JPS56136635A - Production of ultra-fine powder and particle utilizing arc plasma sputtering and its device - Google Patents
Production of ultra-fine powder and particle utilizing arc plasma sputtering and its deviceInfo
- Publication number
- JPS56136635A JPS56136635A JP4014380A JP4014380A JPS56136635A JP S56136635 A JPS56136635 A JP S56136635A JP 4014380 A JP4014380 A JP 4014380A JP 4014380 A JP4014380 A JP 4014380A JP S56136635 A JPS56136635 A JP S56136635A
- Authority
- JP
- Japan
- Prior art keywords
- ultra
- fine particles
- vapor
- chamber
- production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000002245 particle Substances 0.000 title 1
- 238000002294 plasma sputter deposition Methods 0.000 title 1
- 239000000843 powder Substances 0.000 title 1
- 239000000463 material Substances 0.000 abstract 4
- 239000001307 helium Substances 0.000 abstract 2
- 229910052734 helium Inorganic materials 0.000 abstract 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract 2
- 239000011261 inert gas Substances 0.000 abstract 2
- 229910044991 metal oxide Inorganic materials 0.000 abstract 2
- 150000004706 metal oxides Chemical class 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 2
- 239000011882 ultra-fine particle Substances 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 1
- 238000007599 discharging Methods 0.000 abstract 1
- 238000010891 electric arc Methods 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 239000010419 fine particle Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Carbon And Carbon Compounds (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Powder Metallurgy (AREA)
- Glanulating (AREA)
Abstract
PURPOSE: To produce ultra-fine particles of ≤1,000Å by heating and evaporating metal oxide and carbide, semiconductor material by plasma arc discharging in an inert gas atmosphere thereby making ultra-fine particles.
CONSTITUTION: Metal oxide or carbide or semiconductor material M is placed on the tray in a vapor generating chamber 1, and the inside of the chamber is evacuated to a vacuum through an exhaust pipe 16, thence the valve 9" of a gas supply pipe 9' in the lower part is opened to introduce an inert gas such as helium into the chamber. Thence, when an upper annular electrode body 6 and a middle annular electrode 5 are connected by way of a high-voltage power source 12, plasma arc discharge takes place, and the vapor of the intended material generates from the material M. The high-temp. helium plasma containing this is ejected through an ejection port J into a cohering cylinder 2. In the cohering cylinder 2, the vapor is cooled and forms fine particles which deposit on the surface of a cooling and capturing device 15.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4014380A JPS56136635A (en) | 1980-03-29 | 1980-03-29 | Production of ultra-fine powder and particle utilizing arc plasma sputtering and its device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4014380A JPS56136635A (en) | 1980-03-29 | 1980-03-29 | Production of ultra-fine powder and particle utilizing arc plasma sputtering and its device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56136635A true JPS56136635A (en) | 1981-10-26 |
JPS6320571B2 JPS6320571B2 (en) | 1988-04-28 |
Family
ID=12572547
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4014380A Granted JPS56136635A (en) | 1980-03-29 | 1980-03-29 | Production of ultra-fine powder and particle utilizing arc plasma sputtering and its device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56136635A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6261601A (en) * | 1985-09-09 | 1987-03-18 | Shigeki Yatani | Method for forming particles by sputtering |
JPS634006A (en) * | 1986-06-24 | 1988-01-09 | Nok Corp | Production of magnetic fluid |
JPH0328363A (en) * | 1989-06-23 | 1991-02-06 | Sanyo Electric Co Ltd | Method and device for forming thin film |
CN1090548C (en) * | 1999-12-23 | 2002-09-11 | 武汉大学 | Synthesizing method of metal-in-carbon and metal-in-carbon carbide nanometer micropowder |
CN103962567A (en) * | 2014-05-31 | 2014-08-06 | 金堆城钼业股份有限公司 | Method and equipment for preparing spherical molybdenum powder |
CN104117685A (en) * | 2014-07-30 | 2014-10-29 | 金堆城钼业股份有限公司 | Method for preparing sodium molybdate doped molybdenum powder |
CN110935885A (en) * | 2019-11-11 | 2020-03-31 | 山西中磁尚善科技有限公司 | Flaky metal grinding process |
-
1980
- 1980-03-29 JP JP4014380A patent/JPS56136635A/en active Granted
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6261601A (en) * | 1985-09-09 | 1987-03-18 | Shigeki Yatani | Method for forming particles by sputtering |
JPS634006A (en) * | 1986-06-24 | 1988-01-09 | Nok Corp | Production of magnetic fluid |
JPH0328363A (en) * | 1989-06-23 | 1991-02-06 | Sanyo Electric Co Ltd | Method and device for forming thin film |
CN1090548C (en) * | 1999-12-23 | 2002-09-11 | 武汉大学 | Synthesizing method of metal-in-carbon and metal-in-carbon carbide nanometer micropowder |
CN103962567A (en) * | 2014-05-31 | 2014-08-06 | 金堆城钼业股份有限公司 | Method and equipment for preparing spherical molybdenum powder |
CN103962567B (en) * | 2014-05-31 | 2015-10-21 | 金堆城钼业股份有限公司 | A kind of preparation method of spherical molybdenum powder and equipment |
CN104117685A (en) * | 2014-07-30 | 2014-10-29 | 金堆城钼业股份有限公司 | Method for preparing sodium molybdate doped molybdenum powder |
CN110935885A (en) * | 2019-11-11 | 2020-03-31 | 山西中磁尚善科技有限公司 | Flaky metal grinding process |
Also Published As
Publication number | Publication date |
---|---|
JPS6320571B2 (en) | 1988-04-28 |
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