JPS56162334A - Temperature regulator particularly for lithographic equipment - Google Patents

Temperature regulator particularly for lithographic equipment

Info

Publication number
JPS56162334A
JPS56162334A JP5516081A JP5516081A JPS56162334A JP S56162334 A JPS56162334 A JP S56162334A JP 5516081 A JP5516081 A JP 5516081A JP 5516081 A JP5516081 A JP 5516081A JP S56162334 A JPS56162334 A JP S56162334A
Authority
JP
Japan
Prior art keywords
temperature regulator
lithographic equipment
regulator particularly
lithographic
equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5516081A
Other languages
Japanese (ja)
Inventor
Yooahimu Shiyunaidaa Hansu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of JPS56162334A publication Critical patent/JPS56162334A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F27/00—Control arrangements or safety devices specially adapted for heat-exchange or heat-transfer apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
    • F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
    • F28D2021/0077—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for tempering, e.g. with cooling or heating circuits for temperature control of elements
JP5516081A 1980-05-02 1981-04-14 Temperature regulator particularly for lithographic equipment Pending JPS56162334A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD80220827A DD150263A1 (en) 1980-05-02 1980-05-02 TEMPERATING DEVICE, ESPECIALLY FOR LITHOGRAPHIC DEVICES

Publications (1)

Publication Number Publication Date
JPS56162334A true JPS56162334A (en) 1981-12-14

Family

ID=5523987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5516081A Pending JPS56162334A (en) 1980-05-02 1981-04-14 Temperature regulator particularly for lithographic equipment

Country Status (5)

Country Link
JP (1) JPS56162334A (en)
DD (1) DD150263A1 (en)
DE (1) DE3109603A1 (en)
FR (1) FR2481820A1 (en)
GB (1) GB2076525B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3607532A1 (en) * 1986-03-07 1987-09-10 Semitec Semiconductor Equipmen Device for keeping constant the temperature of a body

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3213929A (en) * 1962-02-12 1965-10-26 Varian Associates Temperature control system
DE1776118A1 (en) * 1968-09-24 1971-09-30 Technic Internat Labor Zubehoe Device for keeping the temperature of a liquid constant
DD127137B1 (en) * 1976-08-17 1979-11-28 Elektromat Veb DEVICE FOR COMPENSATING THE HEAT EFFECT ON ADJUSTING AND EXPOSURE DEVICES

Also Published As

Publication number Publication date
DE3109603A1 (en) 1982-02-18
DD150263A1 (en) 1981-08-19
GB2076525B (en) 1985-01-30
FR2481820A1 (en) 1981-11-06
GB2076525A (en) 1981-12-02

Similar Documents

Publication Publication Date Title
JPS5779311A (en) Fixing equipment
JPS56154314A (en) Regulating mechanism for fluid
GB2124411B (en) Temperature control apparatus
JPS57150829A (en) Exposure controller
GB8326040D0 (en) Liquid temperature regulator
GB8317738D0 (en) Temperature control apparatus
GB2075425B (en) Fixing apparatus
DE3161557D1 (en) Diaphragm-pressure regulator
JPS5715089A (en) Regulator for location of handle of autobicycle
GB2082317B (en) Temperature control apparatus
JPS57119769A (en) Sail equipment for wind-surfer
JPS56154334A (en) Regulator
GB2084306B (en) Cooling apparatus
JPS56162334A (en) Temperature regulator particularly for lithographic equipment
JPS57107409A (en) Fixing equipment for sheet member
GB2066956B (en) Temperature sensitive apparatus
JPS56113959A (en) Temperature regulator
JPS57114791A (en) Regulator for rotor-blade
JPS5752330A (en) Power supply system for equipment
GB2075895B (en) Apparatus for flame-scarfing
JPS55115615A (en) Equipment for fitting
JPS5655643A (en) Immersion preventor for equipment
JPS5792324A (en) Exposure controller
JPS5765558A (en) Temperature controller for show case
JPS57133327A (en) Thermocouple apparatus