JPS5593264A - Manufacture of two-phase driving-type charge coupled device - Google Patents

Manufacture of two-phase driving-type charge coupled device

Info

Publication number
JPS5593264A
JPS5593264A JP73779A JP73779A JPS5593264A JP S5593264 A JPS5593264 A JP S5593264A JP 73779 A JP73779 A JP 73779A JP 73779 A JP73779 A JP 73779A JP S5593264 A JPS5593264 A JP S5593264A
Authority
JP
Japan
Prior art keywords
layer
films
sio2
film
transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP73779A
Other languages
English (en)
Inventor
Nobuo Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP73779A priority Critical patent/JPS5593264A/ja
Publication of JPS5593264A publication Critical patent/JPS5593264A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/823406—Combination of charge coupled devices, i.e. CCD, or BBD

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP73779A 1979-01-10 1979-01-10 Manufacture of two-phase driving-type charge coupled device Pending JPS5593264A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP73779A JPS5593264A (en) 1979-01-10 1979-01-10 Manufacture of two-phase driving-type charge coupled device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP73779A JPS5593264A (en) 1979-01-10 1979-01-10 Manufacture of two-phase driving-type charge coupled device

Publications (1)

Publication Number Publication Date
JPS5593264A true JPS5593264A (en) 1980-07-15

Family

ID=11482028

Family Applications (1)

Application Number Title Priority Date Filing Date
JP73779A Pending JPS5593264A (en) 1979-01-10 1979-01-10 Manufacture of two-phase driving-type charge coupled device

Country Status (1)

Country Link
JP (1) JPS5593264A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62126672A (ja) * 1985-11-27 1987-06-08 Mitsubishi Electric Corp 電荷転送装置の製造方法
US5385860A (en) * 1991-11-26 1995-01-31 Sharp Kabushiki Kaisha Charge transfer device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62126672A (ja) * 1985-11-27 1987-06-08 Mitsubishi Electric Corp 電荷転送装置の製造方法
US5385860A (en) * 1991-11-26 1995-01-31 Sharp Kabushiki Kaisha Charge transfer device

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