafer gap setting device

Also Published As

Publication number Publication date
JPS6144427Y2 (en:Method) 1986-12-15

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