JPS559462B2 - - Google Patents

Info

Publication number
JPS559462B2
JPS559462B2 JP11021875A JP11021875A JPS559462B2 JP S559462 B2 JPS559462 B2 JP S559462B2 JP 11021875 A JP11021875 A JP 11021875A JP 11021875 A JP11021875 A JP 11021875A JP S559462 B2 JPS559462 B2 JP S559462B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11021875A
Other languages
Japanese (ja)
Other versions
JPS5233847A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50110218A priority Critical patent/JPS5233847A/ja
Publication of JPS5233847A publication Critical patent/JPS5233847A/ja
Publication of JPS559462B2 publication Critical patent/JPS559462B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP50110218A 1975-09-10 1975-09-10 Method of etching gallium phosphate and etching liquid therefor Granted JPS5233847A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50110218A JPS5233847A (en) 1975-09-10 1975-09-10 Method of etching gallium phosphate and etching liquid therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50110218A JPS5233847A (en) 1975-09-10 1975-09-10 Method of etching gallium phosphate and etching liquid therefor

Publications (2)

Publication Number Publication Date
JPS5233847A JPS5233847A (en) 1977-03-15
JPS559462B2 true JPS559462B2 (cs) 1980-03-10

Family

ID=14530058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50110218A Granted JPS5233847A (en) 1975-09-10 1975-09-10 Method of etching gallium phosphate and etching liquid therefor

Country Status (1)

Country Link
JP (1) JPS5233847A (cs)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658238A (en) * 1979-10-17 1981-05-21 Semiconductor Res Found Etching liquid
JPS5658237A (en) * 1979-10-17 1981-05-21 Semiconductor Res Found Light control type etching method

Also Published As

Publication number Publication date
JPS5233847A (en) 1977-03-15

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