JPS5599035A - Method and apparatus for calibrating radiation thermometer - Google Patents

Method and apparatus for calibrating radiation thermometer

Info

Publication number
JPS5599035A
JPS5599035A JP791979A JP791979A JPS5599035A JP S5599035 A JPS5599035 A JP S5599035A JP 791979 A JP791979 A JP 791979A JP 791979 A JP791979 A JP 791979A JP S5599035 A JPS5599035 A JP S5599035A
Authority
JP
Japan
Prior art keywords
thermometer
temperature
test piece
calibrate
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP791979A
Other languages
Japanese (ja)
Other versions
JPS6111366B2 (en
Inventor
Tetsuo Kawamura
Hiroaki Emura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Nippon Steel Plant Designing Corp
Original Assignee
Nittetsu Plant Designing Corp
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nittetsu Plant Designing Corp, Nippon Steel Corp filed Critical Nittetsu Plant Designing Corp
Priority to JP791979A priority Critical patent/JPS5599035A/en
Publication of JPS5599035A publication Critical patent/JPS5599035A/en
Publication of JPS6111366B2 publication Critical patent/JPS6111366B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/52—Radiation pyrometry, e.g. infrared or optical thermometry using comparison with reference sources, e.g. disappearing-filament pyrometer

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Radiation Pyrometers (AREA)

Abstract

PURPOSE:To calibrate a radiation thermometer, which is provided on a furnace wall, speedily and accurately with a simply-constructed means, by using an insertion unit containing a test piece and a thermocouple. CONSTITUTION:When measuring the temperature of an objective material 1, a test piece-inserted unit 8 is retracted into a case 7 so that the temperature of radiation from the material 1 is measured by a radiation thermometer 4 provided on a furnace wall 3. When it is necessary to calibrate the thermometer 4 in connection with a change in kind of the material 1, a sealing valve 6 is opened to extend the test piece- inserted unit 8 just under the thermometer 4. Then, the temperature of a calibration test piece 10, which has been set to a predetermined temperature beforehand, is measured by the thermometer 4. The temperature determined on the basis of an output from the thermometer 4 is compared with the temperature determined on the basis of an output from a thermocouple 11, to calibrate the indication in the thermometer 4.
JP791979A 1979-01-25 1979-01-25 Method and apparatus for calibrating radiation thermometer Granted JPS5599035A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP791979A JPS5599035A (en) 1979-01-25 1979-01-25 Method and apparatus for calibrating radiation thermometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP791979A JPS5599035A (en) 1979-01-25 1979-01-25 Method and apparatus for calibrating radiation thermometer

Publications (2)

Publication Number Publication Date
JPS5599035A true JPS5599035A (en) 1980-07-28
JPS6111366B2 JPS6111366B2 (en) 1986-04-02

Family

ID=11678928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP791979A Granted JPS5599035A (en) 1979-01-25 1979-01-25 Method and apparatus for calibrating radiation thermometer

Country Status (1)

Country Link
JP (1) JPS5599035A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054939U (en) * 1983-09-22 1985-04-17 横河電機株式会社 Radiation temperature measurement device
JPH02150730A (en) * 1988-11-30 1990-06-11 Wakomu:Kk Heating temperature measuring method, method and device for heat treatment
US5762419A (en) * 1995-07-26 1998-06-09 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a thermal processing system
US5938335A (en) * 1996-04-08 1999-08-17 Applied Materials, Inc. Self-calibrating temperature probe
US6086245A (en) * 1995-07-26 2000-07-11 Applied Materials, Inc. Apparatus for infrared pyrometer calibration in a thermal processing system
US6179465B1 (en) 1996-03-28 2001-01-30 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a thermal processing system using multiple light sources
JP2006147943A (en) * 2004-11-22 2006-06-08 Kokusai Electric Semiconductor Service Inc Substrate processor and semiconductor device manufacturing method
JP2006352145A (en) * 2006-07-06 2006-12-28 Hitachi Kokusai Electric Inc Heat treatment apparatus, temperature detection unit for use in the same, method of manufacturing semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6048368B2 (en) * 2013-10-22 2016-12-21 Ｊｆｅスチール株式会社 Radiation thermometer calibration device and calibration method

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054939U (en) * 1983-09-22 1985-04-17 横河電機株式会社 Radiation temperature measurement device
JPH0422276Y2 (en) * 1983-09-22 1992-05-21
JPH02150730A (en) * 1988-11-30 1990-06-11 Wakomu:Kk Heating temperature measuring method, method and device for heat treatment
US5762419A (en) * 1995-07-26 1998-06-09 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a thermal processing system
US6056433A (en) * 1995-07-26 2000-05-02 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a thermal processing system
US6086245A (en) * 1995-07-26 2000-07-11 Applied Materials, Inc. Apparatus for infrared pyrometer calibration in a thermal processing system
US6345909B1 (en) 1995-07-26 2002-02-12 Applied Materials, Inc. Apparatus for infrared pyrometer calibration in a thermal processing system
US6179465B1 (en) 1996-03-28 2001-01-30 Applied Materials, Inc. Method and apparatus for infrared pyrometer calibration in a thermal processing system using multiple light sources
US5938335A (en) * 1996-04-08 1999-08-17 Applied Materials, Inc. Self-calibrating temperature probe
JP2006147943A (en) * 2004-11-22 2006-06-08 Kokusai Electric Semiconductor Service Inc Substrate processor and semiconductor device manufacturing method
JP2006352145A (en) * 2006-07-06 2006-12-28 Hitachi Kokusai Electric Inc Heat treatment apparatus, temperature detection unit for use in the same, method of manufacturing semiconductor device

Also Published As

Publication number Publication date
JPS6111366B2 (en) 1986-04-02

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