JPS56122925A - Sensor - Google Patents

Sensor

Info

Publication number
JPS56122925A
JPS56122925A JP2590080A JP2590080A JPS56122925A JP S56122925 A JPS56122925 A JP S56122925A JP 2590080 A JP2590080 A JP 2590080A JP 2590080 A JP2590080 A JP 2590080A JP S56122925 A JPS56122925 A JP S56122925A
Authority
JP
Japan
Prior art keywords
light
diaphragm
face
fiber
incident
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2590080A
Other languages
Japanese (ja)
Inventor
Yoshio Shimada
Mutsumi Miyataka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2590080A priority Critical patent/JPS56122925A/en
Publication of JPS56122925A publication Critical patent/JPS56122925A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
    • G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0016—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a diaphragm
    • G01L9/0017—Optical excitation or measuring

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To obtain a sensor which can convert the change of a physical quantity to an intermittent output change, by irradiating the light to the mirror surface of the elastic member excited by the exciting mechanism and by detecting the output change of the reflected light optically. CONSTITUTION:Pressure receiving diaphragm 1 is provided which forms one face of pressure leading-in room 2 and has one face subjected to the mirror face 1a treatment. This pressure receiving diaphragm is excited by oscillating coil 3, and excitation is detected by pickup coil 4 and is fed back to control part 5 of oscillating coil 3 to generate a natural oscillation corresponding to the sag quantity of diaphragm 1. For the purpose of detecting this natural oscillation, if fibers are so arranged that the light incident to incident light fiber 6 is reflected by mirror face 1a and is outputted to emitted light fiber 7 under the state where diaphragm 1 is not sagged, the incident light is taken out twice from fiber 7 at one period when diaphragm 1 oscillates at a fixed period, and thus, the sag quantity is converted to a light signal.
JP2590080A 1980-02-29 1980-02-29 Sensor Pending JPS56122925A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2590080A JPS56122925A (en) 1980-02-29 1980-02-29 Sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2590080A JPS56122925A (en) 1980-02-29 1980-02-29 Sensor

Publications (1)

Publication Number Publication Date
JPS56122925A true JPS56122925A (en) 1981-09-26

Family

ID=12178656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2590080A Pending JPS56122925A (en) 1980-02-29 1980-02-29 Sensor

Country Status (1)

Country Link
JP (1) JPS56122925A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59172349U (en) * 1983-05-06 1984-11-17 日立造船株式会社 pressure sensor
WO2003062778A1 (en) * 2002-01-21 2003-07-31 Fujikin Incorporated Vibrating type pressure sensor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59172349U (en) * 1983-05-06 1984-11-17 日立造船株式会社 pressure sensor
JPH0355074Y2 (en) * 1983-05-06 1991-12-06
WO2003062778A1 (en) * 2002-01-21 2003-07-31 Fujikin Incorporated Vibrating type pressure sensor
US6938489B2 (en) 2002-01-21 2005-09-06 Fujikin Incorporated Oscillatory type pressure sensor

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