JPS56151728U - - Google Patents

Info

Publication number
JPS56151728U
JPS56151728U JP4756980U JP4756980U JPS56151728U JP S56151728 U JPS56151728 U JP S56151728U JP 4756980 U JP4756980 U JP 4756980U JP 4756980 U JP4756980 U JP 4756980U JP S56151728 U JPS56151728 U JP S56151728U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4756980U
Other versions
JPS6040275Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4756980U priority Critical patent/JPS6040275Y2/ja
Publication of JPS56151728U publication Critical patent/JPS56151728U/ja
Application granted granted Critical
Publication of JPS6040275Y2 publication Critical patent/JPS6040275Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Jigs For Machine Tools (AREA)
JP4756980U 1980-04-08 1980-04-08 吸着固定装置 Expired JPS6040275Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4756980U JPS6040275Y2 (ja) 1980-04-08 1980-04-08 吸着固定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4756980U JPS6040275Y2 (ja) 1980-04-08 1980-04-08 吸着固定装置

Publications (2)

Publication Number Publication Date
JPS56151728U true JPS56151728U (ja) 1981-11-13
JPS6040275Y2 JPS6040275Y2 (ja) 1985-12-04

Family

ID=29642563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4756980U Expired JPS6040275Y2 (ja) 1980-04-08 1980-04-08 吸着固定装置

Country Status (1)

Country Link
JP (1) JPS6040275Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004209633A (ja) * 2002-12-18 2004-07-29 Komatsu Electronic Metals Co Ltd 加工用基板固定装置およびその製造方法
JP2020078832A (ja) * 2018-11-12 2020-05-28 株式会社ディスコ ポーラスチャックテーブル及びポーラスチャックテーブルの製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7182323B2 (ja) * 2021-03-19 2022-12-02 冨士ダイス株式会社 硬質合金複合部材の製造方法及び真空吸着装置の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004209633A (ja) * 2002-12-18 2004-07-29 Komatsu Electronic Metals Co Ltd 加工用基板固定装置およびその製造方法
JP4519457B2 (ja) * 2002-12-18 2010-08-04 Sumco Techxiv株式会社 加工用基板固定装置およびその製造方法
JP2020078832A (ja) * 2018-11-12 2020-05-28 株式会社ディスコ ポーラスチャックテーブル及びポーラスチャックテーブルの製造方法

Also Published As

Publication number Publication date
JPS6040275Y2 (ja) 1985-12-04

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