JPS5594044U - - Google Patents

Info

Publication number
JPS5594044U
JPS5594044U JP18016778U JP18016778U JPS5594044U JP S5594044 U JPS5594044 U JP S5594044U JP 18016778 U JP18016778 U JP 18016778U JP 18016778 U JP18016778 U JP 18016778U JP S5594044 U JPS5594044 U JP S5594044U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18016778U
Other languages
Japanese (ja)
Other versions
JPS6138182Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978180167U priority Critical patent/JPS6138182Y2/ja
Publication of JPS5594044U publication Critical patent/JPS5594044U/ja
Application granted granted Critical
Publication of JPS6138182Y2 publication Critical patent/JPS6138182Y2/ja
Expired legal-status Critical Current

Links

JP1978180167U 1978-12-23 1978-12-23 Expired JPS6138182Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978180167U JPS6138182Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-12-23 1978-12-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978180167U JPS6138182Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-12-23 1978-12-23

Publications (2)

Publication Number Publication Date
JPS5594044U true JPS5594044U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-06-30
JPS6138182Y2 JPS6138182Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-11-05

Family

ID=29191837

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978180167U Expired JPS6138182Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1978-12-23 1978-12-23

Country Status (1)

Country Link
JP (1) JPS6138182Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134834A (ja) * 1983-01-21 1984-08-02 Mitsubishi Electric Corp 半導体ウエハの洗浄装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52115185A (en) * 1976-03-24 1977-09-27 Hitachi Ltd Vapor phase growing apparatus
JPS53116071A (en) * 1977-03-22 1978-10-11 Hitachi Ltd Manufacture for semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52115185A (en) * 1976-03-24 1977-09-27 Hitachi Ltd Vapor phase growing apparatus
JPS53116071A (en) * 1977-03-22 1978-10-11 Hitachi Ltd Manufacture for semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59134834A (ja) * 1983-01-21 1984-08-02 Mitsubishi Electric Corp 半導体ウエハの洗浄装置

Also Published As

Publication number Publication date
JPS6138182Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-11-05

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