JPS56156761A - Boat as heating body for vapor deposition - Google Patents
Boat as heating body for vapor depositionInfo
- Publication number
- JPS56156761A JPS56156761A JP6018380A JP6018380A JPS56156761A JP S56156761 A JPS56156761 A JP S56156761A JP 6018380 A JP6018380 A JP 6018380A JP 6018380 A JP6018380 A JP 6018380A JP S56156761 A JPS56156761 A JP S56156761A
- Authority
- JP
- Japan
- Prior art keywords
- boat
- vapor deposition
- heating body
- tib2
- state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE:To efficiently vapor-deposit a high purity metal on a semiconductor substrate or the like by finishing the upper surface of a boat using BN and TiB2 as materials in a smooth state and the sides and the upper surface in a rough state. CONSTITUTION:The recessed upper surface of a boat for vapor deposition as a resistance heating body using BN and TiB2 as materials in finished in a smooth state, and the sides and the upper surface in a rough state. By this shape molten metal for vapor deposition easily crawls out of the recess along the upper surface of the boat toward the higher temp. part to increase the evaporation speed. On the other hand, the molten metal hardly moves to the side and the under surface of the boat, so the evaporated metal sufficiently coats a semiconductor substrate.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6018380A JPS56156761A (en) | 1980-05-07 | 1980-05-07 | Boat as heating body for vapor deposition |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6018380A JPS56156761A (en) | 1980-05-07 | 1980-05-07 | Boat as heating body for vapor deposition |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56156761A true JPS56156761A (en) | 1981-12-03 |
Family
ID=13134784
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6018380A Pending JPS56156761A (en) | 1980-05-07 | 1980-05-07 | Boat as heating body for vapor deposition |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56156761A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6645572B2 (en) | 1998-05-14 | 2003-11-11 | Wacker-Chemie Gmbh | Process for producing a ceramic evaporation boat having an improved initial wetting performance |
CN108728797A (en) * | 2017-03-24 | 2018-11-02 | 肯纳金属公司 | Evaporation boat for metallization apparatus |
-
1980
- 1980-05-07 JP JP6018380A patent/JPS56156761A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6645572B2 (en) | 1998-05-14 | 2003-11-11 | Wacker-Chemie Gmbh | Process for producing a ceramic evaporation boat having an improved initial wetting performance |
CN108728797A (en) * | 2017-03-24 | 2018-11-02 | 肯纳金属公司 | Evaporation boat for metallization apparatus |
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