JPS5580706A - Production of silicon nitride film - Google Patents
Production of silicon nitride filmInfo
- Publication number
- JPS5580706A JPS5580706A JP15374078A JP15374078A JPS5580706A JP S5580706 A JPS5580706 A JP S5580706A JP 15374078 A JP15374078 A JP 15374078A JP 15374078 A JP15374078 A JP 15374078A JP S5580706 A JPS5580706 A JP S5580706A
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- nitride film
- torr
- dichlorosilane
- press
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE: To obtain a high quality silicon nitride film useful in manufacture of a semiconductor on a solid substrate by reacting ammonia and dichlorosilane under reduced press. at a specified temp. to form the film on the substrate.
CONSTITUTION: Ammonia and dichlorosilane are reacted in a dichlorosilane to ammonia molar ratio of 1.0 or less under reduced press. at 800W900°C to form a silicon nitride film on a solid substrate pref. under a forming press. of 80W600mm Torr. In case the forming press. is below 80mm Torr, the film growing speed is low. Considering the uniformity of deposits. it is desirable to adopt a forming press. of 600mm Torr or below under which the average free process of gas particles is well large.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15374078A JPS5580706A (en) | 1978-12-14 | 1978-12-14 | Production of silicon nitride film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15374078A JPS5580706A (en) | 1978-12-14 | 1978-12-14 | Production of silicon nitride film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5580706A true JPS5580706A (en) | 1980-06-18 |
Family
ID=15569060
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15374078A Pending JPS5580706A (en) | 1978-12-14 | 1978-12-14 | Production of silicon nitride film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5580706A (en) |
-
1978
- 1978-12-14 JP JP15374078A patent/JPS5580706A/en active Pending
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