Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co LtdfiledCriticalShin-Etsu Chemical Co Ltd
Priority to JP4893380ApriorityCriticalpatent/JPS56145243A/ja
Priority to EP81102780Aprioritypatent/EP0038052B1/en
Priority to DE8181102780Tprioritypatent/DE3162481D1/de
Publication of JPS56145243ApublicationCriticalpatent/JPS56145243A/ja
Publication of JPS6118538B2publicationCriticalpatent/JPS6118538B2/ja