JPS56155839A - Inspecting method for surface defect of object to be inspected - Google Patents

Inspecting method for surface defect of object to be inspected

Info

Publication number
JPS56155839A
JPS56155839A JP6008280A JP6008280A JPS56155839A JP S56155839 A JPS56155839 A JP S56155839A JP 6008280 A JP6008280 A JP 6008280A JP 6008280 A JP6008280 A JP 6008280A JP S56155839 A JPS56155839 A JP S56155839A
Authority
JP
Japan
Prior art keywords
hole
rays
inspected
illuminating
constitution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6008280A
Other languages
Japanese (ja)
Other versions
JPH0236897B2 (en
Inventor
Yoji Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6008280A priority Critical patent/JPS56155839A/en
Publication of JPS56155839A publication Critical patent/JPS56155839A/en
Publication of JPH0236897B2 publication Critical patent/JPH0236897B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To perform inspection surely and satisfactorily by applying the transmitted illuminating light which is about the same as the reflected light from the normal surface of an object to be inspected through the through-hole that said object possesses thereby performing inspection. CONSTITUTION:A reflection mirror 20 is diagonally provided by facing the side opposite from the incident side of lighting rays 6 with respect to an object 22 to be inspected having a through-hole 16 in such a manner that the rays from an illuminating device 19 reflects on the mirror 2 and treat transmitted illuminating rays 21 enter the through-hole 16. This is made into the constitution that can optically process the video signal level through the through-hole 16 picked up by an industrial telecamera 9 in a manner as to assume the video signal level of about the same degree as that of a normal metallic surface by means of the transmitted illuminating rays 21.
JP6008280A 1980-05-07 1980-05-07 Inspecting method for surface defect of object to be inspected Granted JPS56155839A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6008280A JPS56155839A (en) 1980-05-07 1980-05-07 Inspecting method for surface defect of object to be inspected

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6008280A JPS56155839A (en) 1980-05-07 1980-05-07 Inspecting method for surface defect of object to be inspected

Publications (2)

Publication Number Publication Date
JPS56155839A true JPS56155839A (en) 1981-12-02
JPH0236897B2 JPH0236897B2 (en) 1990-08-21

Family

ID=13131797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6008280A Granted JPS56155839A (en) 1980-05-07 1980-05-07 Inspecting method for surface defect of object to be inspected

Country Status (1)

Country Link
JP (1) JPS56155839A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54133395A (en) * 1978-04-07 1979-10-17 Hitachi Ltd Detecting method and apparatus for carck on substrate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54133395A (en) * 1978-04-07 1979-10-17 Hitachi Ltd Detecting method and apparatus for carck on substrate

Also Published As

Publication number Publication date
JPH0236897B2 (en) 1990-08-21

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