JPS5599035A - Method and apparatus for calibrating radiation thermometer - Google Patents

Method and apparatus for calibrating radiation thermometer

Info

Publication number
JPS5599035A
JPS5599035A JP791979A JP791979A JPS5599035A JP S5599035 A JPS5599035 A JP S5599035A JP 791979 A JP791979 A JP 791979A JP 791979 A JP791979 A JP 791979A JP S5599035 A JPS5599035 A JP S5599035A
Authority
JP
Japan
Prior art keywords
thermometer
temperature
test piece
calibrate
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP791979A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6111366B2 (enrdf_load_stackoverflow
Inventor
Tetsuo Kawamura
Hiroaki Emura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Nippon Steel Plant Designing Corp
Original Assignee
Nittetsu Plant Designing Corp
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nittetsu Plant Designing Corp, Nippon Steel Corp filed Critical Nittetsu Plant Designing Corp
Priority to JP791979A priority Critical patent/JPS5599035A/ja
Publication of JPS5599035A publication Critical patent/JPS5599035A/ja
Publication of JPS6111366B2 publication Critical patent/JPS6111366B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Radiation Pyrometers (AREA)
JP791979A 1979-01-25 1979-01-25 Method and apparatus for calibrating radiation thermometer Granted JPS5599035A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP791979A JPS5599035A (en) 1979-01-25 1979-01-25 Method and apparatus for calibrating radiation thermometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP791979A JPS5599035A (en) 1979-01-25 1979-01-25 Method and apparatus for calibrating radiation thermometer

Publications (2)

Publication Number Publication Date
JPS5599035A true JPS5599035A (en) 1980-07-28
JPS6111366B2 JPS6111366B2 (enrdf_load_stackoverflow) 1986-04-02

Family

ID=11678928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP791979A Granted JPS5599035A (en) 1979-01-25 1979-01-25 Method and apparatus for calibrating radiation thermometer

Country Status (1)

Country Link
JP (1) JPS5599035A (enrdf_load_stackoverflow)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054939U (ja) * 1983-09-22 1985-04-17 横河電機株式会社 放射温度測定装置
JPH02150730A (ja) * 1988-11-30 1990-06-11 Wakomu:Kk 加熱処理装置
US5762419A (en) * 1995-07-26 1998-06-09 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a thermal processing system
US5938335A (en) * 1996-04-08 1999-08-17 Applied Materials, Inc. Self-calibrating temperature probe
US6086245A (en) * 1995-07-26 2000-07-11 Applied Materials, Inc. Apparatus for infrared pyrometer calibration in a thermal processing system
US6179465B1 (en) 1996-03-28 2001-01-30 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a thermal processing system using multiple light sources
JP2006147943A (ja) * 2004-11-22 2006-06-08 Kokusai Electric Semiconductor Service Inc 基板処理装置及び半導体装置の製造方法
JP2006352145A (ja) * 2006-07-06 2006-12-28 Hitachi Kokusai Electric Inc 熱処理装置およびその装置に用いられる温度検出ユニット、半導体装置の製造方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6048368B2 (ja) * 2013-10-22 2016-12-21 Ｊｆｅスチール株式会社 放射温度計の校正装置及び校正方法

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054939U (ja) * 1983-09-22 1985-04-17 横河電機株式会社 放射温度測定装置
JPH02150730A (ja) * 1988-11-30 1990-06-11 Wakomu:Kk 加熱処理装置
US5762419A (en) * 1995-07-26 1998-06-09 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a thermal processing system
US6056433A (en) * 1995-07-26 2000-05-02 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a thermal processing system
US6086245A (en) * 1995-07-26 2000-07-11 Applied Materials, Inc. Apparatus for infrared pyrometer calibration in a thermal processing system
US6345909B1 (en) 1995-07-26 2002-02-12 Applied Materials, Inc. Apparatus for infrared pyrometer calibration in a thermal processing system
US6179465B1 (en) 1996-03-28 2001-01-30 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a thermal processing system using multiple light sources
US5938335A (en) * 1996-04-08 1999-08-17 Applied Materials, Inc. Self-calibrating temperature probe
JP2006147943A (ja) * 2004-11-22 2006-06-08 Kokusai Electric Semiconductor Service Inc 基板処理装置及び半導体装置の製造方法
JP2006352145A (ja) * 2006-07-06 2006-12-28 Hitachi Kokusai Electric Inc 熱処理装置およびその装置に用いられる温度検出ユニット、半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6111366B2 (enrdf_load_stackoverflow) 1986-04-02

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