JPS5614503A - Measurement of forming rate of plasma-polymerized film and production - Google Patents

Measurement of forming rate of plasma-polymerized film and production

Info

Publication number
JPS5614503A
JPS5614503A JP8803179A JP8803179A JPS5614503A JP S5614503 A JPS5614503 A JP S5614503A JP 8803179 A JP8803179 A JP 8803179A JP 8803179 A JP8803179 A JP 8803179A JP S5614503 A JPS5614503 A JP S5614503A
Authority
JP
Japan
Prior art keywords
plasma
film
forming rate
polymerized
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8803179A
Other languages
Japanese (ja)
Other versions
JPH0248562B2 (en
Inventor
Kenji Yanagihara
Masahiro Shinkai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
Japan Synthetic Rubber Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Synthetic Rubber Co Ltd filed Critical Japan Synthetic Rubber Co Ltd
Priority to JP8803179A priority Critical patent/JPS5614503A/en
Publication of JPS5614503A publication Critical patent/JPS5614503A/en
Publication of JPH0248562B2 publication Critical patent/JPH0248562B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polymerisation Methods In General (AREA)
  • Other Resins Obtained By Reactions Not Involving Carbon-To-Carbon Unsaturated Bonds (AREA)

Abstract

PURPOSE: To control the forming rate of plasma-polymerized film (Kr), by preparing, in advance, a diagram representing the relationship between a probe surface temperature (Tc) at which the polymerized film begins to form on a probe for measuring the plasma characteristics and a forming rate (Kr) of a plasma-polymerized film at this temperature and determining the Kr by monitoring the Tc during polymerization.
CONSTITUTION: A Kr-Tc relationship diagram as shown is prepared by measuring a probe surface temperature (Tc) at which the polymerized film begins to form on a plasma characteristic- measuring probe equipped with heating means, and on the other hand, calculating the forming rate by weighing the plasma-polymerized film deposited on the base film. In the plasma polymerization of an organic monomer, a plasma-polymerized polymer film having a uniform thickness can be produced with good reproducibility, by detecting the Tc and controlling the forming rate of film at a predetermined value by monitoring the Tc. The Tc is detected from the fact that the current-voltage characteristic curve in the electric circuit for the probe varies with the beginning of deposition of the polymer film on the probe surface.
EFFECT: It is possible to detect the forming rate of film at any time in the course of polymerization without opening the reactor.
COPYRIGHT: (C)1981,JPO&Japio
JP8803179A 1979-07-13 1979-07-13 Measurement of forming rate of plasma-polymerized film and production Granted JPS5614503A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8803179A JPS5614503A (en) 1979-07-13 1979-07-13 Measurement of forming rate of plasma-polymerized film and production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8803179A JPS5614503A (en) 1979-07-13 1979-07-13 Measurement of forming rate of plasma-polymerized film and production

Publications (2)

Publication Number Publication Date
JPS5614503A true JPS5614503A (en) 1981-02-12
JPH0248562B2 JPH0248562B2 (en) 1990-10-25

Family

ID=13931445

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8803179A Granted JPS5614503A (en) 1979-07-13 1979-07-13 Measurement of forming rate of plasma-polymerized film and production

Country Status (1)

Country Link
JP (1) JPS5614503A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56122304A (en) * 1980-02-04 1981-09-25 Janssen Pharmaceutica Nv Microbial deterioration protecting method and agent for lumber and coating
JP2015129302A (en) * 1998-10-30 2015-07-16 アルディヴィア・エス・ア Polymerization method for unsaturated fatty acid, unsaturated fatty acid ester, unsaturated hydrocarbon, or unsaturated derivative of product thereof, by dielectric heating

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5230886A (en) * 1975-06-23 1977-03-08 Us Government Plasma polymerization method for sticking coating of dielectric polymer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5230886A (en) * 1975-06-23 1977-03-08 Us Government Plasma polymerization method for sticking coating of dielectric polymer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56122304A (en) * 1980-02-04 1981-09-25 Janssen Pharmaceutica Nv Microbial deterioration protecting method and agent for lumber and coating
JP2015129302A (en) * 1998-10-30 2015-07-16 アルディヴィア・エス・ア Polymerization method for unsaturated fatty acid, unsaturated fatty acid ester, unsaturated hydrocarbon, or unsaturated derivative of product thereof, by dielectric heating

Also Published As

Publication number Publication date
JPH0248562B2 (en) 1990-10-25

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