JPS56114809A - Ozonizer - Google Patents
OzonizerInfo
- Publication number
- JPS56114809A JPS56114809A JP1477480A JP1477480A JPS56114809A JP S56114809 A JPS56114809 A JP S56114809A JP 1477480 A JP1477480 A JP 1477480A JP 1477480 A JP1477480 A JP 1477480A JP S56114809 A JPS56114809 A JP S56114809A
- Authority
- JP
- Japan
- Prior art keywords
- ozone
- ozonizer
- back flow
- prevented
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Abstract
PURPOSE: To prevent ozone harmul to the human body from leaking outside during power failure or emergency stop, by equipping the raw material air pipe of the titled device with a checking device.
CONSTITUTION: In an ozonizer wherein an air from the blower 1 is dehumidified by the defumidifier 3 and sent to the ozonizer 11, high voltage is applied from the power device 30 to the discharge electrode 13 of the ozonizer 11 to give ozone, air pipes are equipped with the back flow preventing device 30, e.g., check valve, solenoid valve, etc. and the piping 24 for discharge connected to the ozonizer. The back flow of ozone is prevented by the back flow preventing device 30 during power failure or emergency stop, and ozone is released to a decomposing device by the piping 24 for discharge. Thus the leakage of harmful ozone to outside is prevented, and the oxidation of the dehumidifier, air source device, etc. caused by the back flow of ozone with highly oxidative effect is also prevented.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1477480A JPS56114809A (en) | 1980-02-12 | 1980-02-12 | Ozonizer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1477480A JPS56114809A (en) | 1980-02-12 | 1980-02-12 | Ozonizer |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56114809A true JPS56114809A (en) | 1981-09-09 |
Family
ID=11870391
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1477480A Pending JPS56114809A (en) | 1980-02-12 | 1980-02-12 | Ozonizer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56114809A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1108468A1 (en) * | 1999-12-17 | 2001-06-20 | IPS Ltd | Thin film deposition apparatus |
JP2009143807A (en) * | 2009-03-30 | 2009-07-02 | Mitsubishi Electric Corp | Method for production of ozone |
JP2020007192A (en) * | 2018-07-10 | 2020-01-16 | 東芝三菱電機産業システム株式会社 | Ozone gas-generating apparatus and ozone gas-utilizing system |
JP2020065966A (en) * | 2018-10-23 | 2020-04-30 | 三菱電機株式会社 | Purifier and ozone supply device |
-
1980
- 1980-02-12 JP JP1477480A patent/JPS56114809A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1108468A1 (en) * | 1999-12-17 | 2001-06-20 | IPS Ltd | Thin film deposition apparatus |
US6740166B2 (en) | 1999-12-17 | 2004-05-25 | Ips, Ltd. | Thin film deposition apparatus for semiconductor |
JP2009143807A (en) * | 2009-03-30 | 2009-07-02 | Mitsubishi Electric Corp | Method for production of ozone |
JP2020007192A (en) * | 2018-07-10 | 2020-01-16 | 東芝三菱電機産業システム株式会社 | Ozone gas-generating apparatus and ozone gas-utilizing system |
JP2020065966A (en) * | 2018-10-23 | 2020-04-30 | 三菱電機株式会社 | Purifier and ozone supply device |
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