JPS5599058A - Humidity detecting element - Google Patents
Humidity detecting elementInfo
- Publication number
- JPS5599058A JPS5599058A JP776979A JP776979A JPS5599058A JP S5599058 A JPS5599058 A JP S5599058A JP 776979 A JP776979 A JP 776979A JP 776979 A JP776979 A JP 776979A JP S5599058 A JPS5599058 A JP S5599058A
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- humidity
- anode
- coupling agent
- silane coupling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Non-Adjustable Resistors (AREA)
Abstract
PURPOSE: To provide a compacted humidity detecting element with a high accuracy and a high responsiveness at a low cost by laminating a semiconductive metal oxide layer, a carbon layer and a cathode current collecting layer employing a condictive paste with added silane coupling agent in sequence on a humidity sensitive film of dielectric anode oxide film.
CONSTITUTION: A dierectric anode oxide film 2 is formed on the surface of a metal body 1 made of Ta, Ti and Al or the like by the anode oxidization or the like and superlaid with a semiconductive metal oxide film 3 having a contact section 5 and a non-contact space section 4. A carbon layer 6 and a cathode current collecting layer 7 employing a conductive paste added to by a silane coupling agent are formed on the surface thereof. Water in the air is absorbed by the humidity absorbing semiconductive metal oxide film 3 reaching the dielectric anode oxide film 2 to measure. The use of the conductive paste added to by a silane coupling agent for the anode current collecting layer 7 can prevent the secular deterioration in the performance of the dielement. Thus, a humidity detecting element having a long, stable humidity characteristics can be obtained.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP776979A JPS5599058A (en) | 1979-01-25 | 1979-01-25 | Humidity detecting element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP776979A JPS5599058A (en) | 1979-01-25 | 1979-01-25 | Humidity detecting element |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5599058A true JPS5599058A (en) | 1980-07-28 |
JPS6133372B2 JPS6133372B2 (en) | 1986-08-01 |
Family
ID=11674880
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP776979A Granted JPS5599058A (en) | 1979-01-25 | 1979-01-25 | Humidity detecting element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5599058A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4558393A (en) * | 1983-04-28 | 1985-12-10 | Sharp Kabushiki Kaisha | Moisture sensor |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5018894A (en) * | 1973-06-18 | 1975-02-27 | ||
JPS5254674U (en) * | 1975-10-17 | 1977-04-20 | ||
JPS5315589A (en) * | 1976-07-28 | 1978-02-13 | Tokushiyu Muki Zairiyou Kenkiy | Paste for thickkfilm circuit resistor |
-
1979
- 1979-01-25 JP JP776979A patent/JPS5599058A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5018894A (en) * | 1973-06-18 | 1975-02-27 | ||
JPS5254674U (en) * | 1975-10-17 | 1977-04-20 | ||
JPS5315589A (en) * | 1976-07-28 | 1978-02-13 | Tokushiyu Muki Zairiyou Kenkiy | Paste for thickkfilm circuit resistor |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4558393A (en) * | 1983-04-28 | 1985-12-10 | Sharp Kabushiki Kaisha | Moisture sensor |
Also Published As
Publication number | Publication date |
---|---|
JPS6133372B2 (en) | 1986-08-01 |
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