GB2076525B - Tempering device particularly for lithographic apparata - Google Patents

Tempering device particularly for lithographic apparata

Info

Publication number
GB2076525B
GB2076525B GB8113509A GB8113509A GB2076525B GB 2076525 B GB2076525 B GB 2076525B GB 8113509 A GB8113509 A GB 8113509A GB 8113509 A GB8113509 A GB 8113509A GB 2076525 B GB2076525 B GB 2076525B
Authority
GB
United Kingdom
Prior art keywords
apparata
lithographic
tempering device
device particularly
tempering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8113509A
Other versions
GB2076525A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Publication of GB2076525A publication Critical patent/GB2076525A/en
Application granted granted Critical
Publication of GB2076525B publication Critical patent/GB2076525B/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28F—DETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F27/00—Control arrangements or safety devices specially adapted for heat-exchange or heat-transfer apparatus
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28—HEAT EXCHANGE IN GENERAL
    • F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
    • F28D21/00—Heat-exchange apparatus not covered by any of the groups F28D1/00 - F28D20/00
    • F28D2021/0019—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for
    • F28D2021/0077—Other heat exchangers for particular applications; Heat exchange systems not otherwise provided for for tempering, e.g. with cooling or heating circuits for temperature control of elements

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Devices For Blowing Cold Air, Devices For Blowing Warm Air, And Means For Preventing Water Condensation In Air Conditioning Units (AREA)
  • Control Of Temperature (AREA)
  • Electron Beam Exposure (AREA)
GB8113509A 1980-05-02 1981-05-01 Tempering device particularly for lithographic apparata Expired GB2076525B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD80220827A DD150263A1 (en) 1980-05-02 1980-05-02 TEMPERATING DEVICE, ESPECIALLY FOR LITHOGRAPHIC DEVICES

Publications (2)

Publication Number Publication Date
GB2076525A GB2076525A (en) 1981-12-02
GB2076525B true GB2076525B (en) 1985-01-30

Family

ID=5523987

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8113509A Expired GB2076525B (en) 1980-05-02 1981-05-01 Tempering device particularly for lithographic apparata

Country Status (5)

Country Link
JP (1) JPS56162334A (en)
DD (1) DD150263A1 (en)
DE (1) DE3109603A1 (en)
FR (1) FR2481820A1 (en)
GB (1) GB2076525B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3607532A1 (en) * 1986-03-07 1987-09-10 Semitec Semiconductor Equipmen Device for keeping constant the temperature of a body

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3213929A (en) * 1962-02-12 1965-10-26 Varian Associates Temperature control system
DE1776118A1 (en) * 1968-09-24 1971-09-30 Technic Internat Labor Zubehoe Device for keeping the temperature of a liquid constant
DD127137B1 (en) * 1976-08-17 1979-11-28 Elektromat Veb DEVICE FOR COMPENSATING THE HEAT EFFECT ON ADJUSTING AND EXPOSURE DEVICES

Also Published As

Publication number Publication date
FR2481820A1 (en) 1981-11-06
JPS56162334A (en) 1981-12-14
DD150263A1 (en) 1981-08-19
DE3109603A1 (en) 1982-02-18
GB2076525A (en) 1981-12-02

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee