JP2009143807A - Method for production of ozone - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of producing ozone by using an apparatus which enables safety treatment of ozone by preventing the adsorbed and stored ozone from being rapidly decomposed even in such abnormal operation states as electric power failure or high pressure and/or high temperature in an adsorbing/desorbing column. <P>SOLUTION: The ozone production apparatus includes: an ozonizer for generating ozonized oxygen; the adsorbing/desorbing column for adsorbing and storing ozone from the ozonized oxygen generated in the ozonizer; and an ozone desorption means for desorbing and supplying ozone that is adsorbed and stored. In the ozone production apparatus, a reducer-storing tank is connected to the adsorbing/desorbing column through a switching valve, and this valve is opened in an abnormal operation state of the apparatus. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a method for producing ozone by an ozone production apparatus. More specifically, the present invention relates to a method of manufacturing ozone by an ozone manufacturing apparatus that continuously manufactures ozone, adsorbs and stores it, and desorbs (separates) the ozone when necessary.

  A large amount of cooling water is used in power plants, chemical industries, etc., but microorganisms and algae in the irrigation water cause slime damage, which causes blockage of the pipeline and a decrease in heat exchange rate. Application of high-concentration ozone water can be considered as a preventive measure of this kind. In order to generate high-concentration ozone water, the generated ozone is accumulated in the adsorbent over a long period of time using a small and small-capacity ozone generator rather than using a large-capacity ozone generator. The so-called intermittent ozone production method, in which the accumulated ozone is taken out from the adsorbent as necessary to produce high-concentration ozone water, is advantageous from the viewpoint of equipment costs and operation costs.

  As an ozone production apparatus using such an ozone production system, for example, as shown in FIG. 25, an ozone generator 50, an oxygen supply source 51, a circulation blower 52, an adsorption / desorption tower 53, a cooling heat source 54, and a heating source. 55, a water flow ejector 56, and switching valves 57a-57g. The adsorption / desorption tower 53 is a double cylinder, the inner cylinder is filled with an ozone adsorbent, and the outer cylinder is filled with a heat medium. For example, silica gel is used as the ozone adsorbent, and ethylene glycol or alcohols are used as the heat medium. Further, the circulation blower 52, the ozone generator 50, and the adsorption / desorption tower 53 constitute one circulation system in this order.

  Next, the operation will be described. This operation includes two steps, an ozone adsorption storage step and a desorption step.

First, the ozone adsorption and storage process will be described. Oxygen is supplied from the oxygen supply source 51 into the circulation system so that the pressure is always constant. The pressure at this time is normally maintained at 1.5 kg / cm ² . When the switching valves 57c and 57d are opened and oxygen is circulated and circulated in the circulation system by the circulation blower 52, a part of oxygen is converted into ozone while passing through the discharge space of the ozone generator 50, and is ozonized. Become oxygen. This ozonated oxygen is sent to the adsorption / desorption tower 53. The ozone adsorbent in the adsorption / desorption tower 53 selectively adsorbs ozone, and the remaining oxygen is returned to the circulation blower 52 via the switching valve 57c. The amount of oxygen converted and adsorbed into ozone is supplemented from the oxygen supply source 51. At this time, the temperature of the ozone adsorbent is cooled to −30 ° C. or less by the cold heat source 54 because the ozone adsorption amount greatly varies depending on the temperature. That is, when the temperature decreases, the ozone adsorption amount increases, and conversely when it rises, the ozone adsorption amount decreases. Therefore, the temperature of the adsorbent is raised by the heating source 55 when desorbing ozone.

  When the adsorbent of the adsorption / desorption tower 53 adsorbs ozone to near the saturated adsorption amount, the process proceeds to the desorption process. In the desorption process, the operation of the ozone generator 50, the circulation blower 52 and the cold heat source 54 is stopped, and the switching valves 57a to 57d are closed. After that, the heating source 55 and the water flow ejector 56 start operating, and the switching valves 57e to 57g are opened. At this time, heat is applied from the heating source 55 to increase the temperature of the adsorbent so that ozone adsorbed and stored in the adsorbent is easily desorbed. Then, ozone in the adsorption / desorption tower 53 is sucked under reduced pressure by the water flow ejector 56, dispersed in water in the water flow ejector 56, dissolved, and sent to the place of use as ozone water. As described above, when the desorption process is completed, the operation proceeds to the initial adsorption process again, and the operation is continuously repeated.

  In the conventional apparatus, for example, when a power failure occurs during the operation of the adsorption process, the cold heat source 54 stops, the temperature of the ozone adsorbent in the adsorption / desorption tower 53 rises, and the ozone adsorption amount decreases. As a result, the adsorbed ozone is separated from the adsorbent, the ozone filled in the adsorption / desorption tower 53 at a high concentration and high pressure starts to decompose rapidly, and the stored ozone is consumed wastefully. There was a problem. Further, even when a power failure occurs in the desorption process, it becomes impossible to take out ozone that is filled in the adsorption / desorption tower 53 with high concentration and high pressure.

  Further, even when the adsorption / desorption tower 53 is equipped with a safety valve, high concentration of ozone cannot be released to the environment around the apparatus, and when it is connected to the ozonolysis apparatus, a large amount at once. Since high-concentration ozone is released, a very large-capacity ozonolysis device must be installed, and it is not an economical measure as a safety device in case of emergency.

  In view of the above circumstances, the present invention manufactures ozone by an ozone manufacturing apparatus that can prevent destruction or explosion or fire of the apparatus in advance and can safely treat adsorbed ozone even when a power failure occurs. It aims to provide a way to do that.

  A method for producing ozone by an ozone production apparatus, comprising: (a) a step of generating ozonated oxygen using an ozone generator; and (b) adsorbing and storing ozone from the ozonated oxygen using an adsorption / desorption tower. A step, (c) a step of desorbing the adsorbed and stored ozone using a desorption means, (d) a step of monitoring a power supply state to the ozone production apparatus, and (e) the step (d). And a step of closing a switching valve that connects the adsorption / desorption tower and the desorption means when a power failure is detected and the inside of the adsorption / desorption tower is at a negative pressure in the step (c). It is a method for producing the characteristic ozone.

  Moreover, it is a method for producing ozone by an ozone production apparatus, wherein (a) a step of generating ozonated oxygen using an ozone generator, and (b) adsorption of ozone from the ozonated oxygen using an adsorption / desorption tower. A step of storing, (c) a step of desorbing the adsorbed and stored ozone using a desorption means, (d) a step of monitoring a power supply state to the ozone production apparatus, and (e) the step (d) ) And when the temperature of the adsorbent in the adsorption / desorption tower is increased in the step (c), the reducing agent reservoir, the filler or the gas reservoir, and the adsorption / desorption tower And a step of opening a switching valve that connects the two to each other.

  Furthermore, it is a method for producing ozone by an ozone production apparatus, wherein (a) a step of generating ozonated oxygen using an ozone generator, and (b) adsorption of ozone from the ozonized oxygen using an adsorption / desorption tower. A step of storing; (c) a step of desorbing the adsorbed and stored ozone using a desorption means; (d) a step of monitoring a power supply state to the ozone production device; and (e) the ozone production device. When a power failure is detected in the step (d) when the is in the step (b), a reducing agent reservoir, a filler or a gas reservoir after a certain time has elapsed after the temperature in the adsorption / desorption tower starts to rise. And a step of opening a switching valve for connecting the adsorption / desorption tower to the adsorption / desorption tower.

  As described above, according to the present invention, when a power failure occurs, the ozone stored in the adsorption / desorption tower is extracted, so that it can be operated safely.

