JPS56121151U - - Google Patents

Info

Publication number
JPS56121151U
JPS56121151U JP1980017967U JP1796780U JPS56121151U JP S56121151 U JPS56121151 U JP S56121151U JP 1980017967 U JP1980017967 U JP 1980017967U JP 1796780 U JP1796780 U JP 1796780U JP S56121151 U JPS56121151 U JP S56121151U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1980017967U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1980017967U priority Critical patent/JPS56121151U/ja
Priority to US06/234,175 priority patent/US4349242A/en
Publication of JPS56121151U publication Critical patent/JPS56121151U/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical or photographic arrangements associated with the tube
    • H01J37/226—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object
    • H01J37/228—Optical arrangements for illuminating the object; optical arrangements for collecting light from the object whereby illumination and light collection take place in the same area of the discharge
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/76—Television signal recording
    • H04N5/765—Interface circuits between an apparatus for recording and another apparatus
    • H04N5/77—Interface circuits between an apparatus for recording and another apparatus between a recording apparatus and a television camera

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Signal Processing (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analysing Biological Materials (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)
JP1980017967U 1980-02-15 1980-02-15 Pending JPS56121151U (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1980017967U JPS56121151U (ja) 1980-02-15 1980-02-15
US06/234,175 US4349242A (en) 1980-02-15 1981-02-13 Specimen observation apparatus including an optical microscope and a scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1980017967U JPS56121151U (ja) 1980-02-15 1980-02-15

Publications (1)

Publication Number Publication Date
JPS56121151U true JPS56121151U (ja) 1981-09-16

Family

ID=11958498

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1980017967U Pending JPS56121151U (ja) 1980-02-15 1980-02-15

Country Status (2)

Country Link
US (1) US4349242A (ja)
JP (1) JPS56121151U (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004191183A (ja) * 2002-12-11 2004-07-08 Shimadzu Corp 分析装置
JP2008300354A (ja) * 2007-05-31 2008-12-11 Fei Co 荷電粒子装置内での試料キャリアの使用、当該試料キャリアの使用方法、及び当該試料キャリアを用いるように備えられた装置
JP2009250904A (ja) * 2008-04-10 2009-10-29 Jeol Ltd 検査装置及び検査方法

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5795056A (en) * 1980-12-05 1982-06-12 Hitachi Ltd Appearance inspecting process
GB2130433B (en) * 1982-03-05 1986-02-05 Jeol Ltd Scanning electron microscope with as optical microscope
US4999495A (en) * 1988-08-31 1991-03-12 Seiko Instruments Inc. Scanning tunneling microscope
US5229607A (en) * 1990-04-19 1993-07-20 Hitachi, Ltd. Combination apparatus having a scanning electron microscope therein
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope
US5920073A (en) * 1997-04-22 1999-07-06 Schlumberger Technologies, Inc. Optical system
US6414322B1 (en) 1999-01-25 2002-07-02 Micron Technology, Inc. Sample mount for a scanning electron microscope
DE10007650C2 (de) * 2000-02-19 2003-04-10 Leica Microsystems Lichtoptisches Mikroskop mit Elektronenstrahl-Einrichtung
EP1998206A3 (en) * 2007-05-31 2009-12-09 FEI Company Sample carrier for use in a charged particle instrument, method of using it and apparatus equipped to use such
EP2419215B1 (en) * 2009-04-15 2015-07-01 FEI Company Optical probing in electron microscopes
DE102009020663A1 (de) 2009-05-11 2010-11-25 Carl Zeiss Ag Mikroskopie eines Objektes mit einer Abfolge von optischer Mikroskopie und Teilchenstrahlmikroskopie
US9310596B2 (en) * 2010-04-06 2016-04-12 Inter-University Research Institute Corporation National Institute Of Natural Sciences Compound microscope device
CN106525845B (zh) 2016-10-11 2023-11-03 聚束科技（北京）有限公司 一种带电粒子束系统、光电联合探测系统及方法
EP3538941A4 (en) 2016-11-10 2020-06-17 The Trustees of Columbia University in the City of New York METHODS FOR FAST IMAGING OF HIGH RESOLUTION LARGE SAMPLES
US10176963B2 (en) 2016-12-09 2019-01-08 Waviks, Inc. Method and apparatus for alignment of optical and charged-particle beams in an electron microscope

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1235455B (de) * 1962-07-05 1967-03-02 Philips Electronic Pharma Elektronenmikroskop
US3169183A (en) * 1962-10-17 1965-02-09 United Aircraft Corp Optical viewing system for electron beam machine
US3378670A (en) * 1964-03-23 1968-04-16 Westinghouse Electric Corp Method of craterless electron beam welding
US3371185A (en) * 1964-10-05 1968-02-27 United Aircraft Corp Electron beam maintenance device
US3761709A (en) * 1971-03-16 1973-09-25 Jeol Ltd Method and apparatus for observing biological specimens using a scanning electron microscope
SU397827A1 (ru) * 1971-12-01 1973-09-17 Камера образцов для электронно-зондового микроанализатора

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004191183A (ja) * 2002-12-11 2004-07-08 Shimadzu Corp 分析装置
JP2008300354A (ja) * 2007-05-31 2008-12-11 Fei Co 荷電粒子装置内での試料キャリアの使用、当該試料キャリアの使用方法、及び当該試料キャリアを用いるように備えられた装置
JP2009250904A (ja) * 2008-04-10 2009-10-29 Jeol Ltd 検査装置及び検査方法

Also Published As

Publication number Publication date
US4349242A (en) 1982-09-14

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