JPS5614112A - Generator for reference position signal - Google Patents
Generator for reference position signalInfo
- Publication number
- JPS5614112A JPS5614112A JP8957679A JP8957679A JPS5614112A JP S5614112 A JPS5614112 A JP S5614112A JP 8957679 A JP8957679 A JP 8957679A JP 8957679 A JP8957679 A JP 8957679A JP S5614112 A JPS5614112 A JP S5614112A
- Authority
- JP
- Japan
- Prior art keywords
- lattice
- parts
- reference signal
- pitches
- lattice parts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8957679A JPS5614112A (en) | 1979-07-13 | 1979-07-13 | Generator for reference position signal |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8957679A JPS5614112A (en) | 1979-07-13 | 1979-07-13 | Generator for reference position signal |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5614112A true JPS5614112A (en) | 1981-02-10 |
Family
ID=13974620
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8957679A Pending JPS5614112A (en) | 1979-07-13 | 1979-07-13 | Generator for reference position signal |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5614112A (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62232516A (ja) * | 1986-04-02 | 1987-10-13 | Stanley Electric Co Ltd | 光学式ロ−タリ−エンコ−ダ |
WO2007108398A1 (ja) | 2006-03-20 | 2007-09-27 | Kabushiki Kaisha Yaskawa Denki | 光学式エンコーダ |
JP2010122224A (ja) * | 2008-11-20 | 2010-06-03 | Mitsutoyo Corp | 基準信号を検出可能な光ファイバ干渉型格子エンコーダ |
JP2013217833A (ja) * | 2012-04-11 | 2013-10-24 | Mitsutoyo Corp | エンコーダ |
EP3026400A1 (en) | 2014-11-28 | 2016-06-01 | Mitutoyo Corporation | Optical encoder |
WO2021050258A1 (en) | 2019-09-13 | 2021-03-18 | Applied Materials, Inc. | Measurement system and grating pattern array |
-
1979
- 1979-07-13 JP JP8957679A patent/JPS5614112A/ja active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62232516A (ja) * | 1986-04-02 | 1987-10-13 | Stanley Electric Co Ltd | 光学式ロ−タリ−エンコ−ダ |
WO2007108398A1 (ja) | 2006-03-20 | 2007-09-27 | Kabushiki Kaisha Yaskawa Denki | 光学式エンコーダ |
US8148674B2 (en) | 2006-03-20 | 2012-04-03 | Kabushiki Kaisha Yaskawa Denki | Optical encoder for detecting relative rotation angle for two members |
JP2010122224A (ja) * | 2008-11-20 | 2010-06-03 | Mitsutoyo Corp | 基準信号を検出可能な光ファイバ干渉型格子エンコーダ |
JP2013217833A (ja) * | 2012-04-11 | 2013-10-24 | Mitsutoyo Corp | エンコーダ |
EP3026400A1 (en) | 2014-11-28 | 2016-06-01 | Mitutoyo Corporation | Optical encoder |
US10024695B2 (en) | 2014-11-28 | 2018-07-17 | Mitutoyo Corporation | Optical encoder comprising an origin point detection scale having an origin point detection pattern |
WO2021050258A1 (en) | 2019-09-13 | 2021-03-18 | Applied Materials, Inc. | Measurement system and grating pattern array |
EP4028722A4 (en) * | 2019-09-13 | 2023-10-11 | Applied Materials, Inc. | MEASUREMENT SYSTEM AND NETWORK PATTERN SET |
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