JPS5610787B2 - - Google Patents

Info

Publication number
JPS5610787B2
JPS5610787B2 JP14164377A JP14164377A JPS5610787B2 JP S5610787 B2 JPS5610787 B2 JP S5610787B2 JP 14164377 A JP14164377 A JP 14164377A JP 14164377 A JP14164377 A JP 14164377A JP S5610787 B2 JPS5610787 B2 JP S5610787B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14164377A
Other languages
Japanese (ja)
Other versions
JPS5474678A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14164377A priority Critical patent/JPS5474678A/en
Priority to US05/964,353 priority patent/US4213117A/en
Publication of JPS5474678A publication Critical patent/JPS5474678A/en
Publication of JPS5610787B2 publication Critical patent/JPS5610787B2/ja
Granted legal-status Critical Current

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  • Dicing (AREA)
JP14164377A 1977-11-28 1977-11-28 Detection method of chip location on semiconductor wafer Granted JPS5474678A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP14164377A JPS5474678A (en) 1977-11-28 1977-11-28 Detection method of chip location on semiconductor wafer
US05/964,353 US4213117A (en) 1977-11-28 1978-11-28 Method and apparatus for detecting positions of chips on a semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14164377A JPS5474678A (en) 1977-11-28 1977-11-28 Detection method of chip location on semiconductor wafer

Publications (2)

Publication Number Publication Date
JPS5474678A JPS5474678A (en) 1979-06-14
JPS5610787B2 true JPS5610787B2 (en) 1981-03-10

Family

ID=15296808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14164377A Granted JPS5474678A (en) 1977-11-28 1977-11-28 Detection method of chip location on semiconductor wafer

Country Status (1)

Country Link
JP (1) JPS5474678A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5742179A (en) * 1980-08-27 1982-03-09 Nec Corp Semiconductor device with recognition pattern
JPS5758332A (en) * 1980-09-24 1982-04-08 Fujitsu Ltd Manufacture of semiconductor device
JPS57113244A (en) * 1980-12-29 1982-07-14 Yoshie Hasegawa Inspecting device of wafer surface
JP6883456B2 (en) 2017-03-31 2021-06-09 Ｊｘ金属株式会社 Manufacturing method of laminates and molded products

Also Published As

Publication number Publication date
JPS5474678A (en) 1979-06-14

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