JPS5717127A - Boat for liquid-phase epitaxial growth - Google Patents

Boat for liquid-phase epitaxial growth

Info

Publication number
JPS5717127A
JPS5717127A JP9243480A JP9243480A JPS5717127A JP S5717127 A JPS5717127 A JP S5717127A JP 9243480 A JP9243480 A JP 9243480A JP 9243480 A JP9243480 A JP 9243480A JP S5717127 A JPS5717127 A JP S5717127A
Authority
JP
Japan
Prior art keywords
epitaxial growth
liquid
sliding plates
chamber
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9243480A
Other languages
Japanese (ja)
Inventor
Takao Oda
Susumu Yoshida
Kotaro Mitsui
Saburo Takamiya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP9243480A priority Critical patent/JPS5717127A/en
Publication of JPS5717127A publication Critical patent/JPS5717127A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B19/00—Liquid-phase epitaxial-layer growth
    • C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
    • C30B19/063—Sliding boat system

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE:To increase the productivity for epitaxial growth by a method wherein the upper chamber to be used for storing growing liquid, the middle chamber to be used for retaining a substrate and the lower chamber, having a releasing hole, are provided through the intermediary of sliding plates in such manner that these chambers can be drawn in or out independently. CONSTITUTION:A cabinet type drawer 15, with which the bottom of a boat body 11 to be used for liquid-phase epitaxial growth can be opened and three sliding plates 16, 17 and 18 (numeral 25 is a clinch) are provided, a partition where the upper chamber 12 separated by the sliding plates and a growing solution 19 will be stored are provided, a retaining device 21 which retains the substrate 20 vertically is provided in the middle chamber 13 and the fused liquid is dropped successively through the holes 23 and 24 provided on the sliding plates. Through these procedures, as the two substrates are formed in a set by putting them together back to back, the epitaxial growth can be performed on one side only and a plurality of growth is performed at a time, thereby enabling to increase the productivity of the epitaxial growth.
JP9243480A 1980-07-04 1980-07-04 Boat for liquid-phase epitaxial growth Pending JPS5717127A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9243480A JPS5717127A (en) 1980-07-04 1980-07-04 Boat for liquid-phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9243480A JPS5717127A (en) 1980-07-04 1980-07-04 Boat for liquid-phase epitaxial growth

Publications (1)

Publication Number Publication Date
JPS5717127A true JPS5717127A (en) 1982-01-28

Family

ID=14054322

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9243480A Pending JPS5717127A (en) 1980-07-04 1980-07-04 Boat for liquid-phase epitaxial growth

Country Status (1)

Country Link
JP (1) JPS5717127A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4755364A (en) * 1986-05-29 1988-07-05 Rockwell International Corporation Liquid phase epitaxy apparatus and method
CN114934317A (en) * 2022-06-10 2022-08-23 北京智创芯源科技有限公司 Horizontal liquid phase epitaxial graphite boat, growth system, epitaxial method and growth method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS535569A (en) * 1976-07-05 1978-01-19 Sanyo Electric Co Ltd Liquid-phase epitaxial growth method
JPS54128667A (en) * 1978-03-30 1979-10-05 Toshiba Corp Liquid phase epitaxial growth unit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS535569A (en) * 1976-07-05 1978-01-19 Sanyo Electric Co Ltd Liquid-phase epitaxial growth method
JPS54128667A (en) * 1978-03-30 1979-10-05 Toshiba Corp Liquid phase epitaxial growth unit

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4755364A (en) * 1986-05-29 1988-07-05 Rockwell International Corporation Liquid phase epitaxy apparatus and method
CN114934317A (en) * 2022-06-10 2022-08-23 北京智创芯源科技有限公司 Horizontal liquid phase epitaxial graphite boat, growth system, epitaxial method and growth method

Similar Documents

Publication Publication Date Title
DE59207961D1 (en) SUBSTRATE FOR CELL CULTURES
AU625646B2 (en) Setting machine
GB1253998A (en) Tray for plant pots
JPS54153740A (en) Continuous vacuum treatment apparatus
JPS5717127A (en) Boat for liquid-phase epitaxial growth
GB1422131A (en) Tray for the contacting of liquid and vapour
JPS535569A (en) Liquid-phase epitaxial growth method
FR2438015A1 (en) APPARATUS FOR REACTION BETWEEN LIQUID AND GAS, AND IN PARTICULAR A BACTERIAL BED
JPS5797621A (en) Boat for liquid phase epitaxial growth
JPS6434226A (en) Method for transporting and preserving live fish
DE3065623D1 (en) Apparatus for the intermediate storage of baking tins and similar articles
USD243455S (en) Cryogenic liquid storage vessel
JPS56152233A (en) Liquid phase growing method
IT1171435B (en) Microorganisms test tray
JPS57177536A (en) Vacuum attracting stand and method for vacuum attraction
JPS5651823A (en) Liquid-phase growth apparatus
JPS5774637A (en) Separator for blood collecting plasma
GB1170376A (en) Improvements in or relating to Integrated Circuits
BE871331A (en) PROCESS FOR THE EVACUATION OF MILK FROM A TANK OVEN, IN PARTICULAR FROM A PYROLYSIS OVEN
JPS5693605A (en) Article housing device
EP0074933A3 (en) Table sponge with adjustable moistness
GB1184876A (en) Alkanesulfonate and alpha-Toluenesulfonate Pesticides and process of making same
USD283159S (en) Combined microbiological test tray and holder
USD201760S (en) Food tray
USD177647S (en)