JPS5613019B2 - - Google Patents

Info

Publication number
JPS5613019B2
JPS5613019B2 JP12250772A JP12250772A JPS5613019B2 JP S5613019 B2 JPS5613019 B2 JP S5613019B2 JP 12250772 A JP12250772 A JP 12250772A JP 12250772 A JP12250772 A JP 12250772A JP S5613019 B2 JPS5613019 B2 JP S5613019B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12250772A
Other languages
Japanese (ja)
Other versions
JPS4979792A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12250772A priority Critical patent/JPS5613019B2/ja
Publication of JPS4979792A publication Critical patent/JPS4979792A/ja
Publication of JPS5613019B2 publication Critical patent/JPS5613019B2/ja
Expired legal-status Critical Current

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  • Element Separation (AREA)
JP12250772A 1972-12-08 1972-12-08 Expired JPS5613019B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12250772A JPS5613019B2 (en:Method) 1972-12-08 1972-12-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12250772A JPS5613019B2 (en:Method) 1972-12-08 1972-12-08

Publications (2)

Publication Number Publication Date
JPS4979792A JPS4979792A (en:Method) 1974-08-01
JPS5613019B2 true JPS5613019B2 (en:Method) 1981-03-25

Family

ID=14837543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12250772A Expired JPS5613019B2 (en:Method) 1972-12-08 1972-12-08

Country Status (1)

Country Link
JP (1) JPS5613019B2 (en:Method)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51139281A (en) * 1975-05-28 1976-12-01 Hitachi Ltd Semi-conductor device
JPS51146194A (en) * 1975-05-28 1976-12-15 Hitachi Ltd Diode device fabrication method
JPS5255877A (en) * 1975-11-01 1977-05-07 Fujitsu Ltd Semiconductor device
JPS60166156U (ja) * 1985-03-07 1985-11-05 セイコーエプソン株式会社 相補型mos集積回路装置

Also Published As

Publication number Publication date
JPS4979792A (en:Method) 1974-08-01

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