JPS56138208A - Radiant ray thickness gauge - Google Patents

Radiant ray thickness gauge

Info

Publication number
JPS56138208A
JPS56138208A JP4157280A JP4157280A JPS56138208A JP S56138208 A JPS56138208 A JP S56138208A JP 4157280 A JP4157280 A JP 4157280A JP 4157280 A JP4157280 A JP 4157280A JP S56138208 A JPS56138208 A JP S56138208A
Authority
JP
Japan
Prior art keywords
diaphragm
collimator
radiation
thickness gauge
radiation source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4157280A
Other languages
Japanese (ja)
Inventor
Makoto Kudo
Shigeo Nakamura
Masahiko Yamashita
Tatsuo Tsujii
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP4157280A priority Critical patent/JPS56138208A/en
Publication of JPS56138208A publication Critical patent/JPS56138208A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To elevate both the incident efficiency and the resolution of a transmission radiant ray, and also manufacture a thickness gauge easily, by providing a diaphragm which is able to adjust a position, on the radiation source side, and providing a collimater having a prescribed structure, on the detector side so as to be able to adjust the angle. CONSTITUTION:A radiation source 11 and a radiation detector 13 are placed in the frame 14. A diaphragm 15 with a hole for controlling the radiation direction and range is placed close by the radiation source 11, and also a collimator 16 for raising the incident efficiency is placed on the incident side. As for this diaphragm 15, the diaphragm center is made to be able to freely move against the radiation center axis, by which the position can be adjusted. On the other hand, as for the collimator 16, >=2 collimator elements 16-1, 16-2 on which plural slits 16a have been placed in order so that a focus is formed on the same point are piled up so that they make a 90 deg. position with each other. Since the collimator 16 is able to make a fine adjustment of the angle, a focus position can be adjusted. In this way, it is possible to obtain a thickness gauge which has elevated both the incident efficiency and the resolution, and can be manufactured easily.
JP4157280A 1980-03-31 1980-03-31 Radiant ray thickness gauge Pending JPS56138208A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4157280A JPS56138208A (en) 1980-03-31 1980-03-31 Radiant ray thickness gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4157280A JPS56138208A (en) 1980-03-31 1980-03-31 Radiant ray thickness gauge

Publications (1)

Publication Number Publication Date
JPS56138208A true JPS56138208A (en) 1981-10-28

Family

ID=12612150

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4157280A Pending JPS56138208A (en) 1980-03-31 1980-03-31 Radiant ray thickness gauge

Country Status (1)

Country Link
JP (1) JPS56138208A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011027559A (en) * 2009-07-27 2011-02-10 Hitachi Engineering & Services Co Ltd Moisture measurement apparatus and moisture measurement method
CN102284513A (en) * 2011-05-16 2011-12-21 清华大学 Collimating mechanism for convexity instrument
KR20180111429A (en) * 2017-03-31 2018-10-11 세메스 주식회사 X-ray testing apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011027559A (en) * 2009-07-27 2011-02-10 Hitachi Engineering & Services Co Ltd Moisture measurement apparatus and moisture measurement method
CN102284513A (en) * 2011-05-16 2011-12-21 清华大学 Collimating mechanism for convexity instrument
KR20180111429A (en) * 2017-03-31 2018-10-11 세메스 주식회사 X-ray testing apparatus
JP2018173351A (en) * 2017-03-31 2018-11-08 セメス株式会社Ｓｅｍｅｓ Ｃｏ．， Ｌｔｄ． X-ray inspection device

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