It is a block diagram of the ozone manufacturing apparatus concerning Embodiment 1 of this invention. It is a block diagram of the ozone manufacturing apparatus concerning Embodiment 2 of this invention. It is a block diagram of the ozone manufacturing apparatus concerning Embodiment 3 of this invention. It is a block diagram of the ozone manufacturing apparatus concerning Embodiment 4 of this invention. 1 is a configuration diagram of an ozone production apparatus according to Reference Example 1. FIG. It is a block diagram of the ozone manufacturing apparatus in the reference example 2. It is a block diagram of the ozone manufacturing apparatus concerning the reference example 3. It is a block diagram of the ozone manufacturing apparatus concerning the reference example 4. FIG. 10 is a configuration diagram of an ozone production apparatus according to Reference Example 5. FIG. 10 is a configuration diagram of an ozone production apparatus according to Reference Example 6. FIG. 10 is a configuration diagram of an ozone production apparatus according to Reference Example 7. 10 is a configuration diagram of an ozone production apparatus according to Reference Example 8. FIG. It is a block diagram of the ozone manufacturing apparatus concerning the reference example 9. FIG. 12 is a configuration diagram of an ozone production apparatus according to Reference Example 10. It is a block diagram of the ozone manufacturing apparatus concerning the reference example 11. It is a block diagram of the ozone manufacturing apparatus concerning the reference example 12. It is a block diagram of the ozone manufacturing apparatus concerning the reference example 13. It is a block diagram of the ozone manufacturing apparatus concerning the reference example 14. FIG. 16 is a configuration diagram of an ozone production apparatus according to Reference Example 15. FIG. 16 is a configuration diagram of an ozone production apparatus according to Reference Example 16. It is a block diagram of the ozone manufacturing apparatus concerning the reference example 17. It is a block diagram of the ozone manufacturing apparatus concerning the reference example 18. FIG. It is a block diagram of the ozone manufacturing apparatus concerning the reference example 19. FIG. 10 is a configuration diagram of an ozone production apparatus according to Reference Example 20. It is a block diagram of the conventional ozone manufacturing apparatus.

  The ozone production apparatus according to the present invention detects a power outage state and / or when the pressure and temperature in the adsorption / desorption tower deviate from a predetermined range to become an abnormal operation state, Desorbed high-concentration ozone is introduced, the reducing agent reacts with ozone, and the high-concentration ozone desorbed into the silica gel filler is guided, the ozone concentration is smoothed and decomposed by the ozonolysis device, or directly Provide piping to supply ozone to the destination of ozone, lead the desorbed high-concentration ozone, lead the high-concentration ozone desorbed to the gas reservoir, smooth the ozone concentration and decompose with ozone decomposer In addition, when the normal operation state is restored from the abnormal operation state, it automatically returns to the original operation state, so that the power failure or the adsorption / desorption tower is in an abnormal operation state such as high pressure or high temperature. Na In addition, it is possible to prevent the ozone that has been adsorbed and stored from decomposing rapidly, and to safely treat the adsorbed ozone, and automatically restore the original state when the normal operation is restored from the abnormal operation state. It is possible to return to the operation state and to produce ozone safely.

Embodiment 1 FIG.
FIG. 1 is a configuration diagram illustrating an ozone production apparatus according to Embodiment 1 of the present invention. As shown in FIG. 1, an ozone generator 1, an oxygen supply source 2, a circulation blower 3, an adsorption / desorption tower 4, a cold heat source 5, a heating source 6, a water flow ejector 7 that is an ozone desorption means, It consists of switching valves 8a-8g, 9 and a reducing agent reservoir 10. The switching valve 9 and the reducing agent reservoir 10 are connected to the adsorption / desorption tower 4 by a pipe La. A reducing agent such as a sodium thiosulfate solution or a potassium iodide solution is stored in the reducing agent reservoir 10. The switching valve 9 is operated by an emergency power source.

  Further, in FIG. 1, a power supply monitor unit 14 that is a power supply monitoring unit, a control circuit 15, and signal lines S1 and S2 are provided. Others are the same as in FIG. The output signal of the power supply state monitor 14 is connected to the input of the control circuit 15 by the signal line S1, and the output of the control circuit 15 is connected to the switching valve 9 by the signal line S2 as an opening / closing signal of the switching valve 9. Yes.

  Next, the operation of the apparatus shown in FIG. 1 will be described. In this apparatus, the power supply state to the apparatus in operation is constantly monitored by the power supply state monitor 14, and when a power failure is detected, the signal is transmitted to the control circuit 15 via the signal line S1. The control circuit 15 sends an opening / closing or opening degree adjustment signal to the switching valve 9 via the signal line S2 immediately or in accordance with the operating state, and the switching valve 9 sets the opening / closing state or opening degree based on this signal. Control. The meaning of sending a signal in accordance with the operating state is, for example, as follows.

  This device is a device that produces ozone by repeating the ozone adsorption storage step and the desorption step, but it can also change the timing at which the switching valve 9 is opened or closed or the opening degree control signal is issued in the adsorption storage step and the desorption step. It is.

  That is, when heat is applied from the heating source 6 during the desorption process to raise the temperature of the adsorbent in the adsorption / desorption tower 4, high-concentration ozone exists in the adsorption / desorption tower 4 at a high pressure. It is better to operate the switching valve 9 immediately.

  Even during the same desorption step, when ozone desorbed from the adsorption / desorption tower 4 is supplied to the water ejector 7, the inside of the adsorption / desorption tower 4 is at a negative pressure. After a certain period of time has elapsed, the switching valve 9 may be operated when the ozone pressure and concentration in the adsorption / desorption tower 4 become high.

  On the other hand, when a power failure occurs while the apparatus is in the adsorption / storage process, the adsorption / desorption tower 4 is kept at a low temperature by the cold heat source 5 and the temperature of the adsorbent does not rise immediately after the power failure. The switching valve 9 may be operated when the temperature in the adsorption / desorption tower 4 starts to rise after a certain time has elapsed.

  For monitoring the power supply state to the device, for example, a relay is provided in the power supply line, and a contact signal of the relay is used. In addition, the power supply in the event of a power failure can be implemented inexpensively and easily by using, for example, a storage battery.

  Thus, when a power failure occurs and the device is in an abnormal operation state, for example, the power failure is automatically detected, and the open / close state or opening degree of the switching valve 9 is controlled based on this signal. Since the ozone stored in the adsorption / desorption tower 4 is extracted, it is possible to prevent the ozone stored in the adsorption and storage from rapidly decomposing even in an abnormal operation state and to operate safely.

Embodiment 2. FIG.
FIG. 2 is a block diagram showing an ozone production apparatus according to Embodiment 2 of the present invention. The configuration of the apparatus is that in which the reductant reservoir 10 in the first embodiment is replaced with the filling device 11 and the ozonolysis device 12 in the second embodiment.

  The operation of the apparatus of FIG. 2 is almost the same as that of the apparatus of FIG. That is, in this apparatus, the power supply state to the apparatus in operation is constantly monitored by the power supply state monitor 14, and when a power failure is detected, the signal is transmitted to the control circuit 15 via the signal line S1. The control circuit 15 sends an opening / closing or opening degree adjustment signal to the switching valve 9 via the signal line S2 immediately or in accordance with the operating state, and the switching valve 9 sets the opening / closing state or opening degree based on this signal. Control.

  Note that monitoring of the power supply state to the device, the passage of time after a power failure, and the power supply measures at the time of a power failure can be implemented inexpensively and easily, as with the device of FIG.

  Thus, when a power failure occurs and the device is in an abnormal operation state, for example, the power failure is automatically detected, and the open / close state or opening degree of the switching valve 9 is controlled based on this signal. Since the ozone stored in the adsorption / desorption tower 4 is extracted, it is possible to prevent the ozone stored in the adsorption and storage from rapidly decomposing even in an abnormal operation state and to operate safely.

