JPS56145332A - Detecting device for state of proper development - Google Patents

Detecting device for state of proper development

Info

Publication number
JPS56145332A
JPS56145332A JP4843880A JP4843880A JPS56145332A JP S56145332 A JPS56145332 A JP S56145332A JP 4843880 A JP4843880 A JP 4843880A JP 4843880 A JP4843880 A JP 4843880A JP S56145332 A JPS56145332 A JP S56145332A
Authority
JP
Japan
Prior art keywords
diffraction
original disc
state
disc
proper development
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4843880A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6161341B2 (hu
Inventor
Takashi Tsurukubo
Ichiro Ueno
Yoshihiko Honjo
Jiyuuichi Shiyukunami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Original Assignee
Victor Company of Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd filed Critical Victor Company of Japan Ltd
Priority to JP4843880A priority Critical patent/JPS56145332A/ja
Publication of JPS56145332A publication Critical patent/JPS56145332A/ja
Publication of JPS6161341B2 publication Critical patent/JPS6161341B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/30—Imagewise removal using liquid means
    • G03F7/3021—Imagewise removal using liquid means from a wafer supported on a rotating chuck
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03D—APPARATUS FOR PROCESSING EXPOSED PHOTOGRAPHIC MATERIALS; ACCESSORIES THEREFOR
    • G03D13/00—Processing apparatus or accessories therefor, not covered by groups G11B3/00 - G11B11/00

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Photographic Processing Devices Using Wet Methods (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP4843880A 1980-04-12 1980-04-12 Detecting device for state of proper development Granted JPS56145332A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4843880A JPS56145332A (en) 1980-04-12 1980-04-12 Detecting device for state of proper development

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4843880A JPS56145332A (en) 1980-04-12 1980-04-12 Detecting device for state of proper development

Publications (2)

Publication Number Publication Date
JPS56145332A true JPS56145332A (en) 1981-11-12
JPS6161341B2 JPS6161341B2 (hu) 1986-12-25

Family

ID=12803349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4843880A Granted JPS56145332A (en) 1980-04-12 1980-04-12 Detecting device for state of proper development

Country Status (1)

Country Link
JP (1) JPS56145332A (hu)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58121039A (ja) * 1982-01-14 1983-07-19 Matsushita Electric Ind Co Ltd 自動現像装置
JPS58195848A (ja) * 1982-05-11 1983-11-15 Matsushita Electric Ind Co Ltd 自動現像装置
JPS6161159A (ja) * 1984-08-31 1986-03-28 Hoya Corp スプレ−現像法
JPS61279858A (ja) * 1985-06-05 1986-12-10 Mitsubishi Electric Corp ネガレジスト現像装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4179622A (en) * 1977-06-23 1979-12-18 International Business Machines Corporation Method and system for in situ control of material removal processes

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4179622A (en) * 1977-06-23 1979-12-18 International Business Machines Corporation Method and system for in situ control of material removal processes

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58121039A (ja) * 1982-01-14 1983-07-19 Matsushita Electric Ind Co Ltd 自動現像装置
JPH0421856B2 (hu) * 1982-01-14 1992-04-14 Matsushita Electric Ind Co Ltd
JPS58195848A (ja) * 1982-05-11 1983-11-15 Matsushita Electric Ind Co Ltd 自動現像装置
JPH0421857B2 (hu) * 1982-05-11 1992-04-14 Matsushita Electric Ind Co Ltd
JPS6161159A (ja) * 1984-08-31 1986-03-28 Hoya Corp スプレ−現像法
JPS61279858A (ja) * 1985-06-05 1986-12-10 Mitsubishi Electric Corp ネガレジスト現像装置
JPH0574816B2 (hu) * 1985-06-05 1993-10-19 Mitsubishi Electric Corp

Also Published As

Publication number Publication date
JPS6161341B2 (hu) 1986-12-25

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