JPS56163271A - Method and device for controlling of etching - Google Patents

Method and device for controlling of etching

Info

Publication number
JPS56163271A
JPS56163271A JP6646780A JP6646780A JPS56163271A JP S56163271 A JPS56163271 A JP S56163271A JP 6646780 A JP6646780 A JP 6646780A JP 6646780 A JP6646780 A JP 6646780A JP S56163271 A JPS56163271 A JP S56163271A
Authority
JP
Japan
Prior art keywords
parts
thickness
mask pattern
controller
detectors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6646780A
Other languages
English (en)
Other versions
JPS5817830B2 (ja
Inventor
Katsuyoshi Onuma
Shigeo Sasaki
Katsuyoshi Tamaki
Akio Miyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6646780A priority Critical patent/JPS5817830B2/ja
Publication of JPS56163271A publication Critical patent/JPS56163271A/ja
Publication of JPS5817830B2 publication Critical patent/JPS5817830B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP6646780A 1980-05-21 1980-05-21 腐食加工制御方法およびその装置 Expired JPS5817830B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6646780A JPS5817830B2 (ja) 1980-05-21 1980-05-21 腐食加工制御方法およびその装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6646780A JPS5817830B2 (ja) 1980-05-21 1980-05-21 腐食加工制御方法およびその装置

Publications (2)

Publication Number Publication Date
JPS56163271A true JPS56163271A (en) 1981-12-15
JPS5817830B2 JPS5817830B2 (ja) 1983-04-09

Family

ID=13316606

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6646780A Expired JPS5817830B2 (ja) 1980-05-21 1980-05-21 腐食加工制御方法およびその装置

Country Status (1)

Country Link
JP (1) JPS5817830B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10464294B2 (en) 2015-10-21 2019-11-05 Freres Lumber Co., Inc. Wood panel assemblies and methods of production

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10464294B2 (en) 2015-10-21 2019-11-05 Freres Lumber Co., Inc. Wood panel assemblies and methods of production

Also Published As

Publication number Publication date
JPS5817830B2 (ja) 1983-04-09

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