Embodiment 3 FIG.
FIG. 3 is a block diagram showing an ozone production apparatus according to Embodiment 3 of the present invention. The pipe La is connected to the water pipe Lc on the downstream side of the switching valve 9 and the water flow ejector 7. The water flow ejector 7 is connected to a branch pipe Ld of the water pipe Lc, and is injected into water sent from a pump P operated by an emergency power source. Further, the monitoring means in the first and second embodiments is connected.

  The operation of the apparatus in FIG. 3 is the same as that in FIG. 2 and substantially the same as the apparatus in FIG. 1. When the power supply state monitor 14 constantly monitors the power supply state to the operating device and detects a power failure. The signal is transmitted to the control circuit 15 through the signal line S1. The control circuit 15 sends an opening / closing or opening degree adjustment signal to the switching valve 9 via the signal line S2 immediately or in accordance with the operating state, and the switching valve 9 sets the opening / closing state or opening degree based on this signal. Control.

  Note that the monitoring of the power supply state to the device, the elapse of time after the power failure, and the power supply measures at the time of the power failure can also be implemented inexpensively and easily, similarly to the devices of FIGS.

  Thus, when a power failure occurs and the device is in an abnormal operation state, for example, the power failure is automatically detected, and the open / close state or opening degree of the switching valve 9 is controlled based on this signal. Since the ozone stored in the adsorption / desorption tower 4 is extracted, it is possible to prevent the ozone stored in the adsorption and storage from rapidly decomposing even in an abnormal operation state and to operate safely.

Embodiment 4 FIG.
FIG. 4 is a block diagram showing an ozone production apparatus according to Embodiment 4 of the present invention. The configuration of the apparatus is such that the monitoring means in the first to third embodiments is connected to the pipe La in Reference Example 4 described later.

  The operation of the apparatus of FIG. 4 is substantially the same as that of the apparatus of FIGS. 1 to 3, and the power supply state to the apparatus in operation is constantly monitored by the power supply state monitor 14, and when a power failure is detected, the signal is signal line S1. Is transmitted to the control circuit 15 via. The control circuit 15 sends an opening / closing or opening degree adjustment signal to the switching valve 9 via the signal line S2 immediately or in accordance with the operating state, and the switching valve 9 sets the opening / closing state or opening degree based on this signal. Control.

  Note that monitoring of the power supply state to the device, the passage of time after a power failure, and the power supply measures at the time of a power failure can be easily and inexpensively implemented as in the devices of FIGS.

  Thus, when a power failure occurs and the apparatus is in an abnormal operation state, for example, it is automatically detected that a power failure has occurred, and the switching valve 9 is controlled to open and close based on this signal, and the adsorption / desorption tower 4 Since the ozone stored inside is withdrawn and stored in the gas reservoir 13, it is possible to prevent the ozone that has been adsorbed and stored from rapidly decomposing even in the event of a power failure and to waste the adsorbed ozone. It can be used without. Moreover, in this Embodiment, it is only necessary to provide a switching valve, piping, and a gas tank, and an apparatus can be simplified.

Reference Example 1
FIG. 5 is a block diagram showing an ozone production apparatus in Reference Example 1. As shown in FIG. 5, the ozone generator 1, the oxygen supply source 2, the circulation blower 3, the adsorption / desorption tower 4, the cold heat source 5, the heating source 6, and the water flow ejector 7 that is ozone desorption means, It consists of switching valves 8a-8g, 9 and a reducing agent reservoir 10. The switching valve 9 and the reducing agent reservoir 10 are connected to the adsorption / desorption tower 4 by a pipe La. A reducing agent such as a sodium thiosulfate solution or a potassium iodide solution is stored in the reducing agent reservoir 10. The switching valve 9 is operated by an emergency power source.

  Next, the operation of the apparatus shown in FIG. 5 will be described. In this apparatus, when a power failure or an abnormal operation such as high pressure or high temperature occurs in the adsorption / desorption tower 4 during operation, the switching valve 9 is opened and the ozone stored in the adsorption / desorption tower 4 is piped. It is introduced into the reducing agent reservoir 10 through La and decomposed with the reducing agent.

  As described above, when the operation is abnormal, the ozone stored in the adsorption / desorption tower 4 is guided to the reducing agent reservoir and decomposed, so that the ozone stored and absorbed can be prevented from rapidly decomposing. And the adsorbed ozone can be safely processed. In addition, when a reducing agent is used, it can be safely processed even for high-concentration ozone, and the apparatus can be made compact because only a small volume is required.

Reference Example 2
FIG. 6 is a block diagram showing an ozone production apparatus in Reference Example 2. In FIG. 6, 11 is a filling device, and 12 is an ozonolysis device, and the inside of the filling device 11 is filled with a porous material impregnated with silica gel, activated alumina, fluorocarbon or the like. The filler 11 and the switching valve 9 are connected to the adsorption / desorption tower 4 by a first pipe La. Further, the filling device 11 and the ozonolysis device 12 are connected by a second pipe Lb. The ozonolysis device 12 is filled with, for example, activated carbon or a manganese-based ozonolysis catalyst. However, in the reference example, the ozonolysis device is not particularly limited to this. For example, the ozonolysis device is a thermal decomposition type ozonolysis device. It can be. Others are the same as FIG.

  Next, the operation of the apparatus shown in FIG. 6 will be described. In this apparatus, when the power failure occurs during operation or the inside of the adsorption / desorption tower 4 becomes in an abnormal operation state such as high pressure or high temperature, the switching valve 9 is opened, and the ozone-containing gas adsorbed and stored in the adsorption / desorption tower 4. Is led to the filling device 11 through the pipe La. Immediately after the switching valve 9 is opened, an ozone-containing gas having a very high concentration and, in some cases, high pressure and high concentration is discharged through the pipe La. At this time, both the concentration and the pressure gradually decrease. When ozone-containing gas with reduced concentration and pressure is supplied to the filler 11, for example, silica gel has the property of selectively adsorbing ozone. Part is adsorbed. As a result, the ozone-containing gas having a reduced ozone concentration is sent to the ozone decomposer 12 via the pipe Lb, and then the ozone is decomposed.

  As described above, when the operation is abnormal, the ozone stored in the adsorption / desorption tower 4 is passed through the filler 11, the ozone concentration is smoothed and guided to the ozone decomposer 12, and decomposed. Therefore, it is not necessary to make the vessel in accordance with high pressure and high concentration ozone at the initial stage of discharge, and the ozonolysis device 12 can be downsized. In addition, when the operation is abnormal, the switching valve 9 is opened, and the ozone stored in the adsorption / desorption tower 4 is discharged and decomposed, so that the ozone stored and absorbed can be rapidly decomposed. Preventing and adsorbing ozone can be safely processed.

Reference Example 3.
FIG. 7 is a block diagram showing an ozone production apparatus in Reference Example 3. In FIG. 7, the pipe La is connected to the water pipe Lc on the downstream side of the switching valve 9 and the water flow ejector 7. The water flow ejector 7 is connected to a branch pipe Ld of the water pipe Lc, and is injected into water sent from a pump P operated by an emergency power source. Others are the same as FIG.

  Next, the operation of the apparatus shown in FIG. 7 will be described. In this apparatus, when the power failure occurs during operation or the inside of the adsorption / desorption tower 4 becomes in an abnormal operation state such as high pressure or high temperature, the switching valve 9 is opened, and the ozone-containing gas adsorbed and stored in the adsorption / desorption tower 4. Is discharged to the water pipe Lc of the water flow ejector 7 through the pipe La. The ozone injected into the water pipe Lc is consumed by reacting with substances such as organic substances in the water.

  In this way, when an abnormal operation state occurs, the ozone stored in the adsorption / desorption tower 4 is introduced into the water pipe Lc of the water flow ejector 7 and reacted with ozone and reactive substances such as organic matter in water. Therefore, even if the operation is abnormal, it is possible to prevent the ozone that has been adsorbed and stored from being rapidly decomposed and to safely treat the adsorbed ozone. In this system, only the switching valve and the piping need be provided, and the apparatus can be simplified.

