JPS56114809A - Ozonizer - Google Patents

Ozonizer

Info

Publication number
JPS56114809A
JPS56114809A JP1477480A JP1477480A JPS56114809A JP S56114809 A JPS56114809 A JP S56114809A JP 1477480 A JP1477480 A JP 1477480A JP 1477480 A JP1477480 A JP 1477480A JP S56114809 A JPS56114809 A JP S56114809A
Authority
JP
Japan
Prior art keywords
ozone
ozonizer
back flow
prevented
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1477480A
Other languages
Japanese (ja)
Inventor
Hiroshi Kayahara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP1477480A priority Critical patent/JPS56114809A/en
Publication of JPS56114809A publication Critical patent/JPS56114809A/en
Pending legal-status Critical Current

Links

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

PURPOSE: To prevent ozone harmul to the human body from leaking outside during power failure or emergency stop, by equipping the raw material air pipe of the titled device with a checking device.
CONSTITUTION: In an ozonizer wherein an air from the blower 1 is dehumidified by the defumidifier 3 and sent to the ozonizer 11, high voltage is applied from the power device 30 to the discharge electrode 13 of the ozonizer 11 to give ozone, air pipes are equipped with the back flow preventing device 30, e.g., check valve, solenoid valve, etc. and the piping 24 for discharge connected to the ozonizer. The back flow of ozone is prevented by the back flow preventing device 30 during power failure or emergency stop, and ozone is released to a decomposing device by the piping 24 for discharge. Thus the leakage of harmful ozone to outside is prevented, and the oxidation of the dehumidifier, air source device, etc. caused by the back flow of ozone with highly oxidative effect is also prevented.
COPYRIGHT: (C)1981,JPO&Japio
JP1477480A 1980-02-12 1980-02-12 Ozonizer Pending JPS56114809A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1477480A JPS56114809A (en) 1980-02-12 1980-02-12 Ozonizer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1477480A JPS56114809A (en) 1980-02-12 1980-02-12 Ozonizer

Publications (1)

Publication Number Publication Date
JPS56114809A true JPS56114809A (en) 1981-09-09

Family

ID=11870391

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1477480A Pending JPS56114809A (en) 1980-02-12 1980-02-12 Ozonizer

Country Status (1)

Country Link
JP (1) JPS56114809A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1108468A1 (en) * 1999-12-17 2001-06-20 IPS Ltd Thin film deposition apparatus
JP2009143807A (en) * 2009-03-30 2009-07-02 Mitsubishi Electric Corp Method for production of ozone
JP2020007192A (en) * 2018-07-10 2020-01-16 東芝三菱電機産業システム株式会社 Ozone gas-generating apparatus and ozone gas-utilizing system
JP2020065966A (en) * 2018-10-23 2020-04-30 三菱電機株式会社 Purifier and ozone supply device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1108468A1 (en) * 1999-12-17 2001-06-20 IPS Ltd Thin film deposition apparatus
US6740166B2 (en) 1999-12-17 2004-05-25 Ips, Ltd. Thin film deposition apparatus for semiconductor
JP2009143807A (en) * 2009-03-30 2009-07-02 Mitsubishi Electric Corp Method for production of ozone
JP2020007192A (en) * 2018-07-10 2020-01-16 東芝三菱電機産業システム株式会社 Ozone gas-generating apparatus and ozone gas-utilizing system
JP2020065966A (en) * 2018-10-23 2020-04-30 三菱電機株式会社 Purifier and ozone supply device

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