JPS56146112A - Optical microscope - Google Patents

Optical microscope

Info

Publication number
JPS56146112A
JPS56146112A JP4973480A JP4973480A JPS56146112A JP S56146112 A JPS56146112 A JP S56146112A JP 4973480 A JP4973480 A JP 4973480A JP 4973480 A JP4973480 A JP 4973480A JP S56146112 A JPS56146112 A JP S56146112A
Authority
JP
Japan
Prior art keywords
specimen
microscopic examination
light
field
micropatterns
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4973480A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6317176B2 (enExample
Inventor
Sunao Nishioka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4973480A priority Critical patent/JPS56146112A/ja
Publication of JPS56146112A publication Critical patent/JPS56146112A/ja
Publication of JPS6317176B2 publication Critical patent/JPS6317176B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/06—Means for illuminating specimens
    • G02B21/08—Condensers
    • G02B21/12—Condensers affording bright-field illumination
    • G02B21/125—Condensers affording bright-field illumination affording both dark- and bright-field illumination

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP4973480A 1980-04-15 1980-04-15 Optical microscope Granted JPS56146112A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4973480A JPS56146112A (en) 1980-04-15 1980-04-15 Optical microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4973480A JPS56146112A (en) 1980-04-15 1980-04-15 Optical microscope

Publications (2)

Publication Number Publication Date
JPS56146112A true JPS56146112A (en) 1981-11-13
JPS6317176B2 JPS6317176B2 (enExample) 1988-04-12

Family

ID=12839413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4973480A Granted JPS56146112A (en) 1980-04-15 1980-04-15 Optical microscope

Country Status (1)

Country Link
JP (1) JPS56146112A (enExample)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57192844A (en) * 1981-05-12 1982-11-27 Ford Aerospace & Communication Inspection scanning system for surface
WO1985003353A1 (en) * 1984-01-25 1985-08-01 American Telephone & Telegraph Company Inspection system utilizing dark-field illumination
JPS6235248A (ja) * 1985-08-09 1987-02-16 Toshiba Corp 物体の観測方法及び装置
US5701196A (en) * 1993-11-05 1997-12-23 Olympus Optical Co., Ltd Stereomicroscope

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57192844A (en) * 1981-05-12 1982-11-27 Ford Aerospace & Communication Inspection scanning system for surface
WO1985003353A1 (en) * 1984-01-25 1985-08-01 American Telephone & Telegraph Company Inspection system utilizing dark-field illumination
JPS6235248A (ja) * 1985-08-09 1987-02-16 Toshiba Corp 物体の観測方法及び装置
US5701196A (en) * 1993-11-05 1997-12-23 Olympus Optical Co., Ltd Stereomicroscope

Also Published As

Publication number Publication date
JPS6317176B2 (enExample) 1988-04-12

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