Reference Example 4
FIG. 8 is a block diagram showing an ozone production apparatus in Reference Example 4. In FIG. 8, 13 is a gas reservoir and is connected with the switching valve 9 by the piping La. Others are the same as FIG.

  Next, the operation of the apparatus shown in FIG. 8 will be described. In this apparatus, when the power failure occurs during operation or the inside of the adsorption / desorption tower 4 becomes in an abnormal operation state such as high pressure or high temperature, the switching valve 9 is opened, and the ozone-containing gas adsorbed and stored in the adsorption / desorption tower 4. Is stored in the gas reservoir 13 via the pipe La. The ozone-containing gas stored in the gas reservoir 13 is returned to the pipe La, the adsorption / desorption tower 4, and the ozone again when the ozone in the adsorption / desorption tower 4 is suctioned by the water flow ejector 7 after the apparatus returns to a normal state. The water is supplied to the water ejector 7 through the pipe Ld, and is dispersed and dissolved in water in the water ejector 7.

  In this way, when the operation is abnormal, the ozone stored in the adsorption / desorption tower 4 is temporarily stored in the gas reservoir 13, so that even if the operation is abnormal, the ozone that is adsorbed and stored is retained. It can be used without preventing rapid decomposition and without wasting the adsorbed ozone. Moreover, in this reference example, it is only necessary to provide a switching valve, piping, and a gas reservoir, and the apparatus can be simplified.

Reference Example 5
FIG. 9 is a block diagram showing an ozone production apparatus in Reference Example 5. In FIG. 9, a pressure detecting means is provided, 16 is a pressure gauge for measuring the pressure inside the adsorption / desorption tower 4, and S3 is a signal line. The output signal of the pressure gauge 16 is connected to the input of the control circuit 15 through a signal line S3, and the output of the control circuit 15 is connected to the switching valve 9 through a signal line S2 as an opening / closing signal of the switching valve 9. Others are the same as FIG. 1 and FIG.

  Next, the operation of the apparatus shown in FIG. 9 will be described. In this apparatus, the pressure inside the adsorption / desorption tower 4 is constantly monitored by the pressure gauge 16, and the signal is transmitted to the control circuit 15 via the signal line S3. When the control circuit 15 deviates from an appropriate pressure range determined in advance for each of the measured value of the pressure gauge 16 and the operation process at that time, the switching valve 9 is opened and closed, and the opening adjustment signal is sent via the signal line S2. This is sent to the switching valve 9. The switching valve 9 controls the open / close state or the opening degree based on this signal. In addition, the place which the appropriate pressure range preset for every driving | operation process means is as follows, for example. This apparatus is an apparatus for producing ozone by repeating an ozone adsorption process and a desorption process, but operating pressure conditions are different between the adsorption process and the desorption process. That is, the adsorption process is usually performed under pressure, and the desorption process is usually performed under negative pressure. For this reason, by setting different pressure ranges in the adsorption process and the desorption process, it is possible to take more detailed countermeasures against abnormal operation.

The appropriate pressure range for each operation process is determined in advance from the pressure resistance of the adsorption / desorption tower 4, the operation pressure of the ozone generator (the set pressure of the pipe L1 during the adsorption storage process), the vacuum ultimate pressure of the ejector 7, etc. Can be set. In the adsorption process, the operating pressure of the ozone generator, not shown, but when a booster blower is provided in the circulation system, this operating discharge force is an appropriate operating condition, while in the desorption process, the ejector's vacuum ultimate pressure Alternatively, although not shown, when the gas purge is performed, the supply gas pressure is an appropriate operating condition. An appropriate operating condition range may be set with a range above and below these operating conditions. However, judging from the performance, practicality, cost, etc. of each current device, 0-20 kg / cm ^{2 in the} adsorption process. G, preferably in the range of 0~12kg / cm ² G, while the desorption step 0~1kg / cm ² ABS, may preferably be determined within a range of 0.01~0.5kg / cm ² ABS.

  Thus, even when the pressure in the adsorption / desorption tower 4 deviates from the appropriate range during operation and the operation becomes abnormal, the pressure in the adsorption / desorption tower 4 is automatically measured, and this pressure measurement signal and its predetermined operation are measured. Since the open / close state or opening degree of the switching valve 9 is controlled based on an appropriate pressure range at the time of the process and the ozone stored in the adsorption / desorption tower 4 is extracted, the adsorption storage is performed even if the operation is abnormal. It is possible to prevent the ozone being decomposed rapidly and to operate safely.

Reference Example 6
FIG. 10 is a block diagram showing an ozone production apparatus in Reference Example 6. The configuration of the apparatus is such that the silica gel filler 11 and the ozonolysis device 12 in Reference Example 2 are connected instead of the reducing agent reservoir 10 in Reference Example 5. Further, the operation of the apparatus of FIG. 10 is almost the same as that of the apparatus of FIG. That is, in this apparatus, the pressure inside the adsorption / desorption tower 4 is constantly monitored by the pressure gauge 16, and the measured value is supplied to the control circuit 15 via the signal line S3. The control circuit 15 compares the pressure inside the adsorption / desorption tower 4 obtained as a measurement value of the pressure gauge 16 with an appropriate pressure range set in advance for each operation step of ozone adsorption and ozone desorption, and the pressure gauge When the measured value of 16 deviates from this range, an opening / closing or opening degree adjustment signal of the switching valve 9 is sent to the switching valve 9 through the signal line S2. The switching valve 9 controls the open / close state or the opening degree based on this signal.

  The appropriate pressure range for each operation process is the same as in the apparatus shown in FIG. 9. The pressure resistance of the adsorption / desorption tower 4, the operating pressure of the ozone generator (the set pressure of the pipe L 1 during the adsorption storage process), the ejector 7 It can be preset from the vacuum ultimate pressure.

  In this way, even when the pressure in the adsorption / desorption tower 4 deviates from the appropriate range during operation and the operation becomes abnormal, the pressure in the adsorption / desorption tower 4 is automatically measured, and this pressure measurement signal and the predetermined Since the open / close state or opening degree of the switching valve 9 is controlled based on an appropriate pressure range during the operation process, and the ozone stored in the adsorption / desorption tower 4 is extracted, it is adsorbed even if the operation is abnormal. The stored ozone is prevented from rapidly decomposing and can be operated safely.

Reference Example 7
FIG. 11 is a block diagram showing an ozone production apparatus in Reference Example 7. The configuration of the apparatus is such that the pressure detection means in Reference Examples 5 to 6 is connected to the pipe La in Reference Example 3. The operation of the apparatus of FIG. 11 is the same as the apparatus of FIG. 10 and substantially the same as the apparatus of FIG. 9, and the pressure inside the adsorption / desorption tower 4 during operation is constantly monitored by the pressure gauge 16, and the measured value is measured. The signal is supplied to the control circuit 15 via the signal line S3. The control circuit 15 compares the measured value of the pressure gauge 16 with an appropriate pressure range predetermined for each operation process, and if the measured value of the pressure gauge 16 deviates from the appropriate range, A signal is sent to the switching valve 9 by the line S2, and the switching valve 9 controls the open / close state or opening degree based on this signal.

  In addition, the suitable pressure range for every operation process is the pressure resistance of the experiment and the adsorption / desorption tower 4, the operation pressure of the ozone generator (set pressure of the pipe L1 at the time of the adsorption storage process), similarly to the apparatus of FIGS. It can be set in advance from the vacuum ultimate pressure of the water flow ejector 7 or the like.

