JPS5614503A - Measurement of forming rate of plasma-polymerized film and production - Google Patents
Measurement of forming rate of plasma-polymerized film and productionInfo
- Publication number
- JPS5614503A JPS5614503A JP8803179A JP8803179A JPS5614503A JP S5614503 A JPS5614503 A JP S5614503A JP 8803179 A JP8803179 A JP 8803179A JP 8803179 A JP8803179 A JP 8803179A JP S5614503 A JPS5614503 A JP S5614503A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- film
- forming rate
- polymerized
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Polymerisation Methods In General (AREA)
- Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)
Abstract
PURPOSE: To control the forming rate of plasma-polymerized film (Kr), by preparing, in advance, a diagram representing the relationship between a probe surface temperature (Tc) at which the polymerized film begins to form on a probe for measuring the plasma characteristics and a forming rate (Kr) of a plasma-polymerized film at this temperature and determining the Kr by monitoring the Tc during polymerization.
CONSTITUTION: A Kr-Tc relationship diagram as shown is prepared by measuring a probe surface temperature (Tc) at which the polymerized film begins to form on a plasma characteristic- measuring probe equipped with heating means, and on the other hand, calculating the forming rate by weighing the plasma-polymerized film deposited on the base film. In the plasma polymerization of an organic monomer, a plasma-polymerized polymer film having a uniform thickness can be produced with good reproducibility, by detecting the Tc and controlling the forming rate of film at a predetermined value by monitoring the Tc. The Tc is detected from the fact that the current-voltage characteristic curve in the electric circuit for the probe varies with the beginning of deposition of the polymer film on the probe surface.
EFFECT: It is possible to detect the forming rate of film at any time in the course of polymerization without opening the reactor.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8803179A JPS5614503A (en) | 1979-07-13 | 1979-07-13 | Measurement of forming rate of plasma-polymerized film and production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8803179A JPS5614503A (en) | 1979-07-13 | 1979-07-13 | Measurement of forming rate of plasma-polymerized film and production |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5614503A true JPS5614503A (en) | 1981-02-12 |
JPH0248562B2 JPH0248562B2 (en) | 1990-10-25 |
Family
ID=13931445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8803179A Granted JPS5614503A (en) | 1979-07-13 | 1979-07-13 | Measurement of forming rate of plasma-polymerized film and production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5614503A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56122304A (en) * | 1980-02-04 | 1981-09-25 | Janssen Pharmaceutica Nv | Microbial deterioration protecting method and agent for lumber and coating |
JP2015129302A (en) * | 1998-10-30 | 2015-07-16 | アルディヴィア・エス・ア | Polymerization method for unsaturated fatty acid, unsaturated fatty acid ester, unsaturated hydrocarbon, or unsaturated derivative of product thereof, by dielectric heating |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5230886A (en) * | 1975-06-23 | 1977-03-08 | Us Government | Plasma polymerization method for sticking coating of dielectric polymer |
-
1979
- 1979-07-13 JP JP8803179A patent/JPS5614503A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5230886A (en) * | 1975-06-23 | 1977-03-08 | Us Government | Plasma polymerization method for sticking coating of dielectric polymer |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56122304A (en) * | 1980-02-04 | 1981-09-25 | Janssen Pharmaceutica Nv | Microbial deterioration protecting method and agent for lumber and coating |
JP2015129302A (en) * | 1998-10-30 | 2015-07-16 | アルディヴィア・エス・ア | Polymerization method for unsaturated fatty acid, unsaturated fatty acid ester, unsaturated hydrocarbon, or unsaturated derivative of product thereof, by dielectric heating |
Also Published As
Publication number | Publication date |
---|---|
JPH0248562B2 (en) | 1990-10-25 |
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