JPS5588845A - Sodium sulfate with hydrogen fluoride absorbed and production thereof - Google Patents

Sodium sulfate with hydrogen fluoride absorbed and production thereof

Info

Publication number
JPS5588845A
JPS5588845A JP16282878A JP16282878A JPS5588845A JP S5588845 A JPS5588845 A JP S5588845A JP 16282878 A JP16282878 A JP 16282878A JP 16282878 A JP16282878 A JP 16282878A JP S5588845 A JPS5588845 A JP S5588845A
Authority
JP
Japan
Prior art keywords
hydrogen fluoride
sodium sulfate
absorbed
production
agent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16282878A
Other languages
Japanese (ja)
Inventor
Ichiro Morioka
Shigeyoshi Ogawa
Satoru Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daikin Industries Ltd
Original Assignee
Daikin Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daikin Industries Ltd filed Critical Daikin Industries Ltd
Priority to JP16282878A priority Critical patent/JPS5588845A/en
Publication of JPS5588845A publication Critical patent/JPS5588845A/en
Pending legal-status Critical Current

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  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

PURPOSE: To obtain a hydrogen fluoride feeding agent attended with no danger in storage and handling by allowing hydrogen fluoride to be absorbed in sodium sulfate.
CONSTITUTION: HF of mixed gas of HF and inert gas is contacted to Na2SO4 to allow the HF to be stably absorbed into the Na2SO4, thus obtaining a HF feeding agent easy to handle. When this agent is used in fluorination reaction or etching of a semiconductor, etc., the HF is desorbed under reduced press. or by heating. NaF and sulfuric acid may be reacted while cooling to give such an HF feeding agent.
COPYRIGHT: (C)1980,JPO&Japio
JP16282878A 1978-12-27 1978-12-27 Sodium sulfate with hydrogen fluoride absorbed and production thereof Pending JPS5588845A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16282878A JPS5588845A (en) 1978-12-27 1978-12-27 Sodium sulfate with hydrogen fluoride absorbed and production thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16282878A JPS5588845A (en) 1978-12-27 1978-12-27 Sodium sulfate with hydrogen fluoride absorbed and production thereof

Publications (1)

Publication Number Publication Date
JPS5588845A true JPS5588845A (en) 1980-07-04

Family

ID=15762000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16282878A Pending JPS5588845A (en) 1978-12-27 1978-12-27 Sodium sulfate with hydrogen fluoride absorbed and production thereof

Country Status (1)

Country Link
JP (1) JPS5588845A (en)

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