JPS5588845A - Sodium sulfate with hydrogen fluoride absorbed and production thereof - Google Patents
Sodium sulfate with hydrogen fluoride absorbed and production thereofInfo
- Publication number
- JPS5588845A JPS5588845A JP16282878A JP16282878A JPS5588845A JP S5588845 A JPS5588845 A JP S5588845A JP 16282878 A JP16282878 A JP 16282878A JP 16282878 A JP16282878 A JP 16282878A JP S5588845 A JPS5588845 A JP S5588845A
- Authority
- JP
- Japan
- Prior art keywords
- hydrogen fluoride
- sodium sulfate
- absorbed
- production
- agent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Solid-Sorbent Or Filter-Aiding Compositions (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
PURPOSE: To obtain a hydrogen fluoride feeding agent attended with no danger in storage and handling by allowing hydrogen fluoride to be absorbed in sodium sulfate.
CONSTITUTION: HF of mixed gas of HF and inert gas is contacted to Na2SO4 to allow the HF to be stably absorbed into the Na2SO4, thus obtaining a HF feeding agent easy to handle. When this agent is used in fluorination reaction or etching of a semiconductor, etc., the HF is desorbed under reduced press. or by heating. NaF and sulfuric acid may be reacted while cooling to give such an HF feeding agent.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16282878A JPS5588845A (en) | 1978-12-27 | 1978-12-27 | Sodium sulfate with hydrogen fluoride absorbed and production thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16282878A JPS5588845A (en) | 1978-12-27 | 1978-12-27 | Sodium sulfate with hydrogen fluoride absorbed and production thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5588845A true JPS5588845A (en) | 1980-07-04 |
Family
ID=15762000
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16282878A Pending JPS5588845A (en) | 1978-12-27 | 1978-12-27 | Sodium sulfate with hydrogen fluoride absorbed and production thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5588845A (en) |
-
1978
- 1978-12-27 JP JP16282878A patent/JPS5588845A/en active Pending
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