JPS56132549A - Apparatus for inspecting face plate - Google Patents

Apparatus for inspecting face plate

Info

Publication number
JPS56132549A
JPS56132549A JP3609380A JP3609380A JPS56132549A JP S56132549 A JPS56132549 A JP S56132549A JP 3609380 A JP3609380 A JP 3609380A JP 3609380 A JP3609380 A JP 3609380A JP S56132549 A JPS56132549 A JP S56132549A
Authority
JP
Japan
Prior art keywords
register group
face plate
addresses
foreign object
bit length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3609380A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6361611B2 (enrdf_load_stackoverflow
Inventor
Yoshimasa Oshima
Nobuyuki Akiyama
Mitsuyoshi Koizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3609380A priority Critical patent/JPS56132549A/ja
Publication of JPS56132549A publication Critical patent/JPS56132549A/ja
Publication of JPS6361611B2 publication Critical patent/JPS6361611B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06M—COUNTING MECHANISMS; COUNTING OF OBJECTS NOT OTHERWISE PROVIDED FOR
    • G06M11/00—Counting of objects distributed at random, e.g. on a surface
    • G06M11/02—Counting of objects distributed at random, e.g. on a surface using an electron beam scanning a surface line by line, e.g. of blood cells on a substrate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP3609380A 1980-03-24 1980-03-24 Apparatus for inspecting face plate Granted JPS56132549A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3609380A JPS56132549A (en) 1980-03-24 1980-03-24 Apparatus for inspecting face plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3609380A JPS56132549A (en) 1980-03-24 1980-03-24 Apparatus for inspecting face plate

Publications (2)

Publication Number Publication Date
JPS56132549A true JPS56132549A (en) 1981-10-16
JPS6361611B2 JPS6361611B2 (enrdf_load_stackoverflow) 1988-11-29

Family

ID=12460132

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3609380A Granted JPS56132549A (en) 1980-03-24 1980-03-24 Apparatus for inspecting face plate

Country Status (1)

Country Link
JP (1) JPS56132549A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5410400A (en) * 1991-06-26 1995-04-25 Hitachi, Ltd. Foreign particle inspection apparatus
US6064477A (en) * 1993-02-26 2000-05-16 Hitachi, Ltd. Method of and apparatus for inspecting reticle for defects

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5555206A (en) * 1978-10-20 1980-04-23 Hitachi Electronics Eng Co Ltd Inspection data processing system for defect on face plate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5555206A (en) * 1978-10-20 1980-04-23 Hitachi Electronics Eng Co Ltd Inspection data processing system for defect on face plate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5410400A (en) * 1991-06-26 1995-04-25 Hitachi, Ltd. Foreign particle inspection apparatus
US6084664A (en) * 1992-11-30 2000-07-04 Hitachi, Ltd. Method of and apparatus for inspecting reticle for defects
US6064477A (en) * 1993-02-26 2000-05-16 Hitachi, Ltd. Method of and apparatus for inspecting reticle for defects

Also Published As

Publication number Publication date
JPS6361611B2 (enrdf_load_stackoverflow) 1988-11-29

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