JPS56152233A - Liquid phase growing method - Google Patents

Liquid phase growing method

Info

Publication number
JPS56152233A
JPS56152233A JP5585480A JP5585480A JPS56152233A JP S56152233 A JPS56152233 A JP S56152233A JP 5585480 A JP5585480 A JP 5585480A JP 5585480 A JP5585480 A JP 5585480A JP S56152233 A JPS56152233 A JP S56152233A
Authority
JP
Japan
Prior art keywords
growing
hole
melts
substrate
parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5585480A
Other languages
Japanese (ja)
Inventor
Takao Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP5585480A priority Critical patent/JPS56152233A/en
Publication of JPS56152233A publication Critical patent/JPS56152233A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/065—Multiple stacked slider system

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Semiconductor Lasers (AREA)

Abstract

PURPOSE:To facilitate a temperature control in a liquid phase growing method by vertically arranging respective growing melts growing in multiple layers on a substrate and sequentially dropping the respective melts to allow them to contact with the substrate, thereby liquid growing it. CONSTITUTION:Horizontally movable slide plates 22a-22d are inserted into a boat body 20 having a vertical through hole 21. The hole 21 is vertically partitioned in multiple stages, and hole parts 21a-21d are formed. A dropping hole 23 having the same diameter as the through hole is formed at each slide plate. A substrate 24 is mounted on the lowermost slide plate 22d. Growing melts 26a-26d of different compositions are contained in the respective hole parts 21a-22s, the melts are sequentially dropped in the sequence from 26d to 26a, are contacted with the substrate 24, and predetermined multilayers are grown. Since the parts to be controlled at temperature at the time of growing can be thus limited to a large extent, its temperature control can be performed simply.
JP5585480A 1980-04-25 1980-04-25 Liquid phase growing method Pending JPS56152233A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5585480A JPS56152233A (en) 1980-04-25 1980-04-25 Liquid phase growing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5585480A JPS56152233A (en) 1980-04-25 1980-04-25 Liquid phase growing method

Publications (1)

Publication Number Publication Date
JPS56152233A true JPS56152233A (en) 1981-11-25

Family

ID=13010632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5585480A Pending JPS56152233A (en) 1980-04-25 1980-04-25 Liquid phase growing method

Country Status (1)

Country Link
JP (1) JPS56152233A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2596069A1 (en) * 1986-03-21 1987-09-25 Radiotechnique Compelec CREUSET FOR MULTI-BATH LIQUID EPITAXIA
JP2008180455A (en) * 2007-01-25 2008-08-07 Matsushita Electric Ind Co Ltd Outdoor hood

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999270A (en) * 1973-01-25 1974-09-19
JPS5451379A (en) * 1977-09-30 1979-04-23 Fujitsu Ltd Method and apparatus for liquid phase growth
JPS5485188A (en) * 1977-12-21 1979-07-06 Fujitsu Ltd Liquid phase growing device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4999270A (en) * 1973-01-25 1974-09-19
JPS5451379A (en) * 1977-09-30 1979-04-23 Fujitsu Ltd Method and apparatus for liquid phase growth
JPS5485188A (en) * 1977-12-21 1979-07-06 Fujitsu Ltd Liquid phase growing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2596069A1 (en) * 1986-03-21 1987-09-25 Radiotechnique Compelec CREUSET FOR MULTI-BATH LIQUID EPITAXIA
JP2008180455A (en) * 2007-01-25 2008-08-07 Matsushita Electric Ind Co Ltd Outdoor hood

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