  In this way, even when the pressure in the adsorption / desorption tower 4 deviates from the appropriate range during operation and the operation becomes abnormal, the pressure in the adsorption / desorption tower 4 is automatically measured, and this pressure measurement signal and the predetermined Since the open / close state or opening degree of the switching valve 9 is controlled based on an appropriate pressure range during the operation process, and the ozone stored in the adsorption / desorption tower 4 is extracted, it is adsorbed even if the operation is abnormal. The stored ozone is prevented from rapidly decomposing and can be operated safely.

Reference Example 8
FIG. 12 is a block diagram showing an ozone production apparatus in Reference Example 8. The apparatus is configured by connecting the pressure detection means in the ninth to eleventh embodiments to the pipe La in the reference example 4. The operation of the apparatus of FIG. 12 is almost the same as that of the apparatus of FIGS. 9 to 11, and the pressure inside the adsorption / desorption tower 4 during operation is constantly monitored by the pressure gauge 16, and the measured value is sent via the signal line S3. This is supplied to the control circuit 15. The control circuit 15 compares the measured value of the pressure gauge 16 with an appropriate pressure range predetermined for each operation process, and if the measured value of the pressure gauge 16 deviates from the appropriate range, A signal is sent to the switching valve 9 by the line S2, and the switching valve 9 controls the open / close state or opening degree based on this signal.

  In addition, the suitable pressure range for every operation process is the pressure resistance of the experiment and the adsorption / desorption tower 4, the operation pressure of the ozone generator (set pressure of the pipe L1 at the time of the adsorption storage process), similarly to the apparatus of FIGS. It can be set in advance from the vacuum ultimate pressure of the water flow ejector 7 or the like.

  In this way, even when the pressure in the adsorption / desorption tower 4 deviates from the appropriate range during operation and the operation becomes abnormal, the pressure in the adsorption / desorption tower 4 is automatically measured, and this pressure measurement signal and the predetermined Since the open / close state or opening degree of the switching valve 9 is controlled based on an appropriate pressure range during the operation process, and the ozone stored in the adsorption / desorption tower 4 is extracted and stored in the gas reservoir 13, the pressure is appropriate. Even if it deviates from this range, explosion, fire or destruction of the device can be prevented and the adsorbed ozone can be used without wasting it.

Reference Example 9
FIG. 13 is a block diagram showing an ozone production apparatus in Reference Example 9. In FIG. 13, a temperature detecting means is provided, 17 is a thermometer for measuring the temperature inside the adsorption / desorption tower 4, and S4 is a signal line. The output signal of the thermometer 17 is connected to the input of the control circuit 15 by a signal line S4, and the output of the control circuit 15 is connected to the switching valve 9 by a signal line S2 as an opening / closing signal of the switching valve 9. Others are the same as the apparatus of FIG.1, FIG5 and FIG.9.

  Next, the operation of the apparatus shown in FIG. 13 will be described. In this apparatus, the temperature inside the adsorption / desorption tower 4 is constantly monitored by the thermometer 17, and the signal is transmitted to the control circuit 15 via the signal line S4. When the control circuit 15 deviates from an appropriate temperature range determined in advance from the measured value of the thermometer 17 and the operation process at that time, the switching valve 9 is switched between opening and closing or an opening adjustment signal by the signal line S2. The switching valve 9 controls the open / close state or opening degree based on this signal.

  An appropriate temperature range for each operation process can be set in advance from experiments, a set temperature of the cooling heat source 5, a set temperature of the heating source 6, the heat of adsorption / desorption of ozone with respect to silica gel, and the like. In addition, the meaning of the suitable temperature range for every driving | operation process is as follows, for example. This apparatus is an apparatus for producing ozone by repeating an ozone adsorption process and a desorption process, but operating temperatures are different between the adsorption process and the desorption process. In the case of the present embodiment, the adsorption process is usually operated at a low temperature, and the desorption process is usually operated at a normal temperature. The appropriate operating range may be determined by setting the upper and lower widths of the setting conditions and the set temperatures of each device, but it is comprehensive from the efficiency of the cold heat source, the ozone adsorption capacity to silica gel, the cost of each device, and the operating cost. Therefore, as a practical temperature range, the adsorption step can be set within a range of 30 ° C. to −100 ° C., and the desorption step can be set within a range of 80 ° C. to −100 ° C.

  As described above, even when the temperature of the adsorption / desorption tower 4 deviates from the appropriate range during operation and the operation becomes abnormal, the temperature in the adsorption / desorption tower 4 is automatically measured, and this temperature measurement signal and its predetermined operation are measured. Since the open / close state or opening degree of the switching valve 9 is controlled based on an appropriate temperature range at the time of the process, and the ozone stored in the adsorption / desorption tower 4 is extracted, the adsorption / storing is performed even if the operation is abnormal. It is possible to prevent the ozone being decomposed rapidly and to operate safely.

Reference Example 10
FIG. 14 is a block diagram showing an ozone production apparatus in Reference Example 10. The configuration of the apparatus is such that the silica gel filler 11 and the ozonolysis device 12 in Reference Example 2 are connected instead of the reducing agent reservoir 10 in Reference Example 9. The operation of the apparatus of FIG. 14 is almost the same as that of the apparatus of FIG. That is, in this apparatus, the temperature inside the adsorption / desorption tower 4 is constantly monitored by the thermometer 17, and the measured value is supplied to the control circuit 15 via the signal line S4. The control circuit 15 compares the temperature inside the adsorption / desorption tower 4 obtained as the measured value of the thermometer 17 with an appropriate temperature range set in advance for each operation process, and the measured value of the thermometer 17 is determined. When deviating from this range, an opening / closing or opening degree adjustment signal of the switching valve 9 is sent to the switching valve 9 through the signal line S2. The switching valve 9 controls the open / close state or the opening degree based on this signal.

  The appropriate pressure range for each operation process can be set in advance from the experiment, the set temperature of the cooling source 5, the set temperature of the heating source 6, the heat of adsorption / desorption of ozone with respect to silica gel, etc., as in the apparatus of FIG. it can.

  In this way, even when the temperature of the adsorption / desorption tower 4 deviates from a predetermined appropriate range during operation and becomes abnormal in operation, the temperature in the adsorption / desorption tower 4 is automatically detected, and this temperature measurement signal Since the open / close state or opening degree of the switching valve 9 is controlled on the basis of an appropriate temperature range at the time of the operation process determined in advance and the ozone stored in the adsorption / desorption tower 4 is extracted, the operation abnormality occurs. Even if it becomes a state, it is possible to prevent the ozone that has been adsorbed and stored from rapidly decomposing and to operate safely.

Reference Example 11
FIG. 15 is a block diagram showing an ozone production apparatus in Reference Example 11. The configuration of the apparatus is such that the temperature detection means in Reference Examples 9 to 10 is connected to the pipe La in Reference Example 3. The operation of the apparatus of FIG. 15 is the same as the apparatus of FIG. 14 and substantially the same as the apparatus of FIG. 13, and the temperature inside the adsorption / desorption tower 4 during operation is constantly monitored by the thermometer 17 and the measured value is measured. The signal is supplied to the control circuit 15 through the signal line S4. The control circuit 15 compares the measured value of the thermometer 17 with a predetermined appropriate temperature range for each operation process, and switches if the measured value of the thermometer 17 deviates from the appropriate range. A signal is sent to the valve 9, and the switching valve 9 controls the open / close state or the opening degree based on this signal.

  The appropriate pressure range for each operation process can be set in advance from the experiment, the set temperature of the cooling source 5, the set temperature of the heating source 6, the heat of adsorption / desorption of ozone with respect to silica gel, etc., as in FIGS. it can.

