JPS5614112A - Generator for reference position signal - Google Patents

Generator for reference position signal

Info

Publication number
JPS5614112A
JPS5614112A JP8957679A JP8957679A JPS5614112A JP S5614112 A JPS5614112 A JP S5614112A JP 8957679 A JP8957679 A JP 8957679A JP 8957679 A JP8957679 A JP 8957679A JP S5614112 A JPS5614112 A JP S5614112A
Authority
JP
Japan
Prior art keywords
lattice
parts
reference signal
pitches
lattice parts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8957679A
Other languages
English (en)
Inventor
Kazuo Shiratori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Futaba Corp
Original Assignee
Futaba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Futaba Corp filed Critical Futaba Corp
Priority to JP8957679A priority Critical patent/JPS5614112A/ja
Publication of JPS5614112A publication Critical patent/JPS5614112A/ja
Pending legal-status Critical Current

Links

JP8957679A 1979-07-13 1979-07-13 Generator for reference position signal Pending JPS5614112A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8957679A JPS5614112A (en) 1979-07-13 1979-07-13 Generator for reference position signal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8957679A JPS5614112A (en) 1979-07-13 1979-07-13 Generator for reference position signal

Publications (1)

Publication Number Publication Date
JPS5614112A true JPS5614112A (en) 1981-02-10

Family

ID=13974620

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8957679A Pending JPS5614112A (en) 1979-07-13 1979-07-13 Generator for reference position signal

Country Status (1)

Country Link
JP (1) JPS5614112A (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62232516A (ja) * 1986-04-02 1987-10-13 Stanley Electric Co Ltd 光学式ロ−タリ−エンコ−ダ
WO2007108398A1 (ja) 2006-03-20 2007-09-27 Kabushiki Kaisha Yaskawa Denki 光学式エンコーダ
JP2010122224A (ja) * 2008-11-20 2010-06-03 Mitsutoyo Corp 基準信号を検出可能な光ファイバ干渉型格子エンコーダ
JP2013217833A (ja) * 2012-04-11 2013-10-24 Mitsutoyo Corp エンコーダ
EP3026400A1 (en) 2014-11-28 2016-06-01 Mitutoyo Corporation Optical encoder
WO2021050258A1 (en) 2019-09-13 2021-03-18 Applied Materials, Inc. Measurement system and grating pattern array

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62232516A (ja) * 1986-04-02 1987-10-13 Stanley Electric Co Ltd 光学式ロ−タリ−エンコ−ダ
WO2007108398A1 (ja) 2006-03-20 2007-09-27 Kabushiki Kaisha Yaskawa Denki 光学式エンコーダ
US8148674B2 (en) 2006-03-20 2012-04-03 Kabushiki Kaisha Yaskawa Denki Optical encoder for detecting relative rotation angle for two members
JP2010122224A (ja) * 2008-11-20 2010-06-03 Mitsutoyo Corp 基準信号を検出可能な光ファイバ干渉型格子エンコーダ
JP2013217833A (ja) * 2012-04-11 2013-10-24 Mitsutoyo Corp エンコーダ
EP3026400A1 (en) 2014-11-28 2016-06-01 Mitutoyo Corporation Optical encoder
US10024695B2 (en) 2014-11-28 2018-07-17 Mitutoyo Corporation Optical encoder comprising an origin point detection scale having an origin point detection pattern
WO2021050258A1 (en) 2019-09-13 2021-03-18 Applied Materials, Inc. Measurement system and grating pattern array
EP4028722A4 (en) * 2019-09-13 2023-10-11 Applied Materials, Inc. MEASUREMENT SYSTEM AND NETWORK PATTERN SET

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