JPS56156761A - Boat as heating body for vapor deposition - Google Patents

Boat as heating body for vapor deposition

Info

Publication number
JPS56156761A
JPS56156761A JP6018380A JP6018380A JPS56156761A JP S56156761 A JPS56156761 A JP S56156761A JP 6018380 A JP6018380 A JP 6018380A JP 6018380 A JP6018380 A JP 6018380A JP S56156761 A JPS56156761 A JP S56156761A
Authority
JP
Japan
Prior art keywords
boat
vapor deposition
heating body
tib2
state
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6018380A
Other languages
Japanese (ja)
Inventor
Yukio Kaneko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP6018380A priority Critical patent/JPS56156761A/en
Publication of JPS56156761A publication Critical patent/JPS56156761A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE:To efficiently vapor-deposit a high purity metal on a semiconductor substrate or the like by finishing the upper surface of a boat using BN and TiB2 as materials in a smooth state and the sides and the upper surface in a rough state. CONSTITUTION:The recessed upper surface of a boat for vapor deposition as a resistance heating body using BN and TiB2 as materials in finished in a smooth state, and the sides and the upper surface in a rough state. By this shape molten metal for vapor deposition easily crawls out of the recess along the upper surface of the boat toward the higher temp. part to increase the evaporation speed. On the other hand, the molten metal hardly moves to the side and the under surface of the boat, so the evaporated metal sufficiently coats a semiconductor substrate.
JP6018380A 1980-05-07 1980-05-07 Boat as heating body for vapor deposition Pending JPS56156761A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6018380A JPS56156761A (en) 1980-05-07 1980-05-07 Boat as heating body for vapor deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6018380A JPS56156761A (en) 1980-05-07 1980-05-07 Boat as heating body for vapor deposition

Publications (1)

Publication Number Publication Date
JPS56156761A true JPS56156761A (en) 1981-12-03

Family

ID=13134784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6018380A Pending JPS56156761A (en) 1980-05-07 1980-05-07 Boat as heating body for vapor deposition

Country Status (1)

Country Link
JP (1) JPS56156761A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6645572B2 (en) 1998-05-14 2003-11-11 Wacker-Chemie Gmbh Process for producing a ceramic evaporation boat having an improved initial wetting performance
CN108728797A (en) * 2017-03-24 2018-11-02 肯纳金属公司 Evaporation boat for metallization apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6645572B2 (en) 1998-05-14 2003-11-11 Wacker-Chemie Gmbh Process for producing a ceramic evaporation boat having an improved initial wetting performance
CN108728797A (en) * 2017-03-24 2018-11-02 肯纳金属公司 Evaporation boat for metallization apparatus

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