  In this way, even when the temperature of the adsorption / desorption tower 4 deviates from a predetermined appropriate range during operation and becomes abnormal in operation, the temperature in the adsorption / desorption tower 4 is automatically detected, and this temperature Since the open / close state or opening degree of the switching valve 9 is controlled on the basis of the measurement signal and a predetermined appropriate temperature range during the operation process, the ozone stored in the adsorption / desorption tower 4 is extracted. Even in an abnormal operation state, ozone that has been adsorbed and stored is prevented from rapidly decomposing, and safe operation is possible.

Reference Example 12.
FIG. 16 is a block diagram showing an ozone production apparatus in Reference Example 12. The configuration of the apparatus is such that the temperature detection means in Reference Examples 9 to 11 is connected to the pipe La in Reference Example 4. The operation of the apparatus of FIG. 16 is almost the same as the apparatus of FIGS. 13 to 15, and the temperature inside the adsorption / desorption tower 4 during operation is constantly monitored by the thermometer 17, and the measured value is transmitted via the signal line S 4. This is supplied to the control circuit 15. The control circuit 15 compares the measured value of the thermometer 17 with an appropriate temperature range for each operation process. If the measured value of the thermometer 17 deviates from the appropriate range, a signal is sent to the switching valve 9. Based on this signal, the feed switching valve 9 controls the open / closed state or opening degree.

  The appropriate temperature range for each operation process can be set in advance from experiments, the set temperature of the cooling source 5, the set temperature of the heating source 6, the heat of adsorption / desorption of ozone with respect to silica gel, etc., as in FIGS. it can.

  As described above, even when the temperature of the adsorption / desorption tower 4 deviates from a predetermined appropriate range at the time of operation and becomes abnormal in operation, the temperature in the adsorption / desorption tower 4 is automatically detected, and this temperature measurement is performed. The open / close state or opening degree of the switching valve 9 is controlled on the basis of the signal and an appropriate temperature range at the time of the operation process, and the ozone stored in the adsorption / desorption tower 4 is extracted and the gas reservoir 13 is extracted. Therefore, it is possible to operate safely while preventing the ozone that has been adsorbed and stored from rapidly decomposing even if the operation is abnormal, and use the adsorbed ozone without wasting it. can do.

Reference Example 13
FIG. 17 is a block diagram showing an ozone production apparatus in Reference Example 13. The configuration of the apparatus is such that the pressure detecting means in Reference Example 5 and the temperature detecting means in Reference Example 9 are connected to the monitoring means in the first embodiment. Others are the same as FIG. 1, FIG. 5, FIG. 9, FIG. In FIG. 17, the output signal of the power supply state monitor 14, the measurement signal of the pressure gauge 16, and the signal of the thermometer 17 are simultaneously output to the control circuit 15 via signal lines S1, S3 and S4, respectively.

  Next, the operation of the apparatus shown in FIG. 17 will be described. In this apparatus, the power supply state to the apparatus is constantly monitored by the power supply state monitor 14, the pressure inside the adsorption / desorption tower 4 is monitored by the pressure gauge 16, and the temperature inside the adsorption / desorption tower 4 is constantly monitored by the thermometer 17. These output signals are transmitted to the control circuit 15 via signal lines S1, S3 and S4, respectively. When the control circuit 15 deviates from the predetermined appropriate operating condition range from the power supply state, the measured value of the pressure gauge 16, the measured value of the thermometer 17 and the operation process at that time, the switching valve 9 is opened and closed. Alternatively, an opening adjustment signal is sent to the switching valve 9 via the signal line S2, and the switching valve 9 controls the open / closed state or opening based on this signal.

  For monitoring the power supply status to the device, for example, a relay is provided on the power supply line and a contact signal thereof is used, and a timer is provided in the control circuit 15, for example, regarding the passage of time after a power failure. Therefore, the power supply at the time of power failure can be implemented inexpensively and easily by using, for example, a storage battery. In addition, the appropriate operating condition range for each operation process regarding pressure and temperature includes pressure resistance of the experiment and adsorption / desorption tower 4, operating pressure of the ozone generator (set pressure of the pipe L1 during the adsorption storage process), water flow ejector 7 The vacuum ultimate pressure, the set temperature of the cooling source 5, the set temperature of the heating source 6, the heat of adsorption / desorption of ozone with respect to silica gel and the like can be set in advance.

  As described above, even when the power supply to the apparatus is stopped or the pressure or temperature of the adsorption / desorption tower 4 deviates from the appropriate range during operation and the operation becomes abnormal, the power supply state to the apparatus, the adsorption / desorption tower 4 The pressure and temperature are automatically measured, and the open / close state or opening degree of the switching valve 9 is controlled based on these measurement signals and a predetermined operating state range at the time of the operating process, so that the adsorption / desorption tower 4 Since the ozone stored in the inside is extracted, even if the operation is abnormal, it is possible to prevent the ozone stored by adsorption from being rapidly decomposed and to operate safely. In addition, as shown in FIG. 17, by simultaneously monitoring the power supply state to the apparatus, the pressure in the adsorption / desorption tower 4, and the temperature, the operation is performed as compared with the apparatuses of Embodiments 1 to 4 and Reference Examples 1 to 12 described above. It is possible to more accurately determine an abnormal state.

Reference Example 14
FIG. 18 is a block diagram showing an ozone production apparatus in Reference Example 14. The configuration of the apparatus is that in which the reductant reservoir 10 in the reference example 13 is replaced by the filler 11 and the ozonolysis unit 12 in the reference example 2.

  Also, the operation of the apparatus of FIG. 18 is substantially the same as that of the apparatus of FIG. That is, in this apparatus, the power supply state to the apparatus and the pressure and temperature inside the adsorption / desorption tower 4 are constantly monitored by the power supply state monitor 14, the pressure gauge 16 and the thermometer 17, respectively, and these output signals are respectively This is transmitted to the control circuit 15 via the signal lines S1, S3 and S4. When the control circuit 15 deviates from the predetermined appropriate operating condition range from the power supply state, the measured value of the pressure gauge 16, the measured value of the thermometer 17 and the operation process at that time, the switching valve 9 is opened and closed. Alternatively, an opening adjustment signal is sent to the switching valve 9 via the signal line S2, and the switching valve 9 controls the open / closed state or opening based on this signal.

  As in the apparatus of FIG. 17, for example, a power supply line is provided with a relay and a contact signal thereof is used for monitoring the power supply state to the apparatus. By providing a timer in the circuit 15 and further using a storage battery or the like for the power supply during a power failure, it can be implemented inexpensively and easily. In addition, the appropriate operating condition range for each operation process regarding pressure and temperature includes pressure resistance of the experiment and adsorption / desorption tower 4, operating pressure of the ozone generator (set pressure of the pipe L1 during the adsorption storage process), water flow ejector 7 The vacuum ultimate pressure, the set temperature of the cooling source 5, the set temperature of the heating source 6, the heat of adsorption / desorption of ozone with respect to silica gel and the like can be set in advance.

  As described above, even when the power supply to the apparatus is stopped or the pressure or temperature of the adsorption / desorption tower 4 deviates from the appropriate range during operation and the operation becomes abnormal, the power supply state to the apparatus, the adsorption / desorption tower 4 The pressure and temperature are automatically measured, and the open / close state or opening degree of the switching valve 9 is controlled based on these measurement signals and a predetermined operating state range at the time of the operating process, so that the adsorption / desorption tower 4 Since the ozone stored in the inside is extracted, even if the operation is abnormal, it is possible to prevent the ozone stored by adsorption from being rapidly decomposed and to operate safely. Similarly to the apparatus of FIG. 17, by simultaneously monitoring the power supply state to the apparatus, the pressure and temperature in the adsorption / desorption tower 4 as shown in FIG. 18, the first to fourth embodiments and the reference examples 1 to 4 are monitored. Compared with the 12 devices, it is possible to more accurately determine an abnormality in the operating state.

