JPS5233847A - Method of etching gallium phosphate and etching liquid therefor - Google Patents
Method of etching gallium phosphate and etching liquid thereforInfo
- Publication number
- JPS5233847A JPS5233847A JP11021875A JP11021875A JPS5233847A JP S5233847 A JPS5233847 A JP S5233847A JP 11021875 A JP11021875 A JP 11021875A JP 11021875 A JP11021875 A JP 11021875A JP S5233847 A JPS5233847 A JP S5233847A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- gallium phosphate
- liquid therefor
- etching liquid
- therefor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11021875A JPS5233847A (en) | 1975-09-10 | 1975-09-10 | Method of etching gallium phosphate and etching liquid therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11021875A JPS5233847A (en) | 1975-09-10 | 1975-09-10 | Method of etching gallium phosphate and etching liquid therefor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5233847A true JPS5233847A (en) | 1977-03-15 |
JPS559462B2 JPS559462B2 (en) | 1980-03-10 |
Family
ID=14530058
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11021875A Granted JPS5233847A (en) | 1975-09-10 | 1975-09-10 | Method of etching gallium phosphate and etching liquid therefor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5233847A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5658237A (en) * | 1979-10-17 | 1981-05-21 | Semiconductor Res Found | Light control type etching method |
JPS5658238A (en) * | 1979-10-17 | 1981-05-21 | Semiconductor Res Found | Etching liquid |
-
1975
- 1975-09-10 JP JP11021875A patent/JPS5233847A/en active Granted
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5658237A (en) * | 1979-10-17 | 1981-05-21 | Semiconductor Res Found | Light control type etching method |
JPS5658238A (en) * | 1979-10-17 | 1981-05-21 | Semiconductor Res Found | Etching liquid |
JPH0133934B2 (en) * | 1979-10-17 | 1989-07-17 | Handotai Kenkyu Shinkokai | |
JPH044750B2 (en) * | 1979-10-17 | 1992-01-29 |
Also Published As
Publication number | Publication date |
---|---|
JPS559462B2 (en) | 1980-03-10 |
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