JPS559125A - Measuring apparatus - Google Patents

Measuring apparatus

Info

Publication number
JPS559125A
JPS559125A JP8172178A JP8172178A JPS559125A JP S559125 A JPS559125 A JP S559125A JP 8172178 A JP8172178 A JP 8172178A JP 8172178 A JP8172178 A JP 8172178A JP S559125 A JPS559125 A JP S559125A
Authority
JP
Japan
Prior art keywords
light
scanning
detecter
counter
path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8172178A
Other languages
Japanese (ja)
Inventor
Kazuo Takashima
Minoru Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8172178A priority Critical patent/JPS559125A/en
Publication of JPS559125A publication Critical patent/JPS559125A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE: To perform measurement regardless of the scanning speed by providing grid type filter in the parallel scanning path of light.
CONSTITUTION: Laser light originating from the light source 1 forms a parallel scanning path of light by the scanning mirror 3 and the parabolic mirror 4, and is detected by the photoelectric detecter 7 after passing thru the grid filter 10 (size thereof is space frequency N/mm) and lens 6 both being provided in the scanning path of light. The counter memorizes the number of pulses outputted by the detecter 7. The counter performs down-count by the pulses outputted by the detecter 7 of the time when the object 8 which is to be measured is inserted into the parallel path of light, and the width W of the object is measured with high accuracy regardless of the scanning speed by dividing the subtracted value of the counter by frequency N.
COPYRIGHT: (C)1980,JPO&Japio
JP8172178A 1978-07-04 1978-07-04 Measuring apparatus Pending JPS559125A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8172178A JPS559125A (en) 1978-07-04 1978-07-04 Measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8172178A JPS559125A (en) 1978-07-04 1978-07-04 Measuring apparatus

Publications (1)

Publication Number Publication Date
JPS559125A true JPS559125A (en) 1980-01-23

Family

ID=13754271

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8172178A Pending JPS559125A (en) 1978-07-04 1978-07-04 Measuring apparatus

Country Status (1)

Country Link
JP (1) JPS559125A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS559125U (en) * 1978-06-30 1980-01-21

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS559125U (en) * 1978-06-30 1980-01-21

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