Reference Example 15.
It is a block diagram which shows the ozone manufacturing apparatus in the reference example 15 of FIG. The configuration of the apparatus is such that the pressure detecting means in Reference Example 5 and the temperature detecting means in Reference Example 9 are connected to the monitoring means in the third embodiment.

  The operation of the apparatus of FIG. 19 is substantially the same as that of the apparatus of FIGS. 17 to 18, and the power supply state to the device and the pressure and temperature inside the adsorption / desorption tower 4 are respectively determined by the power supply state monitor 14 and the pressure gauge 16. And the thermometer 17 constantly monitor and transmit these output signals to the control circuit 15 via signal lines S1, S3 and S4, respectively. When the control circuit 15 deviates from the predetermined appropriate operating condition range from the power supply state, the measured value of the pressure gauge 16, the measured value of the thermometer 17 and the operation process at that time, the switching valve 9 An opening / closing or opening adjustment signal is sent to the switching valve 9 via the signal line S2, and the switching valve 9 controls the opening / closing state or opening based on this signal.

  In addition, the monitoring of the power supply state to the apparatus is similar to the apparatus of FIGS. 17 to 18, for example, by providing a relay on the power supply line and using a contact signal thereof, For example, by providing a timer in the control circuit 15 and further using a storage battery or the like for the power supply at the time of a power failure, it can be implemented inexpensively and easily. In addition, the appropriate operating condition range for each operation process regarding pressure and temperature includes pressure resistance of the experiment and adsorption / desorption tower 4, operating pressure of the ozone generator (set pressure of the pipe L1 during the adsorption storage process), water flow ejector 7 The vacuum ultimate pressure, the set temperature of the cooling source 5, the set temperature of the heating source 6, the heat of adsorption / desorption of ozone with respect to silica gel and the like can be set in advance.

  As described above, even when the power supply to the apparatus is stopped or the pressure or temperature of the adsorption / desorption tower 4 deviates from the appropriate range during operation and the operation becomes abnormal, the power supply state to the apparatus, the adsorption / desorption tower 4 The pressure and temperature are automatically measured, and the open / close state or opening degree of the switching valve 9 is controlled based on these measurement signals and a predetermined operating state range at the time of the operating process, so that the adsorption / desorption tower 4 Since the ozone stored in the inside is extracted, even if the operation is abnormal, it is possible to prevent the ozone stored by adsorption from being rapidly decomposed and to operate safely. 17 to 18, the power supply state to the apparatus, the pressure and temperature in the adsorption / desorption tower 4 are simultaneously monitored as shown in FIG. It is possible to more accurately determine an abnormality in the operating state as compared with the devices of -12.

Reference Example 16.
FIG. 20 is a block diagram showing an ozone production apparatus in Reference Example 16. The configuration of the apparatus is such that the pressure detecting means in Reference Example 5 and the temperature detecting means in Reference Example 9 are connected to the monitoring means in the fourth embodiment.

  The operation of the apparatus of FIG. 20 is substantially the same as that of the apparatus of FIGS. And the thermometer 17 constantly monitor and transmit these output signals to the control circuit 15 via signal lines S1, S3 and S4, respectively. When the control circuit 15 deviates from the predetermined appropriate operating condition range from the power supply state, the measured value of the pressure gauge 16, the measured value of the thermometer 17 and the operation process at that time, the switching valve 9 An opening / closing or opening adjustment signal is sent to the switching valve 9 via the signal line S2, and the switching valve 9 controls the opening / closing state or opening based on this signal.

  In addition, the monitoring of the power supply state to the device is similar to the devices of FIGS. 17 to 19, for example, by providing a relay on the power supply line and using a contact signal thereof, For example, by providing a timer in the control circuit 15 and further using a storage battery or the like for the power supply in the event of a power failure, it can be implemented inexpensively and easily. In addition, the appropriate operating condition range for each operation process regarding pressure and temperature includes pressure resistance of the experiment and adsorption / desorption tower 4, operating pressure of the ozone generator (set pressure of the pipe L1 during the adsorption storage process), water flow ejector 7 The vacuum ultimate pressure, the set temperature of the cold source 5, the set temperature of the heating source 6, the heat of adsorption / desorption of ozone with respect to silica gel, etc.

  As described above, even when the power supply to the apparatus is stopped or the pressure or temperature of the adsorption / desorption tower 4 deviates from the appropriate range during operation and the operation becomes abnormal, the power supply state to the apparatus, the adsorption / desorption tower 4 The pressure and temperature are automatically measured, and the open / close state or opening degree of the switching valve 9 is controlled based on these measurement signals and a predetermined operating state range at the time of the operating process, so that the adsorption / desorption tower 4 Since the ozone stored in the inside is extracted, even if the operation is abnormal, it is possible to prevent the ozone stored by adsorption from being rapidly decomposed and to operate safely. 17 to 19, the power supply state to the apparatus, the pressure and temperature in the adsorption / desorption tower 4 are simultaneously monitored as shown in FIG. It is possible to more accurately determine an abnormality in the operating state as compared with the devices of -12.

  In Reference Examples 13 to 16, the power supply state to the apparatus, the pressure in the adsorption / desorption tower 4 and the temperature are all automatically measured, but all of these measurement items are necessarily required. There is nothing, and it is possible to monitor the operating state with one or two of these items. However, in the case where the operation state is monitored only in the state of power supply to the apparatus, this is the same as in the first to fourth embodiments, so that case is naturally not included. The same applies to other reference examples.

Reference Example 17.
FIG. 21 is a block diagram showing an ozone production apparatus in Reference Example 17. In FIG. 21, reference numerals S5 to 11 denote signal lines, which connect the control circuit 15, the ozone generator 1, the circulation blower 3, the cooling heat source 5, and the switching valves 8a to 8d, respectively. S12 to S15 are also signal lines, and connect the control circuit 15, the heating source 6, and the switching valves 8e to 8g, respectively. Others are the same as FIG. 1, FIG. 5, FIG. 9, FIG.

  Next, the operation of the apparatus shown in FIG. 21 will be described. In this apparatus, as in the apparatus of FIG. 17, the power supply state to the apparatus is the power supply state monitor 14, the pressure inside the adsorption / desorption tower 4 is measured with the pressure gauge 16, and the temperature inside the adsorption / desorption tower 4 is further adjusted. The thermometer 17 constantly monitors, and based on the measurement signals obtained via the signal lines S1, S3 and S4, the control circuit 15 determines whether or not there is an abnormal operation, and these measured values are determined in advance. When deviating from the proper operating condition range, a signal is sent to the switching valve 9 via the signal line 2 to control the open / closed state or the opening degree of the switching valve 9. After that, the status of the apparatus is monitored by the power supply state monitor 14, the pressure gauge 16 of the adsorption / desorption tower 4 and the thermometer 17 of the adsorption / desorption tower 4, and these measured values are again determined as appropriate operating conditions. When returning to the range, the switching valve 9 is closed by the signal line 2, and the ozone generator 1, the circulation blower 3, the cooling source 5, the heating source 6, and the switching valves 8a to 8g are operated by the signal lines S5 to 15, Return to the original operating state.

  Thus, after the power supply to the apparatus is stopped or the pressure or temperature of the adsorption / desorption tower 4 deviates from the appropriate range during operation and the operation is abnormal, the switching valve 9 is operated to appropriately and safely deal with it. However, the power supply state to the apparatus, the pressure and temperature of the adsorption / desorption tower 4 are monitored, and when these measured values return to the predetermined normal range, the original operation state is automatically restored. In the event of a power failure or short-term, temporary pressure or temperature abnormality, the device can be safely operated without completely stopping the operation.

Reference Example 18.
FIG. 22 is a block diagram showing an ozone production apparatus in Reference Example 18. The configuration of the apparatus is such that, instead of the reducing agent reservoir 10 in Reference Example 17, the filler 11 and the ozonolysis unit 12 in Reference Example 2 are connected.

  Further, the operation of the apparatus of FIG. 22 is substantially the same as that of the apparatus of FIG. That is, the power supply state to the apparatus is constantly monitored by the power supply state monitor 14, and the pressure and temperature inside the adsorption / desorption tower 4 are constantly monitored by the pressure gauge 16 and the thermometer 17, and measurement signals from the signal lines S1, S3 and S4 are measured. The control circuit 15 determines whether or not there is an abnormal operation state, and when these measured values deviate from a predetermined appropriate operating condition range, a signal is sent to the switching valve 9 via the signal line 2. The open / close state or opening degree of the switching valve 9 is controlled. After that, the power supply state monitor 14, the pressure gauge 16 of the adsorption / desorption tower 4 and the thermometer 17 of the adsorption / desorption tower 4 monitor the status of the apparatus, and these measured values are again determined in proper operating conditions. When returning to the range, the switching valve 9 is closed by the signal line 2, and the ozone generator 1, the circulation blower 3, the cooling source 5, the heating source 6, and the switching valves 8a to 8g are operated by the signal lines S5 to 15, Return to the original operating state.

  Thus, after the power supply to the apparatus is stopped or the pressure or temperature of the adsorption / desorption tower 4 deviates from the appropriate range during operation and the operation is abnormal, the switching valve 9 is operated to appropriately and safely deal with it. However, the power supply state to the apparatus, the pressure and temperature of the adsorption / desorption tower 4 are monitored, and when these measured values return to the predetermined normal range, the original operation state is automatically restored. In the event of a power failure or short-term, temporary pressure or temperature abnormality, the device can be safely operated without completely stopping the operation.

Reference Example 19.
FIG. 23 is a block diagram showing an ozone production apparatus in Reference Example 19. As for the configuration of the apparatus, the control circuit 15 in the reference example 15 is connected to the ozone generator 1, the circulation blower 3, the cooling heat source 5, the heating source 6 and the switching valves 8a to 8g in the same manner as in the reference examples 17 to 18. .

  The operation of the apparatus of FIG. 23 is substantially the same as that of the apparatus of FIGS. 21 to 22, and the power supply state to the device, the pressure and temperature in the adsorption / desorption tower 4 are measured according to the power supply state monitor 14, 17 is constantly monitored, the control circuit 15 determines whether or not there is an abnormal operation state based on these measurement signals, and when these measurement values deviate from a predetermined appropriate operating condition range, the signal line S2 is used. A signal is sent to the switching valve 9 to control the open / closed state or opening of the switching valve 9. After that, the power supply state monitor 14, the pressure gauge 16 of the adsorption / desorption tower 4 and the thermometer 17 of the adsorption / desorption tower 4 monitor the status of the apparatus, and these measured values are again determined in proper operating conditions. When returning to the range, the switching valve 9 is closed by the signal line 2, and the ozone generator 1, the circulation blower 3, the cooling source 5, the heating source 6, and the switching valves 8a to 8g are operated by the signal lines S5 to 15, Return to the original operating state.

  Thus, after the power supply to the apparatus is stopped or the pressure or temperature of the adsorption / desorption tower 4 deviates from the appropriate range during operation and the operation is abnormal, the switching valve 9 is operated to appropriately and safely deal with it. However, the power supply state to the apparatus, the pressure and temperature of the adsorption / desorption tower 4 are monitored, and when these measured values return to the predetermined normal range, the original operation state is automatically restored. In the event of a power failure or short-term, temporary pressure or temperature abnormality, the device can be safely operated without completely stopping the operation.

Reference Example 20.
FIG. 24 is a block diagram showing an ozone production apparatus in Reference Example 20. As for the configuration of the apparatus, the control circuit 15 in the reference example 16 is connected to the ozone generator 1, the circulation blower 3, the cooling heat source 5, the heating source 6 and the switching valves 8a to 8g as in the reference examples 17 to 18. .

  The operation of the apparatus of FIG. 24 is substantially the same as that of the apparatus of FIGS. 21 to 23, and the power supply state to the device, the pressure and temperature in the adsorption / desorption tower 4 are determined based on the power supply state monitor 14, 17 is constantly monitored, the control circuit 15 determines whether or not there is an abnormal operation state based on these measurement signals, and when these measured values deviate from a predetermined appropriate operating condition range, the signal line 2 is used. A signal is sent to the switching valve 9 to control the open / closed state or opening of the switching valve 9. After that, the power supply state monitor 14, the pressure gauge 16 of the adsorption / desorption tower 4 and the thermometer 17 of the adsorption / desorption tower 4 monitor the status of the apparatus, and these measured values are again determined in proper operating conditions. When returning to the range, the switching valve 9 is closed by the signal line 2, and the ozone generator 1, the circulation blower 3, the cooling source 5, the heating source 6, and the switching valves 8a to 8g are operated by the signal lines S5 to 15, Return to the original operating state.

  Thus, after the power supply to the apparatus is stopped or the pressure or temperature of the adsorption / desorption tower 4 deviates from the appropriate range during operation and the operation is abnormal, the switching valve 9 is operated to appropriately and safely deal with it. However, the power supply state to the apparatus, the pressure and temperature of the adsorption / desorption tower 4 are monitored, and when these measured values return to the predetermined normal range, the original operation state is automatically restored. In the event of a power failure or short-term, temporary pressure or temperature abnormality, the device can be safely operated without completely stopping the operation.

  DESCRIPTION OF SYMBOLS 1 Ozone generator, 2 Oxygen supply source, 3 Circulation blower, 4 Adsorption / desorption tower, 5 Cooling heat source, 6 Heating source, 7 Water flow ejector, 8a-8g Switching valve, 9 Switching valve, 10 Reducing agent reservoir, 11 Filler , 12 Ozone decomposer, 13 gas reservoir, 14 power supply state monitor, 15 control circuit, 16 pressure gauge, 17 thermometer, La to Ld, L1 piping, S1 to S15 signal line.

Claims (3)

A method for producing ozone by an ozone production apparatus,
(A) generating ozonated oxygen using an ozone generator;
(B) adsorbing and storing ozone from the ozonated oxygen using an adsorption / desorption tower;
(C) a step of desorbing the adsorbed and stored ozone using a desorption means;
(D) monitoring the state of power supply to the ozone production apparatus;
(E) Switching that connects the adsorption / desorption tower and the desorption means when a power failure is detected in the step (d) and the inside of the adsorption / desorption tower is negative in the step (c) And a step of closing the valve. A method for producing ozone by an ozone production apparatus,
(A) generating ozonated oxygen using an ozone generator;
(B) adsorbing and storing ozone from the ozonated oxygen using an adsorption / desorption tower;
(C) a step of desorbing the adsorbed and stored ozone using a desorption means;
(D) monitoring the state of power supply to the ozone production apparatus;
(E) When a power failure is detected in the step (d) and the temperature of the adsorbent in the adsorption / desorption tower is increased in the step (c), a reducing agent reservoir, a filler or a gas And a step of opening a switching valve that connects the reservoir and the adsorption / desorption tower. A method for producing ozone, comprising: A method for producing ozone by an ozone production apparatus,
(A) generating ozonated oxygen using an ozone generator;
(B) adsorbing and storing ozone from the ozonated oxygen using an adsorption / desorption tower;
(C) a step of desorbing the adsorbed and stored ozone using a desorption means;
(D) monitoring the state of power supply to the ozone production apparatus;
(E) When a power failure is detected in the step (d) when the ozone production apparatus is in the step (b), a reducing agent reservoir after a certain period of time when the temperature in the adsorption / desorption tower starts to rise. And a step of opening a switching valve that connects the filler or the gas reservoir and the adsorption / desorption tower.

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